SG11201504585QA - Method and apparatus for conducting automated integrated circuit analysis - Google Patents

Method and apparatus for conducting automated integrated circuit analysis

Info

Publication number
SG11201504585QA
SG11201504585QA SG11201504585QA SG11201504585QA SG11201504585QA SG 11201504585Q A SG11201504585Q A SG 11201504585QA SG 11201504585Q A SG11201504585Q A SG 11201504585QA SG 11201504585Q A SG11201504585Q A SG 11201504585QA SG 11201504585Q A SG11201504585Q A SG 11201504585QA
Authority
SG
Singapore
Prior art keywords
integrated circuit
circuit analysis
automated integrated
conducting automated
conducting
Prior art date
Application number
SG11201504585QA
Other languages
English (en)
Inventor
David S Stoker
Erik Frank Matlin
Motilal Agrawal
James R Potthast
Neil William Troy
Original Assignee
Stanford Res Inst Int
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanford Res Inst Int filed Critical Stanford Res Inst Int
Publication of SG11201504585QA publication Critical patent/SG11201504585QA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/39—Circuit design at the physical level
    • G06F30/398—Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM]

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Toxicology (AREA)
  • Electromagnetism (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
SG11201504585QA 2012-12-14 2013-11-21 Method and apparatus for conducting automated integrated circuit analysis SG11201504585QA (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201261737516P 2012-12-14 2012-12-14
US201361772712P 2013-03-05 2013-03-05
US14/066,111 US10180402B2 (en) 2012-12-14 2013-10-29 Method and apparatus for conducting automated integrated circuit analysis
PCT/US2013/071231 WO2014105304A2 (en) 2012-12-14 2013-11-21 Method and apparatus for conducting automated integrated circuit analysis

Publications (1)

Publication Number Publication Date
SG11201504585QA true SG11201504585QA (en) 2015-07-30

Family

ID=50931901

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201504585QA SG11201504585QA (en) 2012-12-14 2013-11-21 Method and apparatus for conducting automated integrated circuit analysis

Country Status (5)

Country Link
US (1) US10180402B2 (https=)
EP (1) EP2932283A4 (https=)
JP (1) JP2016506623A (https=)
SG (1) SG11201504585QA (https=)
WO (1) WO2014105304A2 (https=)

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JP6281193B2 (ja) * 2013-05-30 2018-02-21 ソニー株式会社 レーザー走査型顕微鏡システム
JP2016109673A (ja) * 2014-10-16 2016-06-20 ディーシージー システムズ、 インコーポレイテッドＤｃｇ Ｓｙｓｔｅｍｓ Ｉｎｃ． レーザボルテージイメージングのシステム及び方法
US10386409B2 (en) 2015-09-15 2019-08-20 International Business Machines Corporation Non-destructive determination of components of integrated circuits
US10282510B2 (en) * 2017-04-07 2019-05-07 Fei Company Alignment of CAD data to images in high resolution optical fault analysis
US10768211B2 (en) * 2017-08-25 2020-09-08 Oracle International Corporation System and method for current sense resistor compensation
CN108613967B (zh) * 2018-08-09 2020-12-08 江苏师范大学 一种拉曼光谱测试系统
KR102594414B1 (ko) * 2018-10-24 2023-10-30 삼성전자주식회사 프로브 장치 및 이를 포함하는 테스트 장치
JP7173937B2 (ja) 2019-08-08 2022-11-16 株式会社日立ハイテク 荷電粒子線装置
JP7159128B2 (ja) 2019-08-08 2022-10-24 株式会社日立ハイテク 荷電粒子線装置
JP7189103B2 (ja) * 2019-08-30 2022-12-13 株式会社日立ハイテク 荷電粒子線装置
CN113030713B (zh) * 2021-03-05 2021-11-09 中国科学院国家空间科学中心 一种激光探测集成电路内部电平状态的系统
WO2022191958A1 (en) * 2021-03-12 2022-09-15 Battelle Memorial Institute Systems and methods for backside optical carrier injection into microelectronic devices
CA3221531A1 (en) 2021-06-08 2022-12-15 Thomas F. Kent High resolution imaging of microelectronic devices

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US5430305A (en) * 1994-04-08 1995-07-04 The United States Of America As Represented By The United States Department Of Energy Light-induced voltage alteration for integrated circuit analysis
CA2216900C (en) * 1996-10-01 2001-12-04 Semiconductor Insights Inc. Method to extract circuit information
US5905577A (en) 1997-03-15 1999-05-18 Schlumberger Technologies, Inc. Dual-laser voltage probing of IC's
JP2000323786A (ja) * 1999-05-14 2000-11-24 Fujitsu Ltd 信号光の波形整形のための方法、装置及びシステム
US6496261B1 (en) 1999-09-24 2002-12-17 Schlumberger Technologies, Inc. Double-pulsed optical interferometer for waveform probing of integrated circuits
US6549022B1 (en) * 2000-06-02 2003-04-15 Sandia Corporation Apparatus and method for analyzing functional failures in integrated circuits
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US6894518B1 (en) * 2002-03-29 2005-05-17 Advanced Micro Devices, Inc. Circuit analysis and manufacture using electric field-induced effects
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US7503021B2 (en) 2002-12-17 2009-03-10 International Business Machines Corporation Integrated circuit diagnosing method, system, and program product
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US7453579B2 (en) * 2004-09-27 2008-11-18 Idc, Llc Measurement of the dynamic characteristics of interferometric modulators
US20060103378A1 (en) 2004-11-12 2006-05-18 Nader Pakdaman Apparatus and method for dynamic diagnostic testing of integrated circuits
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US9361533B2 (en) * 2011-11-16 2016-06-07 Dcg Systems, Inc. Apparatus and method for polarization diversity imaging and alignment

Also Published As

Publication number Publication date
EP2932283A2 (en) 2015-10-21
WO2014105304A3 (en) 2014-10-23
US20140172345A1 (en) 2014-06-19
WO2014105304A2 (en) 2014-07-03
EP2932283A4 (en) 2016-08-24
JP2016506623A (ja) 2016-03-03
US10180402B2 (en) 2019-01-15

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