SG11201405610PA - Trace gas concentration in art ms traps - Google Patents

Trace gas concentration in art ms traps

Info

Publication number
SG11201405610PA
SG11201405610PA SG11201405610PA SG11201405610PA SG11201405610PA SG 11201405610P A SG11201405610P A SG 11201405610PA SG 11201405610P A SG11201405610P A SG 11201405610PA SG 11201405610P A SG11201405610P A SG 11201405610PA SG 11201405610P A SG11201405610P A SG 11201405610PA
Authority
SG
Singapore
Prior art keywords
traps
art
gas concentration
trace gas
trace
Prior art date
Application number
SG11201405610PA
Other languages
English (en)
Inventor
Gerardo A Brucker
Timothy C Swinney
G Jeffery Rathbone
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of SG11201405610PA publication Critical patent/SG11201405610PA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/64—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40—Concentrating samples
    • G01N1/405—Concentrating samples by adsorption or absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/4245—Electrostatic ion traps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/162—Direct photo-ionisation, e.g. single photon or multi-photon ionisation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
SG11201405610PA 2012-03-13 2013-03-13 Trace gas concentration in art ms traps SG11201405610PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261610092P 2012-03-13 2012-03-13
PCT/US2013/030801 WO2013138446A1 (en) 2012-03-13 2013-03-13 Trace gas concentration in art ms traps

Publications (1)

Publication Number Publication Date
SG11201405610PA true SG11201405610PA (en) 2014-11-27

Family

ID=49161755

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201405610PA SG11201405610PA (en) 2012-03-13 2013-03-13 Trace gas concentration in art ms traps

Country Status (7)

Country Link
US (1) US9714919B2 (https=)
EP (1) EP2825875B1 (https=)
JP (2) JP6570998B2 (https=)
KR (2) KR20140143403A (https=)
CN (1) CN104380099B (https=)
SG (1) SG11201405610PA (https=)
WO (1) WO2013138446A1 (https=)

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DE102013201499A1 (de) * 2013-01-30 2014-07-31 Carl Zeiss Microscopy Gmbh Verfahren zur massenspektrometrischen Untersuchung von Gasgemischen sowie Massenspektrometer hierzu
GB2527867B (en) * 2014-12-01 2016-06-29 Ion Science Ltd Detection of organics in water
EP3351920B1 (en) * 2015-09-18 2023-11-01 Panasonic Holdings Corporation Chemical substance concentrator and chemical substance detection device
CN111630624A (zh) * 2018-01-24 2020-09-04 拉皮斯坎系统股份有限公司 利用极紫外辐射源的表面层破坏和电离
GB201802917D0 (en) 2018-02-22 2018-04-11 Micromass Ltd Charge detection mass spectrometry
CN108479394B (zh) * 2018-03-14 2021-01-08 中国科学院近代物理研究所 痕量气体同位素富集系统和方法
JP2020088300A (ja) 2018-11-30 2020-06-04 株式会社リコー 酸化物形成用塗布液、酸化物膜の製造方法、及び電界効果型トランジスタの製造方法
GB2592653B (en) * 2020-03-05 2022-12-28 Edwards Vacuum Llc Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump
WO2021207494A1 (en) 2020-04-09 2021-10-14 Waters Technologies Corporation Ion detector
WO2023111707A1 (en) 2021-12-15 2023-06-22 Waters Technologies Corporation An inductive detector with integrated amplifier

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IT1183682B (it) * 1985-05-24 1987-10-22 Getters Spa Compressore chimico e purificatore per isotopi di idrogeno
US4785666A (en) * 1986-12-19 1988-11-22 Martin Marietta Corporation Method of increasing the sensitivity of a leak detector in the probe mode
US5142143A (en) 1990-10-31 1992-08-25 Extrel Corporation Method and apparatus for preconcentration for analysis purposes of trace constitutes in gases
US5426300A (en) 1993-09-17 1995-06-20 Leybold Inficon, Inc. Portable GCMS system using getter pump
US6211516B1 (en) 1999-02-09 2001-04-03 Syagen Technology Photoionization mass spectrometer
US6326615B1 (en) * 1999-08-30 2001-12-04 Syagen Technology Rapid response mass spectrometer system
US6545268B1 (en) 2000-04-10 2003-04-08 Perseptive Biosystems Preparation of ion pulse for time-of-flight and for tandem time-of-flight mass analysis
EP1291651A4 (en) * 2000-06-14 2009-03-25 Mitsubishi Heavy Ind Ltd DEVICE FOR DETECTING CHEMICAL SUBSTANCE AND METHOD FOR MEASURING THE CONCENTRATION OF THIS CHEMICAL SUBSTANCE
DE60140314D1 (de) * 2000-12-14 2009-12-10 Mks Instr Inc Ionenspeicher
JP3572256B2 (ja) * 2000-12-19 2004-09-29 三菱重工業株式会社 化学物質検出装置
US7034292B1 (en) 2002-05-31 2006-04-25 Analytica Of Branford, Inc. Mass spectrometry with segmented RF multiple ion guides in various pressure regions
GB0404285D0 (en) 2004-02-26 2004-03-31 Shimadzu Res Lab Europe Ltd A tandem ion-trap time-of flight mass spectrometer
CN1811408B (zh) 2005-01-28 2010-04-28 方向 内部光电离离子阱质量分析装置及其方法
US7476852B2 (en) 2005-05-17 2009-01-13 Honeywell International Inc. Ionization-based detection
GB0526245D0 (en) * 2005-12-22 2006-02-01 Shimadzu Res Lab Europe Ltd A mass spectrometer using a dynamic pressure ion source
GB0607542D0 (en) 2006-04-13 2006-05-24 Thermo Finnigan Llc Mass spectrometer
TWI484529B (zh) 2006-11-13 2015-05-11 Mks Instr Inc 離子阱質譜儀、利用其得到質譜之方法、離子阱、捕捉離子阱內之離子之方法和設備
CN101320016A (zh) * 2008-01-29 2008-12-10 复旦大学 一种用多个离子阱进行串级质谱分析的方法
JP5449701B2 (ja) * 2008-05-28 2014-03-19 株式会社日立ハイテクノロジーズ 質量分析計
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ITMI20090402A1 (it) * 2009-03-17 2010-09-18 Getters Spa Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
JP5688494B2 (ja) * 2009-05-06 2015-03-25 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 静電型イオントラップ
WO2011026228A1 (en) 2009-09-04 2011-03-10 Dh Technologies Development Pte. Ltd. Method, system and apparatus for filtering ions in a mass spectrometer

Also Published As

Publication number Publication date
WO2013138446A1 (en) 2013-09-19
EP2825875B1 (en) 2019-05-08
JP2015511708A (ja) 2015-04-20
EP2825875A1 (en) 2015-01-21
CN104380099A (zh) 2015-02-25
CN104380099B (zh) 2017-08-25
JP2018136335A (ja) 2018-08-30
KR20180081633A (ko) 2018-07-16
EP2825875A4 (en) 2016-05-04
KR20140143403A (ko) 2014-12-16
JP6570998B2 (ja) 2019-09-04
JP6667571B2 (ja) 2020-03-18
US9714919B2 (en) 2017-07-25
US20150028882A1 (en) 2015-01-29

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