SG10201905397TA - Frequency control of spurious shear horizontal mode by adding high velocity layer in a lithium niobate filter - Google Patents

Frequency control of spurious shear horizontal mode by adding high velocity layer in a lithium niobate filter

Info

Publication number
SG10201905397TA
SG10201905397TA SG10201905397TA SG10201905397TA SG10201905397TA SG 10201905397T A SG10201905397T A SG 10201905397TA SG 10201905397T A SG10201905397T A SG 10201905397TA SG 10201905397T A SG10201905397T A SG 10201905397TA SG 10201905397T A SG10201905397T A SG 10201905397TA
Authority
SG
Singapore
Prior art keywords
filter
frequency control
high velocity
lithium niobate
horizontal mode
Prior art date
Application number
SG10201905397TA
Other languages
English (en)
Inventor
Tomoya Komatsu
Original Assignee
Skyworks Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Skyworks Solutions Inc filed Critical Skyworks Solutions Inc
Publication of SG10201905397TA publication Critical patent/SG10201905397TA/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02897—Means for compensation or elimination of undesirable effects of strain or mechanical damage, e.g. strain due to bending influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02984—Protection measures against damaging
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6489—Compensation of undesirable effects
    • H03H9/6496—Reducing ripple in transfer characteristic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72—Networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6436—Coupled resonator filters having one acoustic track only

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
SG10201905397TA 2018-06-13 2019-06-13 Frequency control of spurious shear horizontal mode by adding high velocity layer in a lithium niobate filter SG10201905397TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862684330P 2018-06-13 2018-06-13
US201862693027P 2018-07-02 2018-07-02

Publications (1)

Publication Number Publication Date
SG10201905397TA true SG10201905397TA (en) 2020-01-30

Family

ID=67432353

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201905397TA SG10201905397TA (en) 2018-06-13 2019-06-13 Frequency control of spurious shear horizontal mode by adding high velocity layer in a lithium niobate filter

Country Status (8)

Country Link
US (2) US11095269B2 (ja)
JP (1) JP7250625B2 (ja)
KR (1) KR20190141096A (ja)
CN (1) CN110601677A (ja)
DE (1) DE102019208602A1 (ja)
GB (2) GB2576401B (ja)
SG (1) SG10201905397TA (ja)
TW (1) TWI801604B (ja)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112600532B (zh) * 2016-11-25 2024-05-31 株式会社村田制作所 弹性波滤波器装置
CN110601677A (zh) 2018-06-13 2019-12-20 天工方案公司 铌酸锂滤波器中添加高速层的杂散剪切水平模式频率控制
CN110931922A (zh) * 2019-11-25 2020-03-27 武汉大学 一种基于压电双模态谐振器的双通带滤波器
CN111277241B (zh) * 2020-03-03 2023-11-03 无锡市好达电子股份有限公司 一种高功率耐受性温补型声表面波滤波器结构及制备方法
JP2021180465A (ja) * 2020-05-15 2021-11-18 信越化学工業株式会社 表面弾性波デバイス用複合基板及びその製造方法
KR102482602B1 (ko) * 2020-08-19 2022-12-29 삼성전기주식회사 음향 공진기 필터
CN112787620A (zh) * 2021-01-13 2021-05-11 广东广纳芯科技有限公司 一种具有多层膜结构的声表面波谐振器及制造方法
WO2022220155A1 (ja) * 2021-04-16 2022-10-20 株式会社村田製作所 弾性波装置
WO2023234321A1 (ja) * 2022-05-31 2023-12-07 株式会社村田製作所 弾性波装置

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US3965444A (en) 1975-01-03 1976-06-22 Raytheon Company Temperature compensated surface acoustic wave devices
EP1515436A3 (en) * 2003-08-29 2005-08-31 Seiko Epson Corporation Surface acoustic wave element and electronic equipment provided with the element
CN1938946A (zh) * 2004-03-29 2007-03-28 株式会社村田制作所 声界面波装置的制造方法以及声界面波装置
CN1825759B (zh) * 2005-02-24 2011-11-16 京瓷株式会社 声表面波元件、分波器和通信设备
EP2023485A4 (en) * 2006-05-30 2010-02-03 Murata Manufacturing Co RAND SOUND WAVE DEVICE
JP5072642B2 (ja) * 2007-03-28 2012-11-14 京セラ株式会社 弾性表面波装置及びこれを用いた分波器並びに通信装置
WO2009022410A1 (ja) * 2007-08-14 2009-02-19 Fujitsu Limited 弾性境界波装置
DE102008034372B4 (de) 2008-07-23 2013-04-18 Msg Lithoglas Ag Verfahren zum Herstellen einer dielektrischen Schicht in einem elektroakustischen Bauelement sowie elektroakustisches Bauelement
JP2010263296A (ja) * 2009-04-30 2010-11-18 Murata Mfg Co Ltd 弾性境界波装置
JP2011061743A (ja) * 2009-09-14 2011-03-24 Japan Radio Co Ltd 弾性表面波素子
DE112011104653B4 (de) 2010-12-29 2016-07-21 Murata Manufacturing Co., Ltd. Oberflächenschallwellen-Bauelement
WO2012098816A1 (ja) 2011-01-18 2012-07-26 株式会社村田製作所 弾性表面波フィルタ装置
JP5797979B2 (ja) * 2011-08-31 2015-10-21 太陽誘電株式会社 弾性波デバイス
KR102067310B1 (ko) * 2012-07-30 2020-01-16 스카이워크스 필터 솔루션즈 재팬 씨오., 엘티디. 탄성파 소자와 이것을 사용한 안테나 공용기
JP6390819B2 (ja) 2016-04-25 2018-09-19 株式会社村田製作所 弾性波装置及びその製造方法
WO2017187724A1 (ja) * 2016-04-27 2017-11-02 株式会社村田製作所 弾性波装置
US10187039B2 (en) 2016-06-07 2019-01-22 Skyworks Filter Solutions Japan Co., Ltd. Filter devices having reduced spurious emissions from lamb waves
US20180041186A1 (en) * 2016-08-04 2018-02-08 Skyworks Filter Solutions Japan Co., Ltd. Surface acoustic wave elements with protective films
JP6812998B2 (ja) * 2018-03-19 2021-01-13 株式会社村田製作所 弾性波装置
CN110601677A (zh) 2018-06-13 2019-12-20 天工方案公司 铌酸锂滤波器中添加高速层的杂散剪切水平模式频率控制

Also Published As

Publication number Publication date
DE102019208602A1 (de) 2019-12-19
TW202002304A (zh) 2020-01-01
GB2608512B (en) 2023-03-29
JP2019216422A (ja) 2019-12-19
US20210336605A1 (en) 2021-10-28
US11095269B2 (en) 2021-08-17
CN110601677A (zh) 2019-12-20
TWI801604B (zh) 2023-05-11
GB2576401B (en) 2022-09-21
GB201908520D0 (en) 2019-07-31
GB202209964D0 (en) 2022-08-24
US12009806B2 (en) 2024-06-11
GB2576401A (en) 2020-02-19
JP7250625B2 (ja) 2023-04-03
GB2608512A (en) 2023-01-04
KR20190141096A (ko) 2019-12-23
US20190386642A1 (en) 2019-12-19

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