SG11201400776YA - Carousel carrier for a vacuum treatment installation - Google Patents
Carousel carrier for a vacuum treatment installationInfo
- Publication number
- SG11201400776YA SG11201400776YA SG11201400776YA SG11201400776YA SG11201400776YA SG 11201400776Y A SG11201400776Y A SG 11201400776YA SG 11201400776Y A SG11201400776Y A SG 11201400776YA SG 11201400776Y A SG11201400776Y A SG 11201400776YA SG 11201400776Y A SG11201400776Y A SG 11201400776YA
- Authority
- SG
- Singapore
- Prior art keywords
- vacuum treatment
- treatment installation
- carousel carrier
- carousel
- carrier
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
- B23Q7/02—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of drums or rotating tables or discs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical Vapour Deposition (AREA)
- Handcart (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102011113563A DE102011113563A1 (de) | 2011-09-19 | 2011-09-19 | Karussellschlitten für Vakuumbehandlungsanlage |
| PCT/EP2012/003625 WO2013041179A1 (de) | 2011-09-19 | 2012-08-29 | Karussellschlitten für vakuumbehandlungsanlage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201400776YA true SG11201400776YA (en) | 2014-09-26 |
Family
ID=46801424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201400776YA SG11201400776YA (en) | 2011-09-19 | 2012-08-29 | Carousel carrier for a vacuum treatment installation |
Country Status (16)
| Country | Link |
|---|---|
| US (1) | US9527179B2 (de) |
| EP (1) | EP2758562B1 (de) |
| JP (1) | JP6208132B2 (de) |
| KR (1) | KR102028768B1 (de) |
| CN (1) | CN103797154B (de) |
| AR (1) | AR087906A1 (de) |
| CA (1) | CA2849024C (de) |
| DE (1) | DE102011113563A1 (de) |
| ES (1) | ES2554683T3 (de) |
| HU (1) | HUE026486T2 (de) |
| MX (1) | MX349213B (de) |
| MY (1) | MY175540A (de) |
| PL (1) | PL2758562T3 (de) |
| RU (1) | RU2606105C2 (de) |
| SG (1) | SG11201400776YA (de) |
| WO (1) | WO2013041179A1 (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018228754A1 (de) | 2017-06-14 | 2018-12-20 | Vat Holding Ag | Anordnung mit einer ersten kammer und zumindest einer zweiten kammer |
| CA3139354A1 (en) | 2019-05-07 | 2020-11-12 | Oerlikon Surface Solutions Ag, Pfaffikon | Movable work piece carrier device for holding work pieces to be treated |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1200620A (en) * | 1915-06-07 | 1916-10-10 | Francis T Johnson | Driving mechanism. |
| US1363906A (en) * | 1918-01-08 | 1920-12-28 | Nilson Leonard | Gear transmission |
| US2033303A (en) * | 1933-10-04 | 1936-03-10 | Frank J Ross | Jig clamping device |
| US3103122A (en) * | 1960-07-20 | 1963-09-10 | Western Electric Co | Reversible drives for threaded connectors |
| SU475428A1 (ru) * | 1972-06-28 | 1975-06-30 | Предприятие П/Я Х-5594 | Устройство дл вакуумного напылени слоев |
| US4776744A (en) * | 1985-09-09 | 1988-10-11 | Applied Materials, Inc. | Systems and methods for wafer handling in semiconductor process equipment |
| SU1405361A1 (ru) * | 1985-12-27 | 1992-08-30 | Предприятие П/Я Ю-9192 | Устройство дл ионно-плазменной обработки подложек в вакууме |
| US4960006A (en) * | 1988-09-19 | 1990-10-02 | General Electric Company | Turning gear engagement device |
| JPH03253566A (ja) * | 1990-03-02 | 1991-11-12 | Shin Meiwa Ind Co Ltd | スパッタリング装置 |
| US5186594A (en) * | 1990-04-19 | 1993-02-16 | Applied Materials, Inc. | Dual cassette load lock |
| JP2702261B2 (ja) * | 1990-05-23 | 1998-01-21 | シャープ株式会社 | ファクシミリ装置 |
| SU1824458A1 (en) * | 1991-05-06 | 1993-06-30 | Nii Vychislitelnoj Tekhn | Apparatus for application of coatings |
| JPH07305165A (ja) * | 1994-05-02 | 1995-11-21 | Sony Corp | スパッタリング装置 |
| US5538385A (en) * | 1994-06-24 | 1996-07-23 | Kensington Laboratories, Inc. | Specimen carrier holder and method of operating it |
| US5497844A (en) * | 1995-04-17 | 1996-03-12 | Mattel, Inc. | Crawler gear assembly |
