CN104952776A - Special-purposed heating disk storage dolly during testing and dismounting - Google Patents
Special-purposed heating disk storage dolly during testing and dismounting Download PDFInfo
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- CN104952776A CN104952776A CN201510202923.XA CN201510202923A CN104952776A CN 104952776 A CN104952776 A CN 104952776A CN 201510202923 A CN201510202923 A CN 201510202923A CN 104952776 A CN104952776 A CN 104952776A
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- dolly
- dismounting
- heating disk
- heating plate
- special
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention relates to a special-purposed heating disk storage dolly during testing and dismounting. The dolly comprises dolly body, a crystal cushion and universal wheels, wherein the universal wheels are fixed under the dolly body, the dolly body is a cuboid composed of crossbeams, end crossbeams and columns, the crossbeams at the upper end and in the middle are provided with support arms, the crystal cushion is placed on the support arms, and provided with an opening, and the width of the opening is lower than the distance between the two support arms. After a heating disk is stored, the gravity center of the whole storage dolly is placed at a position below a shelf center during testing and dismounting of the heating disk, and offset does not occur. The bottom of a shelf is provided with a truckle assembly which assists in movement, the dolly can move to and form and stop in the using process, and convenience is provided for practical operation. The crystal cushion itself is elastic, so that the heating disk is prevented from damage by any material.
Description
Technical field: the present invention relates to a kind of dolly, deposits special-purpose vehicle when especially a heating plate inspection and dismounting, belongs to semiconductive thin film deposition applications and manufacturing technology field.。
Background technology: in existing semiconductor coated film equipment, heating plate belongs to key components and parts, and its material is generally aluminium or pottery.Aluminium self quality is softer, and what for hardness, higher or intensity was larger collides with, rub, and all can produce vestige.Pottery, because of the feature restriction of processing, under external force, is easy to slag or occurs crackle.So the heating plate of no matter which kind of material, it, in the processes such as transport, inspection or use, is all easy to sustain damage.In addition, heating plate is made up of card and installation fixed pedestal, and the two different diameters is very large, but the two is as one, inseparable.In addition, the heating cable of heating plate and thermocouple mounting pipe are all stretch out disk body from installation fixed pedestal, realize and outside connection.This part and disk body are also Hard link, non-dismountable.Though cable surface has oneself distinctive protective layer, in long-term use procedure, this protective layer is easily damaged, causes Internal cable exposed.In addition, cable repeatedly casually to bend through external force, pulls, and also easily fractures.On the other hand, on the surface of heating plate, be inlaid with the multiple ball for supporting wafer or the post that exceed card.For security consideration, current heating plate is when placing, and we can only place as substrate with the upper disk surface of heating plate.So during dismounting, these balls for supporting wafer or post and positioning pin etc. hold caducous widget and must first remove, and place separately.In addition, because the existence of accessory substance in high temperature deformation and technical process, part is caused can not normally to take out after a procedure for the ball of supporting wafer or post.So, when depositing as substrate with the upper disk surface of heating plate, the ball that card retains or post will form a fulcrum in the bottom surface of heating plate, card is caused well not contact with storage surface, make heating plate self can produce certain distortion, to such an extent as to the flatness of heating plate card is defective, its serviceability lost efficacy.Sometimes, because the restriction of temporary memory space, the rigid bending damage of cable can be caused.In any case, all injury can be produced to heating plate.
Summary of the invention: for above-mentioned the deficiencies in the prior art, the present invention is in conjunction with the design feature of heating plate self, and namely card is large, the aspects such as mounting base is elongated, heating cable easy damaged, deposits special-purpose vehicle when devising the inspection of a heating plate and dismounting.
For achieving the above object, the technical solution used in the present invention is: deposit special-purpose vehicle when a heating plate inspection and dismounting, comprise car body, crystal cushion and universal wheel, universal wheel is fixed on below car body, the tetragonal body that car body is made up of crossbeam, end floor beam and column, upper end and middle crossbeam are provided with support arm, and crystal cushion is placed on support arm, crystal cushion is provided with opening, and the width of opening is less than the spacing of two support arms.
