SG10201407535TA - Device and method for loading and unloading quartz reaction tube to and from semiconductor diffusion equipment - Google Patents

Device and method for loading and unloading quartz reaction tube to and from semiconductor diffusion equipment

Info

Publication number
SG10201407535TA
SG10201407535TA SG10201407535TA SG10201407535TA SG10201407535TA SG 10201407535T A SG10201407535T A SG 10201407535TA SG 10201407535T A SG10201407535T A SG 10201407535TA SG 10201407535T A SG10201407535T A SG 10201407535TA SG 10201407535T A SG10201407535T A SG 10201407535TA
Authority
SG
Singapore
Prior art keywords
loading
reaction tube
quartz reaction
semiconductor diffusion
diffusion equipment
Prior art date
Application number
SG10201407535TA
Inventor
Lin Xinjia
Hao Qi
Dong Jinwei
Original Assignee
Beijing Sevenstar Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Beijing Sevenstar Electronics Co Ltd filed Critical Beijing Sevenstar Electronics Co Ltd
Publication of SG10201407535TA publication Critical patent/SG10201407535TA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
    • B62B3/00—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor
    • B62B3/04—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor involving means for grappling or securing in place objects to be carried; Loading or unloading equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
    • B62B—HAND-PROPELLED VEHICLES, e.g. HAND CARTS OR PERAMBULATORS; SLEDGES
    • B62B3/00—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor
    • B62B3/10—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor characterised by supports specially adapted to objects of definite shape
    • B62B3/104—Hand carts having more than one axis carrying transport wheels; Steering devices therefor; Equipment therefor characterised by supports specially adapted to objects of definite shape the object being of cylindrical shape, e.g. barrels, buckets, dustbins
SG10201407535TA 2013-11-29 2014-11-13 Device and method for loading and unloading quartz reaction tube to and from semiconductor diffusion equipment SG10201407535TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310628388.5A CN103661527B (en) 2013-11-29 2013-11-29 The handler of crystal reaction tube and handling method thereof in semiconductor diffusion equipment

Publications (1)

Publication Number Publication Date
SG10201407535TA true SG10201407535TA (en) 2015-06-29

Family

ID=50300622

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201407535TA SG10201407535TA (en) 2013-11-29 2014-11-13 Device and method for loading and unloading quartz reaction tube to and from semiconductor diffusion equipment

Country Status (4)

Country Link
US (1) US9390952B2 (en)
CN (1) CN103661527B (en)
SG (1) SG10201407535TA (en)
TW (1) TWI559404B (en)

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CN106516555B (en) * 2016-10-28 2019-06-07 北京北方华创微电子装备有限公司 A kind of furnace body handler of adjustable conveyer frames height
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CN108407862A (en) * 2018-04-23 2018-08-17 南通联源机电科技股份有限公司 A kind of multi-functional stone travelling bogie
CN108840051A (en) * 2018-06-15 2018-11-20 中国核电工程有限公司 A kind of Container transfering vehicle
CN108819994A (en) * 2018-06-20 2018-11-16 郑州天舜电子技术有限公司 A kind of electronic product transport device that damping performance is good
CN109623720A (en) * 2019-02-02 2019-04-16 天津航天机电设备研究所 A kind of horizontal stretching device for on-board equipment installation
CN110588835A (en) * 2019-08-17 2019-12-20 徐州远航模具有限公司 Equipment suitable for mould transportation
CN111645742B (en) * 2020-06-15 2022-04-05 郑州航海园林景观工程有限公司 Landscape flowerpot is mobile device in batches
CN112097508A (en) * 2020-09-15 2020-12-18 无锡先导智能装备股份有限公司 Lifting device and drying equipment
CN113135209B (en) * 2021-03-10 2022-11-01 拓荆科技股份有限公司 Multi-silicon-chip transportation and taking-off vehicle
CN113520230A (en) * 2021-06-03 2021-10-22 深圳原子动力科技有限公司 Snatch workstation that mechanism and change rolled cloth mechanism

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Also Published As

Publication number Publication date
CN103661527A (en) 2014-03-26
TW201521117A (en) 2015-06-01
CN103661527B (en) 2016-03-02
US9390952B2 (en) 2016-07-12
US20150151772A1 (en) 2015-06-04
TWI559404B (en) 2016-11-21

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