CN104952776B - A heating dish is examined and stores special-purpose vehicle when dismounting - Google Patents
A heating dish is examined and stores special-purpose vehicle when dismounting Download PDFInfo
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- CN104952776B CN104952776B CN201510202923.XA CN201510202923A CN104952776B CN 104952776 B CN104952776 B CN 104952776B CN 201510202923 A CN201510202923 A CN 201510202923A CN 104952776 B CN104952776 B CN 104952776B
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- heating dish
- car body
- crossbeam
- examined
- support arm
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A heating dish is examined and stores special-purpose vehicle when dismounting, including car body, crystal cushion and universal wheel, universal wheel is fixed below car body, the tetragonal body that car body is made of crossbeam, end floor beam and column, support arm is equipped on upper end and intermediate crossbeam, crystal cushion is placed on support arm, and crystal cushion is equipped with opening, the spacing of the width of opening less than two support arms.After heating dish storage, storage special-purpose vehicle entirety center of gravity is still located at shelf center place on the lower side when heating dish is examined and dismounted, and no offset exists.The bottom shelf castor assembly mobile equipped with auxiliary, may be implemented trolley and moves back and forth or stop in use, be convenient for practical operation.Because of itself high resilience of crystal cushion, no matter any material, any damage will not be all caused to heating dish.
Description
Technical field: the present invention relates to a kind of trolley, especially a heating dish is examined and stores special-purpose vehicle when dismounting, and belongs to
In semiconductive thin film deposition applications and manufacturing technology field.
Background technique: in existing semiconductor coated film equipment, heating dish belongs to key components and parts, and material is usually aluminium
Or ceramics.Aluminium itself quality is softer, or intensity higher for hardness is biggish to collide with, rubs, and can generate trace.Ceramics are because adding
The characteristics of work, limits, under external force, it is easy to scaling-off or cracked.So no matter the heating dish of which kind of material,
In transport, inspection or durings use etc., all it is highly susceptible to damage.In addition, heating dish is by disk and installation fixed pedestal group
At the two diameter differs greatly, but both as one, inseparable.In addition, the heating cable and thermocouple installing pipe of heating dish
It is to stretch out disk body from installation fixed pedestal, realizes and external connection.The part and disk body are also Hard link, non-disconnectable
It unloads.Though cable surface has oneself distinctive protective layer, in the long-term use process, which is easy breakage, causes interior
Portion's cable is exposed.In addition, cable passes through, external force is repeatedly casual to be bent, pulls, and is also easily snapped off.On the other hand, heating dish
Surface on, be inlaid with multiple balls or column for being used to support wafer for being higher by disk.Due to safety concerns, heating dish is being put at present
When setting, we can only use the upper disk surface of heating dish to place as substrate.So these are used to support wafer when dismounting
The widget that ball or column and positioning pin etc. are easy to fall off must be removed first, individually placed.In addition, because high temperature deformation and
The presence of by-product in technical process, causing part to be used to support the ball of wafer or column cannot normally take out after use.So
Use the upper disk surface of heating dish that will form a branch in the bottom surface of heating dish as the ball or column that when substrate storage, disk is retained
Point causes disk that cannot make heating dish itself that can generate certain deformation, so that heating dish disk well with storage face contact
The flatness in face is unqualified, service performance failure.Sometimes, because of the limitation of temporary memory space, it will lead to the hardness of cable
Bending damage.In any case, can all injury be generated to heating dish.
Summary of the invention: in view of the above shortcomings of the prior art, the design feature of present invention combination heating dish itself, i.e. disk
Greatly, installation pedestal is elongated, heating cable easy damaged etc., devises a heating dish and examines and store special-purpose vehicle when dismounting.
To achieve the above object, the technical solution adopted by the present invention is that: a heating dish examine and when dismounting store it is dedicated
Vehicle, including car body, crystal cushion and universal wheel, universal wheel are fixed below car body, and car body is by crossbeam, end floor beam and column
The tetragonal body of composition is equipped with support arm on upper end and intermediate crossbeam, and crystal cushion is placed on support arm, and crystal cushion is equipped with
Opening, the spacing of the width of opening less than two support arms.