After heating plate is deposited, deposit when heating plate inspection and dismounting under the overall center of gravity of special-purpose vehicle is still positioned at shelf center deviation and locate, exist without skew.Thus ensure in use, not have because centre-of gravity shift causes the phenomenon of dolly overturning to occur.Bottom shelf is equipped with the castor assembly of auxiliary moving, can realize dolly and in use moves around or stop, be convenient to practical operation.Because self high resilience of crystal cushion, no matter any material, it all can not cause any damage to heating plate.Meanwhile, consider from the cable position of heating plate, these shelf leave enough parking spaces, in whole access procedure, there will be no rigid bending equivalent damage to occur.In disassembly process, heating plate upper disk surface is used for the ball of supporting wafer or the widget of post and other location, can determine whether pull down according to actual conditions.When not needing to pull down, directly can be placed on dolly together with heating plate.Like this, on original structure without any impact, be also convenient to directly use next time, save the disassembly process of widget, shorten the replacement cycle.In heating plate checkout procedure, for the detection of heating plate upper disk surface relative dimensions and the detection etc. of card flatness, be all very easily.
Accompanying drawing illustrates:
Fig. 1 is structural representation of the present invention.
Fig. 2 is using state figure of the present invention.
Fig. 3 is the structural representation of car body.
Embodiment:
Below in conjunction with the accompanying drawing in the embodiment of the present invention, to the technical scheme in the embodiment of the present invention carry out clear, intactly describe, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiment.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
As shown in Figure 1-Figure 3: when a heating plate inspection and dismounting, deposit special-purpose vehicle, comprise car body 2, crystal cushion 1 and universal wheel 13, universal wheel 13 is fixed on below car body 2, the tetragonal body that car body is made up of crossbeam 5, end floor beam 3 and column 10, upper end and middle crossbeam 5 are provided with support arm 6, crystal cushion 1 is placed on support arm 6, and crystal cushion is provided with opening, and the width of opening is less than the spacing of two support arms.Heating plate 14 is placed on crystal cushion 1.
Car body 2, by the aluminium section of different length, is combined by the section jointing part of different model.Car body 2 passes through multiple corresponding section jointing part (comprising right-angle connector 8, T-shaped connector 12) and T-shaped built-in nut 7 and corresponding standard component 9 primarily of the following crossbeam 11 of two butt crossbeams, 3, three crossbeams, 5, four support arm 6, four root posts, 10, four castor assemblies 13, four and is formed by connecting.Special closure plate 4 shutoff is all used in the end of every root support arm 6 and end floor beam 3, thus ensures the perfection of overall appearance, sees Fig. 3.This dolly is divided into upper and lower two-layer by we, can place a heating plate for every layer.The crystal cushion 1 on upper strata is directly placed in the plane that end floor beam 3, support arm 6 and crossbeam 5 form.The crystal cushion 1 of lower floor is directly placed in the plane that following crossbeam 11, support arm 6 and crossbeam 5 form.The weight of every layer of heating plate is born primarily of two support arms 6 and crossbeam 5.
In use, heating plate 14 is that upper disk surface rushes to, horizontal positioned, is directly contacted with crystal cushion 1 by its lower card.Self high resilience of crystal cushion 1, any material its all can not cause any damage to heating plate.
