AR087906A1 - Trineo de plato horizontal para instalacion de tratamiento al vacio - Google Patents

Trineo de plato horizontal para instalacion de tratamiento al vacio

Info

Publication number
AR087906A1
AR087906A1 ARP120103429A ARP120103429A AR087906A1 AR 087906 A1 AR087906 A1 AR 087906A1 AR P120103429 A ARP120103429 A AR P120103429A AR P120103429 A ARP120103429 A AR P120103429A AR 087906 A1 AR087906 A1 AR 087906A1
Authority
AR
Argentina
Prior art keywords
horizontal plate
vacuum treatment
sled
vacuum
door
Prior art date
Application number
ARP120103429A
Other languages
English (en)
Inventor
Gwehenberger Juergen
Original Assignee
Oerlikon Trading Ag Trübbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading Ag Trübbach filed Critical Oerlikon Trading Ag Trübbach
Publication of AR087906A1 publication Critical patent/AR087906A1/es

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q7/00—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting
    • B23Q7/02—Arrangements for handling work specially combined with or arranged in, or specially adapted for use in connection with, machine tools, e.g. for conveying, loading, positioning, discharging, sorting by means of drums or rotating tables or discs
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4585—Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Chemical Vapour Deposition (AREA)
  • Handcart (AREA)

Abstract

La presente se refiere a una instalación de tratamiento al vacío con trineo de plato horizontal, en la que el accionamiento del plato horizontal está dispuesto en aquella pared que está situada frente a la puerta de la instalación de tratamiento al vacío. De esta manera se asegura el acoplamiento del plato horizontal del trineo de plato horizontal con el accionamiento de plato horizontal, sin un mecanismo adicional. Reivindicación 1: Instalación de tratamiento al vacío con una cámara de vacío (303) y un trineo de plato horizontal (201) con plato horizontal (205), presentando la cámara de vacío (303) una puerta (305) y un accionamiento de plato horizontal (101), caracterizada porque el accionamiento de plato horizontal (101) es un accionamiento periférico que está previsto en y/o en la vecindad de la pared de la cámara de vacío (303) opuestamente a la puerta (305), en dicha cámara. Reivindicación 5: Procedimiento para tratar piezas de trabajo en una instalación de tratamiento al vacío, con los pasos siguientes: abastecer un carro de plato horizontal (201) equipado con portadores de piezas de trabajo, con piezas de trabajo a ser tratadas; colocar un trineo de plato horizontal (201) equipado con portadores de piezas de trabajo, sobre los rieles de un carro (203); acercar un carro (203) cargado con el trineo de plato horizontal (201) y con piezas de trabajo a ser tratadas, a una instalación de tratamiento al vacío con puerta abierta (305); introducción del trineo de plato horizontal (201) en la instalación de tratamiento al vacío; cierre de la instalación de tratamiento al vacío, hacer el vacío en la cámara de vacío mediante bombeo, y realización del paso de tratamiento al vacío; caracterizado porque durante el cierre de la instalación de tratamiento al vacío se fija el trineo de plato horizontal (201) mediante los topes (309, 311) previstos en la instalación de tratamiento al vacío, de manera tal que el plato horizontal (205) del trineo de plato horizontal (201) quede asociado de manera operable con un accionamiento de plato horizontal (101) previsto en la instalación de tratamiento al vacío y/o en la vecindad de la pared frente a la puerta (305).
ARP120103429A 2011-09-19 2012-09-17 Trineo de plato horizontal para instalacion de tratamiento al vacio AR087906A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011113563A DE102011113563A1 (de) 2011-09-19 2011-09-19 Karussellschlitten für Vakuumbehandlungsanlage

Publications (1)

Publication Number Publication Date
AR087906A1 true AR087906A1 (es) 2014-04-23

Family

ID=46801424

Family Applications (1)

Application Number Title Priority Date Filing Date
ARP120103429A AR087906A1 (es) 2011-09-19 2012-09-17 Trineo de plato horizontal para instalacion de tratamiento al vacio

Country Status (16)

Country Link
US (1) US9527179B2 (es)
EP (1) EP2758562B1 (es)
JP (1) JP6208132B2 (es)
KR (1) KR102028768B1 (es)
CN (1) CN103797154B (es)
AR (1) AR087906A1 (es)
CA (1) CA2849024C (es)
DE (1) DE102011113563A1 (es)
ES (1) ES2554683T3 (es)
HU (1) HUE026486T2 (es)
MX (1) MX349213B (es)
MY (1) MY175540A (es)
PL (1) PL2758562T3 (es)
RU (1) RU2606105C2 (es)
SG (1) SG11201400776YA (es)
WO (1) WO2013041179A1 (es)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7119007B2 (ja) 2017-06-14 2022-08-16 バット ホールディング アーゲー 第１チャンバおよび第２チャンバを有するアセンブリ
BR112021022306A2 (pt) 2019-05-07 2021-12-28 Oerlikon Surface Solutions Ag Pfaeffikon Dispositivo transportador de peça de trabalho e sistema de tratamento de superfície

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Also Published As

Publication number Publication date
MX2014003359A (es) 2015-03-23
WO2013041179A1 (de) 2013-03-28
KR20140068971A (ko) 2014-06-09
CA2849024C (en) 2019-10-01
RU2014115546A (ru) 2015-10-27
JP2014528030A (ja) 2014-10-23
DE102011113563A1 (de) 2013-03-21
CN103797154A (zh) 2014-05-14
US20140346724A1 (en) 2014-11-27
EP2758562B1 (de) 2015-09-16
ES2554683T3 (es) 2015-12-22
PL2758562T3 (pl) 2016-03-31
MY175540A (en) 2020-07-01
JP6208132B2 (ja) 2017-10-04
KR102028768B1 (ko) 2019-10-04
EP2758562A1 (de) 2014-07-30
RU2606105C2 (ru) 2017-01-10
US9527179B2 (en) 2016-12-27
HUE026486T2 (en) 2016-06-28
CA2849024A1 (en) 2013-03-28
CN103797154B (zh) 2016-02-17
MX349213B (es) 2017-07-18
SG11201400776YA (en) 2014-09-26

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