SG10201601804QA - Substrate transfer hand - Google Patents
Substrate transfer handInfo
- Publication number
- SG10201601804QA SG10201601804QA SG10201601804QA SG10201601804QA SG10201601804QA SG 10201601804Q A SG10201601804Q A SG 10201601804QA SG 10201601804Q A SG10201601804Q A SG 10201601804QA SG 10201601804Q A SG10201601804Q A SG 10201601804QA SG 10201601804Q A SG10201601804Q A SG 10201601804QA
- Authority
- SG
- Singapore
- Prior art keywords
- substrate transfer
- transfer hand
- hand
- substrate
- transfer
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0014—Gripping heads and other end effectors having fork, comb or plate shaped means for engaging the lower surface on a object to be transported
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0033—Gripping heads and other end effectors with gripping surfaces having special shapes
- B25J15/0038—Cylindrical gripping surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0033—Gripping heads and other end effectors with gripping surfaces having special shapes
- B25J15/0042—V-shaped gripping surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015046668A JP6535187B2 (ja) | 2015-03-10 | 2015-03-10 | 基板搬送用ハンド |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201601804QA true SG10201601804QA (en) | 2016-10-28 |
Family
ID=56887371
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201601804QA SG10201601804QA (en) | 2015-03-10 | 2016-03-09 | Substrate transfer hand |
Country Status (6)
Country | Link |
---|---|
US (1) | US10475691B2 (ja) |
JP (1) | JP6535187B2 (ja) |
KR (1) | KR102277943B1 (ja) |
CN (1) | CN105966916B (ja) |
SG (1) | SG10201601804QA (ja) |
TW (1) | TWI689031B (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6757646B2 (ja) * | 2016-10-27 | 2020-09-23 | 川崎重工業株式会社 | 基板把持ハンド及びそれを備える基板搬送装置 |
CN106737805A (zh) * | 2016-12-13 | 2017-05-31 | 天津彼洋机器人系统工程有限公司 | 一种多功能机器人夹爪 |
CN109461693B (zh) * | 2017-09-06 | 2023-06-02 | 台湾积体电路制造股份有限公司 | 晶片传送装置、晶片处理系统及方法 |
JP6992515B2 (ja) * | 2018-01-05 | 2022-01-13 | コニカミノルタ株式会社 | Gpu割当プログラム、gpu割当方法、コンピュータ読取可能な記録媒体、および、gpu割当装置 |
KR20200078773A (ko) * | 2018-12-21 | 2020-07-02 | 세메스 주식회사 | 반전 유닛 및 이를 가지는 기판 처리 장치 |
CN111470283A (zh) * | 2020-04-24 | 2020-07-31 | 上海世禹精密机械有限公司 | 一种载具的循环回收设备 |
CN112018024A (zh) | 2020-09-11 | 2020-12-01 | 北京北方华创微电子装备有限公司 | 机械手 |
KR102241638B1 (ko) * | 2020-12-31 | 2021-04-19 | 주식회사 한국 방재리더스 | 공동주택 전기의 선로 보호장치 |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS46856Y1 (ja) | 1970-04-30 | 1971-01-13 | ||
US5061144A (en) | 1988-11-30 | 1991-10-29 | Tokyo Electron Limited | Resist process apparatus |
JP3182013B2 (ja) | 1992-12-02 | 2001-07-03 | 東京応化工業株式会社 | 回転カップ式塗布装置 |
JP2000260858A (ja) * | 1999-03-12 | 2000-09-22 | Sumitomo Heavy Ind Ltd | ウェハ搬送用ハンド、及び、これを用いたウェハ搬送方法 |
JP4600856B2 (ja) * | 2000-10-24 | 2010-12-22 | ムラテックオートメーション株式会社 | 基板保持装置 |
JP3724361B2 (ja) * | 2000-10-31 | 2005-12-07 | ダイキン工業株式会社 | 基板搬送装置 |
JP2003077980A (ja) * | 2001-09-06 | 2003-03-14 | Yaskawa Electric Corp | ウェハ搬送用ハンド |
US6824343B2 (en) * | 2002-02-22 | 2004-11-30 | Applied Materials, Inc. | Substrate support |
JP3962609B2 (ja) * | 2002-03-05 | 2007-08-22 | 東京エレクトロン株式会社 | 搬送装置 |
EP1401168A1 (en) * | 2002-09-20 | 2004-03-24 | Alcatel | A method to transport an internet packet and related network elements |
CN101383318B (zh) | 2003-06-27 | 2010-09-08 | 马特森技术公司 | 用于装卸半导体晶片的末端执行器 |
US7654596B2 (en) * | 2003-06-27 | 2010-02-02 | Mattson Technology, Inc. | Endeffectors for handling semiconductor wafers |
JP2005044938A (ja) * | 2003-07-25 | 2005-02-17 | Foi:Kk | アライナ付き基板移載装置 |
US7290813B2 (en) | 2004-12-16 | 2007-11-06 | Asyst Technologies, Inc. | Active edge grip rest pad |
JP4616731B2 (ja) * | 2005-09-01 | 2011-01-19 | 東京エレクトロン株式会社 | 塗布、現像装置 |
JP2010258170A (ja) | 2009-04-23 | 2010-11-11 | Tokyo Electron Ltd | 基板保持部材、基板搬送アーム及び基板搬送装置 |
JP2012212751A (ja) * | 2011-03-31 | 2012-11-01 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理装置の清掃装置 |
JP6034080B2 (ja) * | 2012-07-13 | 2016-11-30 | 株式会社Screenホールディングス | 基板保持装置 |
JP3182013U (ja) * | 2012-12-20 | 2013-02-28 | 東京エレクトロン株式会社 | 基板保持部材 |
JP2014175404A (ja) | 2013-03-07 | 2014-09-22 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP6335587B2 (ja) | 2014-03-31 | 2018-05-30 | 株式会社荏原製作所 | 基板保持機構、基板搬送装置、半導体製造装置 |
-
2015
- 2015-03-10 JP JP2015046668A patent/JP6535187B2/ja not_active Expired - Fee Related
-
2016
- 2016-03-07 US US15/063,137 patent/US10475691B2/en not_active Expired - Fee Related
- 2016-03-08 TW TW105107003A patent/TWI689031B/zh not_active IP Right Cessation
- 2016-03-09 SG SG10201601804QA patent/SG10201601804QA/en unknown
- 2016-03-09 CN CN201610132811.6A patent/CN105966916B/zh not_active Expired - Fee Related
- 2016-03-09 KR KR1020160028396A patent/KR102277943B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
US20160264365A1 (en) | 2016-09-15 |
TW201643985A (zh) | 2016-12-16 |
TWI689031B (zh) | 2020-03-21 |
US10475691B2 (en) | 2019-11-12 |
JP6535187B2 (ja) | 2019-06-26 |
CN105966916B (zh) | 2019-08-30 |
KR102277943B1 (ko) | 2021-07-16 |
KR20160110192A (ko) | 2016-09-21 |
CN105966916A (zh) | 2016-09-28 |
JP2016167531A (ja) | 2016-09-15 |
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