Claims (1)
1. deposit special-purpose vehicle when a heating plate inspection and dismounting, it is characterized in that: comprise car body, crystal cushion and universal wheel, universal wheel is fixed on below car body, the tetragonal body that car body is made up of crossbeam, end floor beam and column, upper end and middle crossbeam are provided with support arm, crystal cushion is placed on support arm, and crystal cushion is provided with opening, and the width of opening is less than the spacing of two support arms.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510202923.XA CN104952776B (en) | 2015-04-24 | 2015-04-24 | A heating dish is examined and stores special-purpose vehicle when dismounting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510202923.XA CN104952776B (en) | 2015-04-24 | 2015-04-24 | A heating dish is examined and stores special-purpose vehicle when dismounting |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104952776A true CN104952776A (en) | 2015-09-30 |
| CN104952776B CN104952776B (en) | 2019-04-26 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510202923.XA Active CN104952776B (en) | 2015-04-24 | 2015-04-24 | A heating dish is examined and stores special-purpose vehicle when dismounting |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104952776B (en) |
Citations (10)
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|---|---|---|---|---|
| US6196001B1 (en) * | 1999-10-12 | 2001-03-06 | Alliedsignal Inc. | Environment controlled WIP cart |
| CN102874530A (en) * | 2011-07-12 | 2013-01-16 | 村田自动化机械有限公司 | Transport carriage |
| CN202848493U (en) * | 2012-06-01 | 2013-04-03 | 浙江吉润汽车有限公司 | Brake storage frame |
| CN203283265U (en) * | 2013-05-15 | 2013-11-13 | 马鞍山市万鑫铸造有限公司 | High temperature casting transporter |
| CN203295652U (en) * | 2013-05-20 | 2013-11-20 | 浙江矽盛电子有限公司 | Special vehicle for single crystal furnace heater |
| CN103661527A (en) * | 2013-11-29 | 2014-03-26 | 北京七星华创电子股份有限公司 | Device and method for loading and unloading quartz reaction tube in semiconductor diffusion equipment |
| CN103855063A (en) * | 2012-12-04 | 2014-06-11 | 浚丰太阳能(江苏)有限公司 | Battery piece transferring trolley |
| CN203967048U (en) * | 2014-07-21 | 2014-11-26 | 中芯国际集成电路制造(北京)有限公司 | A kind of installation and removal device for wafer heating plate |
| CN104253074A (en) * | 2014-09-30 | 2014-12-31 | 炘源晶光伏科技(洛阳)有限公司 | Transfer tooling of solar cell panel |
| CN104569775A (en) * | 2013-10-29 | 2015-04-29 | 东京毅力科创株式会社 | Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus |
-
2015
- 2015-04-24 CN CN201510202923.XA patent/CN104952776B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6196001B1 (en) * | 1999-10-12 | 2001-03-06 | Alliedsignal Inc. | Environment controlled WIP cart |
| CN102874530A (en) * | 2011-07-12 | 2013-01-16 | 村田自动化机械有限公司 | Transport carriage |
| CN202848493U (en) * | 2012-06-01 | 2013-04-03 | 浙江吉润汽车有限公司 | Brake storage frame |
| CN103855063A (en) * | 2012-12-04 | 2014-06-11 | 浚丰太阳能(江苏)有限公司 | Battery piece transferring trolley |
| CN203283265U (en) * | 2013-05-15 | 2013-11-13 | 马鞍山市万鑫铸造有限公司 | High temperature casting transporter |
| CN203295652U (en) * | 2013-05-20 | 2013-11-20 | 浙江矽盛电子有限公司 | Special vehicle for single crystal furnace heater |
| CN104569775A (en) * | 2013-10-29 | 2015-04-29 | 东京毅力科创株式会社 | Maintenance carriage for wafer inspection apparatus and maintenance method for wafer inspection apparatus |
| CN103661527A (en) * | 2013-11-29 | 2014-03-26 | 北京七星华创电子股份有限公司 | Device and method for loading and unloading quartz reaction tube in semiconductor diffusion equipment |
| CN203967048U (en) * | 2014-07-21 | 2014-11-26 | 中芯国际集成电路制造(北京)有限公司 | A kind of installation and removal device for wafer heating plate |
| CN104253074A (en) * | 2014-09-30 | 2014-12-31 | 炘源晶光伏科技(洛阳)有限公司 | Transfer tooling of solar cell panel |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104952776B (en) | 2019-04-26 |
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Address after: No.900 Shuijia, Hunnan District, Shenyang City, Liaoning Province Patentee after: Tuojing Technology Co.,Ltd. Address before: 110179 3rd floor, No.1-1 Xinyuan street, Nanxin District, Shenyang City, Liaoning Province Patentee before: PIOTECH Co.,Ltd. |
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