After heating dish storage, it is on the lower side to be still located at shelf center for storage special-purpose vehicle entirety center of gravity when heating dish is examined and dismounted
Place, no offset exist.To guarantee not have because of the phenomenon that centre-of gravity shift causes trolley to overturn appearance in use.Goods
The frame bottom castor assembly mobile equipped with auxiliary, may be implemented trolley and moves back and forth or stop in use, convenient for practical
Operation.Because of itself high resilience of crystal cushion, no matter any material, any damage will not be all caused to heating dish.Meanwhile
Consider from the cable position of heating dish, there are enough parking spaces there will be no hardness in entire access procedure for the shelf
Equivalent damage is bent to occur.In disassembly process, heating dish upper disk surface be used to support wafer ball or column and other positioning it is small
Component can decide whether to remove according to the actual situation.When being not required to remove, trolley can be directly placed at together with heating dish
On.In this way, there is no any influence to original structure, it is also convenient for next directly use, the disassembly process of widget is saved, contracts
The short replacement cycle.In heating dish checkout procedure, detection and disk flatness for heating dish upper disk surface relative dimensions
Detection etc. is all very convenient.
Detailed description of the invention:
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is usage state diagram of the invention.
Fig. 3 is the structural schematic diagram of car body.
Specific embodiment:
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
As shown in Figure 1-Figure 3: a heating dish is examined and stores special-purpose vehicle, including car body 2,1 and of crystal cushion when dismounting
Universal wheel 13, universal wheel 13 are fixed below car body 2, the tetragonal body that car body is made of crossbeam 5, end floor beam 3 and column 10,
It is equipped with support arm 6 on upper end and intermediate crossbeam 5, crystal cushion 1 is placed on support arm 6, and crystal cushion is equipped with opening, opening
Width less than the spacing of two support arms, the crossbeam 5 is arranged on the outside of the middle line of two end floor beams 3, and the setting of support arm 6 exists
On the medial surface of the crossbeam 5, heating dish 14 is placed on crystal cushion 1.
Car body 2 is composed of the aluminium section of different length by the section jointing part of different model.Car body 2 is main
Led to by 3, three, two butt crossbeam, 5, four, crossbeam support arm 6, the following crossbeam 11 of the castor assembly 13, four of four columns 10, four
Cross multiple corresponding section jointing parts (including right-angle connector 8, T-type connector 12) and T-type built-in nut 7 and corresponding
Standard component 9 be formed by connecting.The end of every support arm 6 and end floor beam 3 is blocked with special closure plate 4, to guarantee whole outer
The perfection of sight, is shown in Fig. 3.The trolley is divided into upper and lower two layers by we, and every layer can place a heating dish.The crystal on upper layer
Cushion 1 is directly placed in the plane that end floor beam 3, support arm 6 and crossbeam 5 are constituted.The crystal cushion 1 of lower layer is directly placed at down
In the plane that side crossbeam 11, support arm 6 and crossbeam 5 are constituted.The weight of every layer of heating dish mainly by two support arms 6 and crossbeam 5
It undertakes.
In use, heating dish 14 is that upper disk surface rushes to, and is horizontally arranged, straight by its lower disk and crystal cushion 1
Contact.Itself high resilience of crystal cushion 1, no matter any material its any damage will not be all caused to heating dish.
