SG10201905397TA - Frequency control of spurious shear horizontal mode by adding high velocity layer in a lithium niobate filter - Google Patents

Frequency control of spurious shear horizontal mode by adding high velocity layer in a lithium niobate filter

Info

Publication number
SG10201905397TA
SG10201905397TA SG10201905397TA SG10201905397TA SG10201905397TA SG 10201905397T A SG10201905397T A SG 10201905397TA SG 10201905397T A SG10201905397T A SG 10201905397TA SG 10201905397T A SG10201905397T A SG 10201905397TA SG 10201905397T A SG10201905397T A SG 10201905397TA
Authority
SG
Singapore
Prior art keywords
filter
frequency control
high velocity
lithium niobate
horizontal mode
Prior art date
Application number
SG10201905397TA
Inventor
Tomoya Komatsu
Original Assignee
Skyworks Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Skyworks Solutions Inc filed Critical Skyworks Solutions Inc
Publication of SG10201905397TA publication Critical patent/SG10201905397TA/en

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Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02818Means for compensation or elimination of undesirable effects
    • H03H9/02897Means for compensation or elimination of undesirable effects of strain or mechanical damage, e.g. strain due to bending influence
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02228Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters
    • H03H9/6483Ladder SAW filters
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02543Characteristics of substrate, e.g. cutting angles
    • H03H9/02559Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02543Characteristics of substrate, e.g. cutting angles
    • H03H9/02574Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02818Means for compensation or elimination of undesirable effects
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02818Means for compensation or elimination of undesirable effects
    • H03H9/02834Means for compensation or elimination of undesirable effects of temperature influence
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02984Protection measures against damaging
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538Formation
    • H03H9/14541Multilayer finger or busbar electrode
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544Transducers of particular shape or position
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25Constructional features of resonators using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/54Filters comprising resonators of piezo-electric or electrostrictive material
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6489Compensation of undesirable effects
    • H03H9/6496Reducing ripple in transfer characteristic
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/70Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/72Networks using surface acoustic waves
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters
    • H03H9/6436Coupled resonator filters having one acoustic track only
SG10201905397TA 2018-06-13 2019-06-13 Frequency control of spurious shear horizontal mode by adding high velocity layer in a lithium niobate filter SG10201905397TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201862684330P 2018-06-13 2018-06-13
US201862693027P 2018-07-02 2018-07-02

Publications (1)

Publication Number Publication Date
SG10201905397TA true SG10201905397TA (en) 2020-01-30

Family

ID=67432353

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201905397TA SG10201905397TA (en) 2018-06-13 2019-06-13 Frequency control of spurious shear horizontal mode by adding high velocity layer in a lithium niobate filter

Country Status (8)

Country Link
US (2) US11095269B2 (en)
JP (1) JP7250625B2 (en)
KR (1) KR20190141096A (en)
CN (1) CN110601677A (en)
DE (1) DE102019208602A1 (en)
GB (2) GB2576401B (en)
SG (1) SG10201905397TA (en)
TW (1) TWI801604B (en)

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JP6773128B2 (en) * 2016-11-25 2020-10-21 株式会社村田製作所 SAW filter device
CN110601677A (en) * 2018-06-13 2019-12-20 天工方案公司 Spurious shear horizontal mode frequency control with high-speed layer added in lithium niobate filter
CN110931922A (en) * 2019-11-25 2020-03-27 武汉大学 Dual-passband filter based on piezoelectric bimodal resonator
CN111277241B (en) * 2020-03-03 2023-11-03 无锡市好达电子股份有限公司 High-power-tolerance temperature compensation type surface acoustic wave filter structure and preparation method thereof
JP2021180465A (en) * 2020-05-15 2021-11-18 信越化学工業株式会社 Composite substrate for surface acoustic wave device and method for manufacturing the same
KR102482602B1 (en) 2020-08-19 2022-12-29 삼성전기주식회사 Acoustic resonator filter
CN112787620A (en) * 2021-01-13 2021-05-11 广东广纳芯科技有限公司 Surface acoustic wave resonator with multilayer film structure and manufacturing method
WO2022220155A1 (en) * 2021-04-16 2022-10-20 株式会社村田製作所 Elastic wave device
WO2023234321A1 (en) * 2022-05-31 2023-12-07 株式会社村田製作所 Elastic wave device

