SG10201500360RA - An adjustment apparatus for adjusting processing units provided in a substrate processing apparatus, and a substrate processing apparatus having such an adjustment apparatus - Google Patents

An adjustment apparatus for adjusting processing units provided in a substrate processing apparatus, and a substrate processing apparatus having such an adjustment apparatus

Info

Publication number
SG10201500360RA
SG10201500360RA SG10201500360RA SG10201500360RA SG10201500360RA SG 10201500360R A SG10201500360R A SG 10201500360RA SG 10201500360R A SG10201500360R A SG 10201500360RA SG 10201500360R A SG10201500360R A SG 10201500360RA SG 10201500360R A SG10201500360R A SG 10201500360RA
Authority
SG
Singapore
Prior art keywords
substrate processing
adjustment
adjustment apparatus
processing apparatus
units provided
Prior art date
Application number
SG10201500360RA
Inventor
Koichi Takeda
Takamasa Nakamura
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Publication of SG10201500360RA publication Critical patent/SG10201500360RA/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4184—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by fault tolerance, reliability of production system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/26—Pc applications
    • G05B2219/2602—Wafer processing
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31044—Assembly of modular products, variant configurability
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32139—Select at workstation control parameters for cell, node
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • General Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Human Computer Interaction (AREA)
SG10201500360RA 2014-01-20 2015-01-16 An adjustment apparatus for adjusting processing units provided in a substrate processing apparatus, and a substrate processing apparatus having such an adjustment apparatus SG10201500360RA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014007654A JP6310260B2 (en) 2014-01-20 2014-01-20 Adjusting apparatus for adjusting a plurality of processing units in a substrate processing apparatus, and a substrate processing apparatus provided with the adjusting apparatus

Publications (1)

Publication Number Publication Date
SG10201500360RA true SG10201500360RA (en) 2015-08-28

Family

ID=53769620

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201500360RA SG10201500360RA (en) 2014-01-20 2015-01-16 An adjustment apparatus for adjusting processing units provided in a substrate processing apparatus, and a substrate processing apparatus having such an adjustment apparatus

Country Status (3)

Country Link
US (1) US9915938B2 (en)
JP (1) JP6310260B2 (en)
SG (1) SG10201500360RA (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
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JP2017185589A (en) * 2016-04-06 2017-10-12 株式会社荏原製作所 Substrate processing device
JP6894318B2 (en) * 2017-08-04 2021-06-30 株式会社荏原製作所 Screen control program and semiconductor manufacturing equipment
JP6653722B2 (en) * 2018-03-14 2020-02-26 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ Substrate processing equipment
JP7161954B2 (en) 2019-02-01 2022-10-27 株式会社荏原製作所 CONTROL SYSTEM, RECORDING MEDIUM RECORDING CONTROL SYSTEM PROGRAM, AND CONTROL SYSTEM METHOD
JP7382769B2 (en) * 2019-09-20 2023-11-17 株式会社Ｓｃｒｅｅｎホールディングス Substrate processing method

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Also Published As

Publication number Publication date
JP2015138786A (en) 2015-07-30
US20150241866A1 (en) 2015-08-27
US9915938B2 (en) 2018-03-13
JP6310260B2 (en) 2018-04-11

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