Claims (1)
1. a heating dish is examined and when dismounting stores special-purpose vehicle, it is characterised in that: including car body, crystal cushion and universal wheel,
Universal wheel is fixed below car body, the tetragonal body that car body is made of crossbeam, end floor beam and column, in upper end and intermediate cross
Beam is equipped with support arm, and crystal cushion is placed on support arm, and crystal cushion is equipped with opening, and the width of opening is less than two support arms
Spacing, the crossbeam are arranged on the outside of the middle line of two end floor beams, and the support arm is arranged on the medial surface of the crossbeam.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510202923.XA CN104952776B (en) | 2015-04-24 | 2015-04-24 | A heating dish is examined and stores special-purpose vehicle when dismounting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510202923.XA CN104952776B (en) | 2015-04-24 | 2015-04-24 | A heating dish is examined and stores special-purpose vehicle when dismounting |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104952776A CN104952776A (en) | 2015-09-30 |
| CN104952776B true CN104952776B (en) | 2019-04-26 |
Family
ID=54167340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510202923.XA Active CN104952776B (en) | 2015-04-24 | 2015-04-24 | A heating dish is examined and stores special-purpose vehicle when dismounting |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104952776B (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6196001B1 (en) * | 1999-10-12 | 2001-03-06 | Alliedsignal Inc. | Environment controlled WIP cart |
| CN102874530A (en) * | 2011-07-12 | 2013-01-16 | 村田自动化机械有限公司 | Transport carriage |
| CN203283265U (en) * | 2013-05-15 | 2013-11-13 | 马鞍山市万鑫铸造有限公司 | High temperature casting transporter |
| CN203295652U (en) * | 2013-05-20 | 2013-11-20 | 浙江矽盛电子有限公司 | Special vehicle for single crystal furnace heater |
| CN103661527A (en) * | 2013-11-29 | 2014-03-26 | 北京七星华创电子股份有限公司 | Device and method for loading and unloading quartz reaction tube in semiconductor diffusion equipment |
| CN103855063A (en) * | 2012-12-04 | 2014-06-11 | 浚丰太阳能(江苏)有限公司 | Battery piece transferring trolley |
| CN203967048U (en) * | 2014-07-21 | 2014-11-26 | 中芯国际集成电路制造(北京)有限公司 | A kind of installation and removal device for wafer heating plate |
| CN104253074A (en) * | 2014-09-30 | 2014-12-31 | 炘源晶光伏科技(洛阳)有限公司 | Transfer tooling of solar cell panel |
| CN104569775A (en) * | 2013-10-29 | 2015-04-29 | 东京毅力科创株式会社 | Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202848493U (en) * | 2012-06-01 | 2013-04-03 | 浙江吉润汽车有限公司 | Brake storage frame |
-
2015
- 2015-04-24 CN CN201510202923.XA patent/CN104952776B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6196001B1 (en) * | 1999-10-12 | 2001-03-06 | Alliedsignal Inc. | Environment controlled WIP cart |
| CN102874530A (en) * | 2011-07-12 | 2013-01-16 | 村田自动化机械有限公司 | Transport carriage |
| CN103855063A (en) * | 2012-12-04 | 2014-06-11 | 浚丰太阳能(江苏)有限公司 | Battery piece transferring trolley |
| CN203283265U (en) * | 2013-05-15 | 2013-11-13 | 马鞍山市万鑫铸造有限公司 | High temperature casting transporter |
| CN203295652U (en) * | 2013-05-20 | 2013-11-20 | 浙江矽盛电子有限公司 | Special vehicle for single crystal furnace heater |
| CN104569775A (en) * | 2013-10-29 | 2015-04-29 | 东京毅力科创株式会社 | Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus |
| CN103661527A (en) * | 2013-11-29 | 2014-03-26 | 北京七星华创电子股份有限公司 | Device and method for loading and unloading quartz reaction tube in semiconductor diffusion equipment |
| CN203967048U (en) * | 2014-07-21 | 2014-11-26 | 中芯国际集成电路制造(北京)有限公司 | A kind of installation and removal device for wafer heating plate |
| CN104253074A (en) * | 2014-09-30 | 2014-12-31 | 炘源晶光伏科技(洛阳)有限公司 | Transfer tooling of solar cell panel |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104952776A (en) | 2015-09-30 |
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Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Nanxin District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |
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