SE9804398D0 - Mätinstrument och förfarande för mätning av damm- och smutsbeläggningsgrad på en yta - Google Patents

Mätinstrument och förfarande för mätning av damm- och smutsbeläggningsgrad på en yta

Info

Publication number
SE9804398D0
SE9804398D0 SE9804398A SE9804398A SE9804398D0 SE 9804398 D0 SE9804398 D0 SE 9804398D0 SE 9804398 A SE9804398 A SE 9804398A SE 9804398 A SE9804398 A SE 9804398A SE 9804398 D0 SE9804398 D0 SE 9804398D0
Authority
SE
Sweden
Prior art keywords
measurement
dust
intended
measuring
test film
Prior art date
Application number
SE9804398A
Other languages
English (en)
Other versions
SE9804398L (sv
SE521948C2 (sv
Inventor
Ari Kouvonen
Original Assignee
Act Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Act Ab filed Critical Act Ab
Priority to SE9804398A priority Critical patent/SE521948C2/sv
Publication of SE9804398D0 publication Critical patent/SE9804398D0/sv
Priority to JP2000591416A priority patent/JP2002533717A/ja
Priority to EP99964901A priority patent/EP1147404A1/en
Priority to PCT/SE1999/002405 priority patent/WO2000039566A1/en
Priority to AU30931/00A priority patent/AU3093100A/en
Publication of SE9804398L publication Critical patent/SE9804398L/sv
Publication of SE521948C2 publication Critical patent/SE521948C2/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Sampling And Sample Adjustment (AREA)
SE9804398A 1998-12-17 1998-12-17 Mätinstrument och förfarande för mätning av damm- och smutsbeläggningsgrad på en yta SE521948C2 (sv)

Priority Applications (5)

Application Number Priority Date Filing Date Title
SE9804398A SE521948C2 (sv) 1998-12-17 1998-12-17 Mätinstrument och förfarande för mätning av damm- och smutsbeläggningsgrad på en yta
JP2000591416A JP2002533717A (ja) 1998-12-17 1999-12-17 表面の粉塵および汚れの程度を測定するための機器および方法
EP99964901A EP1147404A1 (en) 1998-12-17 1999-12-17 An instrument and a method for measuring the degree of dust and dirt on a surface
PCT/SE1999/002405 WO2000039566A1 (en) 1998-12-17 1999-12-17 An instrument and a method for measuring the degree of dust and dirt on a surface
AU30931/00A AU3093100A (en) 1998-12-17 1999-12-17 An instrument and a method for measuring the degree of dust and dirt on a surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9804398A SE521948C2 (sv) 1998-12-17 1998-12-17 Mätinstrument och förfarande för mätning av damm- och smutsbeläggningsgrad på en yta

Publications (3)

Publication Number Publication Date
SE9804398D0 true SE9804398D0 (sv) 1998-12-17
SE9804398L SE9804398L (sv) 2000-06-18
SE521948C2 SE521948C2 (sv) 2003-12-23

Family

ID=20413725

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9804398A SE521948C2 (sv) 1998-12-17 1998-12-17 Mätinstrument och förfarande för mätning av damm- och smutsbeläggningsgrad på en yta

Country Status (5)

Country Link
EP (1) EP1147404A1 (sv)
JP (1) JP2002533717A (sv)
AU (1) AU3093100A (sv)
SE (1) SE521948C2 (sv)
WO (1) WO2000039566A1 (sv)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10145985C2 (de) * 2001-09-18 2003-11-13 Fkfs Forschungsinstitut Fuer K Verfahren und Vorrichtungen zur Bestimmung der quantitativen Verschmutzung von Oberflächen
EP1635167B1 (de) * 2004-09-10 2007-10-31 Cognis IP Management GmbH Verfahren zur quantitativen Messung von Ablagerung auf festen Oberflächen
US8174690B2 (en) 2007-05-11 2012-05-08 Argos Solutions As Apparatus for characterizing a surface structure
EP2410317A1 (de) * 2010-07-13 2012-01-25 Krämer AG Bassersdorf Verfahren zum Beurteilen von an einem Körper anhaftenden Partikeln
SE1250056A1 (sv) 2012-01-27 2013-07-28 Spaarab Produkter Ab Detektering av kontaminerade områden
KR101582461B1 (ko) * 2014-10-22 2016-01-05 주식회사 제덱스 클린룸의 표면 입자 검출용 시험 필름
KR101809009B1 (ko) * 2017-08-02 2017-12-15 주식회사 제덱스 투명 또는 반투명 필름의 표면 이물 검출기
CN110108536B (zh) * 2019-06-18 2021-10-01 中国计量大学 一种用于定日镜面积灰度检测比对的标准板制作方法
DE102020212563A1 (de) 2020-10-05 2022-04-07 Carl Zeiss Smt Gmbh Verfahren zur Bestimmung der Partikelbelastung einer Oberfläche

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1240052A (en) * 1984-11-30 1988-08-02 Motoji Shiozumi Method of and apparatus for determining glossinesses of surface of body
US5083161A (en) * 1989-08-25 1992-01-21 Xerox Corporation Densitometer for measuring developability
DK163538C (da) * 1990-03-22 1992-08-03 Abk Bygge & Miljoeteknik Fremgangsmaade og maaleapparat til rengoeringskontrol
US5461481A (en) * 1992-12-29 1995-10-24 Research Technology International Company System, apparatus and/or method for analyzing light intensities of light reflected from a surface of a sample
US5412221A (en) * 1994-04-26 1995-05-02 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Particle fallout/activity sensor
NO307675B1 (no) * 1997-04-18 2000-05-08 Lasse Leirfall Anvendelse av en mÕleanordning til indikering av en forurenset, tilsmusset eller brannfarlig tilstand

Also Published As

Publication number Publication date
EP1147404A1 (en) 2001-10-24
AU3093100A (en) 2000-07-31
SE9804398L (sv) 2000-06-18
WO2000039566A1 (en) 2000-07-06
SE521948C2 (sv) 2003-12-23
JP2002533717A (ja) 2002-10-08

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Legal Events

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