SG102660A1 - Modular fluid delivery apparatus - Google Patents

Modular fluid delivery apparatus

Info

Publication number
SG102660A1
SG102660A1 SG200201201A SG200201201A SG102660A1 SG 102660 A1 SG102660 A1 SG 102660A1 SG 200201201 A SG200201201 A SG 200201201A SG 200201201 A SG200201201 A SG 200201201A SG 102660 A1 SG102660 A1 SG 102660A1
Authority
SG
Singapore
Prior art keywords
fluid delivery
delivery apparatus
modular fluid
modular
fluid
Prior art date
Application number
SG200201201A
Other languages
English (en)
Inventor
V Nguyen Nhan
Original Assignee
Asml Us Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Us Inc filed Critical Asml Us Inc
Publication of SG102660A1 publication Critical patent/SG102660A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B67—OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS; LIQUID HANDLING
    • B67D—DISPENSING, DELIVERING OR TRANSFERRING LIQUIDS, NOT OTHERWISE PROVIDED FOR
    • B67D3/00—Apparatus or devices for controlling flow of liquids under gravity from storage containers for dispensing purposes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Basic Packing Technique (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Chemical Vapour Deposition (AREA)
SG200201201A 2001-03-06 2002-02-27 Modular fluid delivery apparatus SG102660A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/800,595 US6729353B2 (en) 1999-09-01 2001-03-06 Modular fluid delivery apparatus

Publications (1)

Publication Number Publication Date
SG102660A1 true SG102660A1 (en) 2004-03-26

Family

ID=25178817

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200201201A SG102660A1 (en) 2001-03-06 2002-02-27 Modular fluid delivery apparatus

Country Status (7)

Country Link
US (1) US6729353B2 (zh)
EP (1) EP1239203A1 (zh)
JP (1) JP2002372181A (zh)
KR (1) KR100441045B1 (zh)
CN (1) CN1177162C (zh)
SG (1) SG102660A1 (zh)
TW (1) TW531616B (zh)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6729353B2 (en) * 1999-09-01 2004-05-04 Asml Us, Inc. Modular fluid delivery apparatus
AU2003262953A1 (en) * 2002-08-27 2004-03-19 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
GB2411696B (en) 2002-11-26 2007-05-30 Swagelok Co Modular surface mount fluid system
CN100422569C (zh) * 2002-11-26 2008-10-01 斯瓦戈洛克公司 模块化表面安装的流体系统
US6874538B2 (en) * 2003-03-26 2005-04-05 Kevin S. Bennett Fluid delivery system
US7048008B2 (en) 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
US20060011246A1 (en) * 2004-07-09 2006-01-19 Leys John A Fluid flow control system and method
US20060070674A1 (en) * 2004-10-01 2006-04-06 Eidsmore Paul G Substrate with offset flow passage
WO2006079253A1 (fr) * 2005-01-31 2006-08-03 Zte Corporation Procede de traitement de bande de base base sur un double echantillonnage
US7146999B2 (en) * 2005-03-08 2006-12-12 Gregory C. Giese Modular fluid handling device
WO2006130774A1 (en) * 2005-06-02 2006-12-07 Ultra Clean Holdings, Incorporated Gas-panel assembly
US7299825B2 (en) 2005-06-02 2007-11-27 Ultra Clean Holdings, Inc. Gas-panel assembly
US7320339B2 (en) 2005-06-02 2008-01-22 Ultra Clean Holdings, Inc. Gas-panel assembly
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
JP5183935B2 (ja) * 2007-02-26 2013-04-17 Ｃｋｄ株式会社 流路ブロックの製造方法
US8322380B2 (en) * 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
US8025374B2 (en) * 2008-12-19 2011-09-27 Silverbrook Research Pty Ltd Ink manifold with multiple conduit shut off valve
TWI468305B (zh) * 2008-12-19 2015-01-11 Memjet Technology Ltd 具有多導管停止閥的墨水歧管
DE102009008202B4 (de) 2009-02-04 2022-10-20 GEMÜ Gebr. Müller Apparatebau GmbH & Co. KG Ventilblock
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
WO2010144541A2 (en) * 2009-06-10 2010-12-16 Vistadeltek, Llc Extreme flow rate and/or high temperature fluid delivery substrates
US8950433B2 (en) 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
KR101599344B1 (ko) * 2011-09-30 2016-03-03 가부시키가이샤 후지킨 가스 공급 장치
KR101330725B1 (ko) 2011-10-28 2013-11-20 (주)지오엘리먼트 기화시스템 및 바텀 시스템
US9507351B2 (en) 2012-03-07 2016-11-29 Illinois Tool Works Inc. System and method for reducing flow perturbations and improving the accuracy of a rate of decay measurement in a mass flow controller
US9810377B2 (en) 2012-03-07 2017-11-07 Illinois Tool Works Inc. System and method for improving the accuracy of a rate of decay (ROD) measurement in a mass flow controller
DE202012003844U1 (de) * 2012-04-16 2012-05-22 Bürkert Werke GmbH Modulares Ventilsystem
JP6175300B2 (ja) * 2013-07-17 2017-08-02 株式会社フジキン 流体制御装置用継手部材および流体制御装置
CN104979255B (zh) * 2015-06-16 2017-11-14 无锡华瑛微电子技术有限公司 流体传送装置
KR101906019B1 (ko) * 2016-12-30 2018-10-08 주식회사 두산 모듈화된 유로 구조 및 이를 포함하는 연료 전지 시스템
US20210125842A1 (en) * 2017-03-29 2021-04-29 Fujikin Incorporated Conversion Joint, Integrated Fluid Supply Device Having Said Conversion Joint, and Method for Mounting a Fluid Part
US11306011B2 (en) 2017-09-25 2022-04-19 Meunier Technologies Inc. Apparatus and method for dosage and administration of liquid chemicals
CN111936948A (zh) * 2018-03-26 2020-11-13 日立金属株式会社 流量控制装置
DE102018221689B4 (de) * 2018-12-13 2022-05-12 Hawe Hydraulik Se Hydraulikventilsystem mit einem Ventilgehäuse
WO2020128634A2 (en) 2018-12-17 2020-06-25 Compart Systems Pte. Ltd. Universal tube stub plug with seal port
KR102396014B1 (ko) * 2019-12-31 2022-05-10 한국과학기술원 모듈형 유체 장치 및 이를 이용한 dna 추출 방법
CN116412275A (zh) * 2021-12-31 2023-07-11 华为技术有限公司 多通道阀、热管理系统及交通工具