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US3965444A (en) 1975-01-03 1976-06-22 Raytheon Company Temperature compensated surface acoustic wave devices
EP1515436A3 (en) * 2003-08-29 2005-08-31 Seiko Epson Corporation Surface acoustic wave element and electronic equipment provided with the element
CN101714858B (en) * 2004-03-29 2013-05-01 株式会社村田制作所 Process for a boundary acoustic wave device
CN1825759B (en) * 2005-02-24 2011-11-16 京瓷株式会社 Surface acoustic wave device, duplexer, and communications equipment
EP2023485A4 (en) * 2006-05-30 2010-02-03 Murata Manufacturing Co Boundary acoustic wave device
JP5072642B2 (en) * 2007-03-28 2012-11-14 京セラ株式会社 Surface acoustic wave device, duplexer using the same, and communication device
JP4920750B2 (en) * 2007-08-14 2012-04-18 太陽誘電株式会社 Boundary acoustic wave device
DE102008034372B4 (en) * 2008-07-23 2013-04-18 Msg Lithoglas Ag Method for producing a dielectric layer in an electroacoustic component and electroacoustic component
JP2010263296A (en) * 2009-04-30 2010-11-18 Murata Mfg Co Ltd Elastic boundary wave device
JP2011061743A (en) * 2009-09-14 2011-03-24 Japan Radio Co Ltd Surface acoustic wave device
JP5565474B2 (en) 2010-12-29 2014-08-06 株式会社村田製作所 Surface acoustic wave device
DE112011104736B4 (en) * 2011-01-18 2016-03-24 Murata Manufacturing Co., Ltd. Surface acoustic wave filter device
JP5797979B2 (en) * 2011-08-31 2015-10-21 太陽誘電株式会社 Elastic wave device
KR102067310B1 (en) * 2012-07-30 2020-01-16 스카이워크스 필터 솔루션즈 재팬 씨오., 엘티디. Acoustic wave element and antenna shared apparatus employing same
WO2017187768A1 (en) * 2016-04-25 2017-11-02 株式会社村田製作所 Elastic wave device and manufacturing method for same
WO2017187724A1 (en) * 2016-04-27 2017-11-02 株式会社村田製作所 Elastic wave device
US10187039B2 (en) * 2016-06-07 2019-01-22 Skyworks Filter Solutions Japan Co., Ltd. Filter devices having reduced spurious emissions from lamb waves
US20180041186A1 (en) * 2016-08-04 2018-02-08 Skyworks Filter Solutions Japan Co., Ltd. Surface acoustic wave elements with protective films
JP6812998B2 (en) * 2018-03-19 2021-01-13 株式会社村田製作所 Elastic wave device
CN110601677A (en) * 2018-06-13 2019-12-20 天工方案公司 Spurious shear horizontal mode frequency control with high-speed layer added in lithium niobate filter

Also Published As

Publication number Publication date
CN110601677A (en) 2019-12-20
TWI801604B (en) 2023-05-11
JP2019216422A (en) 2019-12-19
US20210336605A1 (en) 2021-10-28
KR20190141096A (en) 2019-12-23
GB2576401A (en) 2020-02-19
TW202002304A (en) 2020-01-01
GB201908520D0 (en) 2019-07-31
US11095269B2 (en) 2021-08-17
DE102019208602A1 (en) 2019-12-19
US20190386642A1 (en) 2019-12-19
GB2608512B (en) 2023-03-29
GB202209964D0 (en) 2022-08-24
JP7250625B2 (en) 2023-04-03
GB2608512A (en) 2023-01-04
GB2576401B (en) 2022-09-21

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