SG108940A1 - Method and apparatus for cooling a reticle during lithographic exposure - Google Patents

Method and apparatus for cooling a reticle during lithographic exposure

Info

Publication number
SG108940A1
SG108940A1 SG200306240A SG200306240A SG108940A1 SG 108940 A1 SG108940 A1 SG 108940A1 SG 200306240 A SG200306240 A SG 200306240A SG 200306240 A SG200306240 A SG 200306240A SG 108940 A1 SG108940 A1 SG 108940A1
Authority
SG
Singapore
Prior art keywords
cooling
lithographic exposure
during lithographic
reticle during
reticle
Prior art date
Application number
SG200306240A
Other languages
English (en)
Inventor
Del Puerto Santiago
N Galburt Daniel
W Mccullough Andrew
Roux Stephen
Jeroen Ottens Joost
Original Assignee
Asml Holding Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Holding Nv filed Critical Asml Holding Nv
Publication of SG108940A1 publication Critical patent/SG108940A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • G03F7/70875—Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
    • F28F3/04—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element
    • F28F3/048—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations the means being integral with the element in the form of ribs integral with the element or local variations in thickness of the element, e.g. grooves, microchannels

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Toxicology (AREA)
  • Atmospheric Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Public Health (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG200306240A 2002-10-18 2003-10-17 Method and apparatus for cooling a reticle during lithographic exposure SG108940A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/273,405 US7105836B2 (en) 2002-10-18 2002-10-18 Method and apparatus for cooling a reticle during lithographic exposure

Publications (1)

Publication Number Publication Date
SG108940A1 true SG108940A1 (en) 2005-02-28

Family

ID=32042954

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200306240A SG108940A1 (en) 2002-10-18 2003-10-17 Method and apparatus for cooling a reticle during lithographic exposure

Country Status (6)

Country Link
US (1) US7105836B2 (ja)
EP (1) EP1411391A3 (ja)
JP (1) JP2004282011A (ja)
KR (1) KR100828671B1 (ja)
SG (1) SG108940A1 (ja)
TW (1) TW200502674A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014083965A1 (ja) * 2012-11-27 2014-06-05 株式会社クリエイティブ テクノロジー 静電チャック，ガラス基板処理方法及びそのガラス基板

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4335084B2 (ja) * 2003-07-02 2009-09-30 エーエスエムエル ネザーランズ ビー．ブイ． 測定装置を有するリトグラフ投影装置
US6897945B1 (en) * 2003-12-15 2005-05-24 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7489388B2 (en) * 2003-12-22 2009-02-10 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US20070017660A1 (en) * 2005-07-12 2007-01-25 Stefan Kienitz Heatsink with adapted backplate
US7440076B2 (en) * 2005-09-29 2008-10-21 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
DE102005062081A1 (de) * 2005-12-22 2007-07-05 Carl Zeiss Smt Ag Projektionsobjektiv mit dezentraler Steuerung
US8325321B2 (en) * 2006-07-28 2012-12-04 Mapper Lithography Ip B.V. Lithography system, method of heat dissipation and frame
US20080121821A1 (en) * 2006-11-27 2008-05-29 Varian Semiconductor Equipment Associates Inc. Techniques for low-temperature ion implantation
US8760621B2 (en) * 2007-03-12 2014-06-24 Asml Netherlands B.V. Lithographic apparatus and method
US20090194263A1 (en) * 2008-02-05 2009-08-06 Bernardes Marco Aurelio Dos Santos Methods and mechanisms for thermal semi conduction
WO2010020337A1 (en) * 2008-08-21 2010-02-25 Asml Holding Nv Euv reticle substrates with high thermal conductivity
NL2003528A (en) * 2008-10-23 2010-04-26 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
US20100186942A1 (en) * 2009-01-23 2010-07-29 Phillips Alton H Reticle error reduction by cooling
NL2005463A (en) * 2009-12-16 2011-06-20 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
NL2006809A (en) * 2010-06-23 2011-12-27 Asml Netherlands Bv Lithographic apparatus and lithographic apparatus cooling method.
US8794011B2 (en) 2010-10-15 2014-08-05 Nikon Corporation Method and apparatus for utilizing in-situ measurements techniques in conjunction with thermoelectric chips (TECs)
EP2686736B1 (en) 2011-03-17 2014-12-17 ASML Netherlands BV Electrostatic clamp, lithographic apparatus, and device manufacturing method
WO2013050243A1 (en) * 2011-10-06 2013-04-11 Asml Netherlands B.V. Chuck, lithography apparatus and method of using a chuck
US9164388B2 (en) * 2012-04-10 2015-10-20 Kla-Tencor Corporation Temperature control in EUV reticle inspection tool
JP5795454B2 (ja) * 2012-05-09 2015-10-14 エーエスエムエル ネザーランズ ビー．ブイ． リソグラフィ装置
US9454090B2 (en) 2012-08-28 2016-09-27 Micron Technology, Inc. Methods and apparatuses for template cooling
DE102013201805A1 (de) * 2013-02-05 2013-11-28 Carl Zeiss Smt Gmbh Lithographieanlage mit kühlvorrichtung
DE102013201803A1 (de) * 2013-02-05 2014-02-27 Carl Zeiss Smt Gmbh Strahlungskühler und verfahren zur steuerung und regelung hierfür
NL2012204A (en) * 2013-02-07 2014-12-18 Asml Holding Nv Lithographic apparatus and method.
TWI656596B (zh) * 2014-08-26 2019-04-11 荷蘭商Ａｓｍｌ控股公司 靜電夾具及其製造方法
WO2018213825A1 (en) 2017-05-19 2018-11-22 Massachusetts Institute Of Technology Transport system having a magnetically levitated transportation stage
US11175103B2 (en) * 2019-09-13 2021-11-16 Toshiba Memory Corporation Heat sink with dashed crosshatched fin pattern
KR102202163B1 (ko) * 2020-06-16 2021-01-12 (주)볼타오토메이션 자기부상식 반송장치
CN112987508B (zh) * 2021-03-04 2022-09-30 长鑫存储技术有限公司 振动衰减结构及曝光装置
TW202300471A (zh) 2021-03-16 2023-01-01 德商首德公司 具有特定熱膨脹特性的ｅｕｖｌ精密組件

