SG107153A1 - Method and apparatus for manufacturing low reflectivity film - Google Patents

Method and apparatus for manufacturing low reflectivity film

Info

Publication number
SG107153A1
SG107153A1 SG200305628A SG200305628A SG107153A1 SG 107153 A1 SG107153 A1 SG 107153A1 SG 200305628 A SG200305628 A SG 200305628A SG 200305628 A SG200305628 A SG 200305628A SG 107153 A1 SG107153 A1 SG 107153A1
Authority
SG
Singapore
Prior art keywords
low reflectivity
manufacturing low
reflectivity film
film
manufacturing
Prior art date
Application number
SG200305628A
Other languages
English (en)
Inventor
Ota Atsushi
Sugiura Isao
Tani Noriaki
Kiyota Junya
Komatsu Takashi
Arai Makoto
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Publication of SG107153A1 publication Critical patent/SG107153A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20—Constructional details
    • H01J11/34—Vessels, containers or parts thereof, e.g. substrates
    • H01J11/44—Optical arrangements or shielding arrangements, e.g. filters, black matrices, light reflecting means or electromagnetic shielding means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • H01J9/48—Machines having sequentially arranged operating stations with automatic transfer of workpieces between operating stations

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
SG200305628A 2002-09-19 2003-09-18 Method and apparatus for manufacturing low reflectivity film SG107153A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002272500 2002-09-19
JP2003283393A JP2004131846A (ja) 2002-09-19 2003-07-31 低反射膜の製造方法及び装置

Publications (1)

Publication Number Publication Date
SG107153A1 true SG107153A1 (en) 2004-11-29

Family

ID=32301711

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200305628A SG107153A1 (en) 2002-09-19 2003-09-18 Method and apparatus for manufacturing low reflectivity film

Country Status (5)

Country Link
JP (1) JP2004131846A (zh)
KR (1) KR101032659B1 (zh)
CN (1) CN1492071A (zh)
SG (1) SG107153A1 (zh)
TW (1) TWI254746B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4912980B2 (ja) * 2007-08-20 2012-04-11 株式会社アルバック 成膜方法
CN104114741B (zh) * 2011-11-04 2016-06-22 因特瓦克公司 线性扫描溅射系统和方法
CN102707349B (zh) * 2012-03-31 2015-07-29 深圳市华星光电技术有限公司 反射型液晶显示器的反射层的制造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5270858A (en) * 1990-10-11 1993-12-14 Viratec Thin Films Inc D.C. reactively sputtered antireflection coatings
EP0621350A1 (en) * 1993-04-23 1994-10-26 United States Surgical Corporation Metallic article possessing a brightly colored surface of low reflectivity and process for producing such surface
WO1996031343A1 (en) * 1995-04-03 1996-10-10 Southwall Technologies Inc. Antireflective coatings

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0959772A (ja) * 1995-08-21 1997-03-04 Nippon Sheet Glass Co Ltd マグネトロンスパッタ法
JPH1129867A (ja) 1997-05-14 1999-02-02 Canon Inc スパッタリング方法及びそれを用いた光起電力素子の製造方法
JPH11209884A (ja) 1998-01-23 1999-08-03 Asahi Glass Co Ltd 遮光層付き基板の製造方法及びカラーフィルタ基板の製造方法
JP2001316813A (ja) 2000-04-28 2001-11-16 Shin Sti Technology Kk ブラックマトリクス用クロムのスパッタリング方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5270858A (en) * 1990-10-11 1993-12-14 Viratec Thin Films Inc D.C. reactively sputtered antireflection coatings
EP0621350A1 (en) * 1993-04-23 1994-10-26 United States Surgical Corporation Metallic article possessing a brightly colored surface of low reflectivity and process for producing such surface
WO1996031343A1 (en) * 1995-04-03 1996-10-10 Southwall Technologies Inc. Antireflective coatings

Also Published As

Publication number Publication date
CN1492071A (zh) 2004-04-28
KR20040025594A (ko) 2004-03-24
JP2004131846A (ja) 2004-04-30
TW200404906A (en) 2004-04-01
KR101032659B1 (ko) 2011-05-06
TWI254746B (en) 2006-05-11

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