| DE19549045C1 (de) | 1995-12-28 | 1997-06-05 | Jenoptik Jena Gmbh | Einrichtung zur Handhabung von scheibenförmigen Objekten |
| US5961798A (en) * | 1996-02-13 | 1999-10-05 | Diamond Black Technologies, Inc. | System and method for vacuum coating of articles having precise and reproducible positioning of articles |
| US5762873A (en) * | 1996-02-21 | 1998-06-09 | Biomerieux Vitek, Inc. | Automatic sample testing machine |
| US5855465A (en) * | 1996-04-16 | 1999-01-05 | Gasonics International | Semiconductor wafer processing carousel |
| US6521104B1 (en) * | 2000-05-22 | 2003-02-18 | Basic Resources, Inc. | Configurable vacuum system and method |
| DE10061628B4 (de) * | 2000-12-11 | 2006-06-08 | Leica Microsystems Wetzlar Gmbh | Vorrichtung und Verfahren zum Ergreifen und Transportieren von Wafern |
| US6726429B2 (en) * | 2002-02-19 | 2004-04-27 | Vertical Solutions, Inc. | Local store for a wafer processing station |
| WO2004074542A1 (de) * | 2003-02-18 | 2004-09-02 | Creavac-Creative Vakuumbeschichtung Gmbh | Hochvakuumbedampfungsanlage |
| EP1524329A1 (de) * | 2003-10-17 | 2005-04-20 | Platit AG | Modulare Vorrichtung zur Beschichtung von Oberflächen |
| ATE343220T1 (de) * | 2004-05-28 | 2006-11-15 | Applied Films Gmbh & Co Kg | Antriebsmechanismus für eine vakuum- behandlungsanlage |
| US7409263B2 (en) * | 2004-07-14 | 2008-08-05 | Applied Materials, Inc. | Methods and apparatus for repositioning support for a substrate carrier |
| KR100661908B1 (ko) * | 2005-02-07 | 2006-12-28 | 세메스 주식회사 | 기판 처리 장치 |
| WO2007025397A1 (de) * | 2005-08-29 | 2007-03-08 | Oerlikon Trading Ag, Trübbach | Werkstückträgereinrichtung |
| JP4781337B2 (ja) * | 2007-09-12 | 2011-09-28 | 株式会社昭和真空 | 成膜装置 |
| US8297098B2 (en) * | 2009-02-26 | 2012-10-30 | Belvac Production Machinery, Inc. | Dual ram assembly for necker machine |
| DE102010001218A1 (de) * | 2010-01-26 | 2011-07-28 | Esser, Stefan, Dr.-Ing., 52072 | Substratteller und Beschichtungsanlage zum Beschichten von Substraten |
-
2011
- 2011-09-19 DE DE102011113563A patent/DE102011113563A1/de not_active Withdrawn
-
2012
- 2012-08-29 EP EP12756100.9A patent/EP2758562B1/de active Active
- 2012-08-29 KR KR1020147006871A patent/KR102028768B1/ko active IP Right Grant
- 2012-08-29 PL PL12756100T patent/PL2758562T3/pl unknown
- 2012-08-29 HU HUE12756100A patent/HUE026486T2/en unknown
- 2012-08-29 US US14/345,492 patent/US9527179B2/en active Active
- 2012-08-29 CA CA2849024A patent/CA2849024C/en active Active
- 2012-08-29 SG SG11201400776YA patent/SG11201400776YA/en unknown
- 2012-08-29 RU RU2014115546A patent/RU2606105C2/ru active
- 2012-08-29 CN CN201280045556.1A patent/CN103797154B/zh active Active
- 2012-08-29 MY MYPI2014000731A patent/MY175540A/en unknown
- 2012-08-29 MX MX2014003359A patent/MX349213B/es active IP Right Grant
- 2012-08-29 ES ES12756100.9T patent/ES2554683T3/es active Active
- 2012-08-29 JP JP2014530109A patent/JP6208132B2/ja active Active
- 2012-08-29 WO PCT/EP2012/003625 patent/WO2013041179A1/de active Application Filing
- 2012-09-17 AR ARP120103429A patent/AR087906A1/es active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| MY175540A (en) | 2020-07-01 |
| CN103797154A (zh) | 2014-05-14 |
| EP2758562A1 (de) | 2014-07-30 |
| RU2014115546A (ru) | 2015-10-27 |
| DE102011113563A1 (de) | 2013-03-21 |
| HUE026486T2 (en) | 2016-06-28 |
| EP2758562B1 (de) | 2015-09-16 |
| CN103797154B (zh) | 2016-02-17 |
| RU2606105C2 (ru) | 2017-01-10 |
| PL2758562T3 (pl) | 2016-03-31 |
| US9527179B2 (en) | 2016-12-27 |
| AR087906A1 (es) | 2014-04-23 |
| JP2014528030A (ja) | 2014-10-23 |
| KR20140068971A (ko) | 2014-06-09 |
| JP6208132B2 (ja) | 2017-10-04 |
| ES2554683T3 (es) | 2015-12-22 |
| WO2013041179A1 (de) | 2013-03-28 |
| US20140346724A1 (en) | 2014-11-27 |
| KR102028768B1 (ko) | 2019-10-04 |
| MX349213B (es) | 2017-07-18 |
| CA2849024A1 (en) | 2013-03-28 |
| MX2014003359A (es) | 2015-03-23 |
| CA2849024C (en) | 2019-10-01 |
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