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0484179A2 (en) * 1990-11-01 1992-05-06 Canon Kabushiki Kaisha Wafer holding device in an exposure apparatus
EP1120690A2 (en) * 1999-12-27 2001-08-01 Svg Lithography Systems, Inc. EUV reticle thermal management
JP2003068626A (ja) * 2001-08-29 2003-03-07 Canon Inc 露光装置内ユニットの輻射冷却方法及び輻射冷却装置

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3171956A (en) * 1962-03-30 1965-03-02 Rca Corp Variant temperature environment for specimen stage of scientific instrument
US4226281A (en) * 1979-06-11 1980-10-07 International Business Machines Corporation Thermal conduction module
US5289337A (en) * 1992-02-21 1994-02-22 Intel Corporation Heatspreader for cavity down multi-chip module with flip chip
US5325180A (en) * 1992-12-31 1994-06-28 International Business Machines Corporation Apparatus for identifying and distinguishing temperature and system induced measuring errors
KR0179938B1 (ko) * 1996-12-31 1999-04-01 문정환 반도체 웨이퍼 노광장치
US5801891A (en) * 1997-04-14 1998-09-01 Eastman Kodak Company Flat mirror mounting flexure
US5944097A (en) * 1997-05-06 1999-08-31 Northrop Grumman Corporation Composite substrate carrier for high power electronic devices
US6705388B1 (en) * 1997-11-10 2004-03-16 Parker-Hannifin Corporation Non-electrically conductive thermal dissipator for electronic components
US6215642B1 (en) * 1999-03-11 2001-04-10 Nikon Corporation Of Japan Vacuum compatible, deformable electrostatic chuck with high thermal conductivity
US6809802B1 (en) * 1999-08-19 2004-10-26 Canon Kabushiki Kaisha Substrate attracting and holding system for use in exposure apparatus
US6496528B2 (en) * 1999-09-03 2002-12-17 Cymer, Inc. Line narrowing unit with flexural grating mount
EP1124161A3 (en) 2000-02-10 2004-01-07 ASML Netherlands B.V. Lithographic projection apparatus having a temperature controlled heat shield
JP3870002B2 (ja) * 2000-04-07 2007-01-17 キヤノン株式会社 露光装置
US6630984B2 (en) * 2000-08-03 2003-10-07 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and device manufactured thereby
JP4745556B2 (ja) 2001-08-20 2011-08-10 キヤノン株式会社 位置決め装置、露光装置、及びデバイス製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0484179A2 (en) * 1990-11-01 1992-05-06 Canon Kabushiki Kaisha Wafer holding device in an exposure apparatus
EP1120690A2 (en) * 1999-12-27 2001-08-01 Svg Lithography Systems, Inc. EUV reticle thermal management
JP2003068626A (ja) * 2001-08-29 2003-03-07 Canon Inc 露光装置内ユニットの輻射冷却方法及び輻射冷却装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014083965A1 (ja) * 2012-11-27 2014-06-05 株式会社クリエイティブ テクノロジー 静電チャック，ガラス基板処理方法及びそのガラス基板

Also Published As

Publication number Publication date
EP1411391A2 (en) 2004-04-21
TW200502674A (en) 2005-01-16
US20040079518A1 (en) 2004-04-29
EP1411391A3 (en) 2005-10-12
JP2004282011A (ja) 2004-10-07
KR100828671B1 (ko) 2008-05-09
US7105836B2 (en) 2006-09-12
KR20040034530A (ko) 2004-04-28

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