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0754896A2 (en) * 1995-07-19 1997-01-22 Fujikin Incorporated Fluid controller
WO1999045302A1 (en) * 1998-03-05 1999-09-10 The Swagelok Company Modular surface mount manifold
US6039360A (en) * 1997-05-08 2000-03-21 Tadahiro Ohmi Couplings for fluid controllers

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FR1523213A (fr) 1967-01-27 1968-05-03 Seram Dispositif perfectionné de gerbage pour appareils hydrauliques
GB1310110A (en) 1969-06-19 1973-03-14 Newmark Ltd Louis Mounting blocks for fluid control valves
US3589387A (en) 1969-08-22 1971-06-29 Int Basic Economy Corp Integrated manifold circuits and method of assembly
GB1364749A (en) 1971-07-29 1974-08-29 Kayaba Industry Co Ltd Integrated multiple valve unit
US3976098A (en) 1974-01-02 1976-08-24 International Basic Economy Corporation Hydraulic motor control apparatus
US4703913A (en) 1982-09-22 1987-11-03 California Institute Of Technology Diaphragm valve
US4597412A (en) * 1982-09-29 1986-07-01 Stark Anton W Valve for sequential chemical operations
EP0201683A1 (en) * 1985-05-13 1986-11-20 Jean Egli A variable colorant blender
US4930401A (en) 1988-10-28 1990-06-05 Ross Operating Valve Company Valve system and arrangement for on-line valve replacement
US5106169A (en) 1991-02-08 1992-04-21 Eilcon National, Inc. Adapter for interconnecting empty/load valve with storage canister
US5494071A (en) 1994-06-03 1996-02-27 Keystone International Holdings Corp. Mounting system for pressure transmitters
KR100232112B1 (ko) 1996-01-05 1999-12-01 아마노 시게루 가스공급유닛
JP3726168B2 (ja) 1996-05-10 2005-12-14 忠弘 大見 流体制御装置
US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
JP4022696B2 (ja) 1996-11-20 2007-12-19 忠弘 大見 遮断開放器
JP3780096B2 (ja) 1998-04-27 2006-05-31 シーケーディ株式会社 プロセスガス供給ユニット
US6085783A (en) * 1998-09-02 2000-07-11 Hollingshead; J. Gregory Unified modular multi-directional flow chemical distribution block
US5964481A (en) 1998-07-10 1999-10-12 Buch; Dana Modular mounting apparatus for fluid control components
US6729353B2 (en) * 1999-09-01 2004-05-04 Asml Us, Inc. Modular fluid delivery apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0754896A2 (en) * 1995-07-19 1997-01-22 Fujikin Incorporated Fluid controller
US6039360A (en) * 1997-05-08 2000-03-21 Tadahiro Ohmi Couplings for fluid controllers
WO1999045302A1 (en) * 1998-03-05 1999-09-10 The Swagelok Company Modular surface mount manifold

Also Published As

Publication number Publication date
EP1239203A1 (en) 2002-09-11
JP2002372181A (ja) 2002-12-26
US20020050299A1 (en) 2002-05-02
KR20020071762A (ko) 2002-09-13
CN1374474A (zh) 2002-10-16
TW531616B (en) 2003-05-11
KR100441045B1 (ko) 2004-07-19
CN1177162C (zh) 2004-11-24
US6729353B2 (en) 2004-05-04

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