SE9702182L - Förfarande för att anordna en begravd kondensator och en begravd kondensator anordnad enligt förfarandet - Google Patents

Förfarande för att anordna en begravd kondensator och en begravd kondensator anordnad enligt förfarandet

Info

Publication number
SE9702182L
SE9702182L SE9702182A SE9702182A SE9702182L SE 9702182 L SE9702182 L SE 9702182L SE 9702182 A SE9702182 A SE 9702182A SE 9702182 A SE9702182 A SE 9702182A SE 9702182 L SE9702182 L SE 9702182L
Authority
SE
Sweden
Prior art keywords
buried capacitor
trench
arranged according
capacitor
buried
Prior art date
Application number
SE9702182A
Other languages
Unknown language ( )
English (en)
Other versions
SE9702182D0 (sv
SE510455C2 (sv
Inventor
Torbjoern Larsson
Jonas Joensson
Original Assignee
Ericsson Telefon Ab L M
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ericsson Telefon Ab L M filed Critical Ericsson Telefon Ab L M
Priority to SE9702182A priority Critical patent/SE510455C2/sv
Publication of SE9702182D0 publication Critical patent/SE9702182D0/sv
Priority to PCT/SE1998/001063 priority patent/WO1998056020A2/en
Priority to CA002292664A priority patent/CA2292664A1/en
Priority to KR1019997011498A priority patent/KR20010013492A/ko
Priority to JP50226899A priority patent/JP2002503395A/ja
Priority to AU80472/98A priority patent/AU8047298A/en
Priority to EP98928754A priority patent/EP1025570A2/en
Priority to US09/090,218 priority patent/US6140199A/en
Priority to CNB988059134A priority patent/CN1155029C/zh
Priority to TW087109300A priority patent/TW385515B/zh
Publication of SE9702182L publication Critical patent/SE9702182L/sv
Publication of SE510455C2 publication Critical patent/SE510455C2/sv

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00—Fixed capacitors; Processes of their manufacture
    • H01G4/33—Thin- or thick-film capacitors 
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/86—Types of semiconductor device ; Multistep manufacturing processes therefor controllable only by variation of the electric current supplied, or only the electric potential applied, to one or more of the electrodes carrying the current to be rectified, amplified, oscillated or switched
    • H01L29/92—Capacitors having potential barriers
    • H01L29/94—Metal-insulator-semiconductors, e.g. MOS
    • H01L29/945—Trench capacitors

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Semiconductor Integrated Circuits (AREA)
SE9702182A 1997-06-06 1997-06-06 Förfarande för att anordna en begravd kondensator och en begravd kondensator anordnad enligt förfarandet SE510455C2 (sv)

Priority Applications (10)

Application Number Priority Date Filing Date Title
SE9702182A SE510455C2 (sv) 1997-06-06 1997-06-06 Förfarande för att anordna en begravd kondensator och en begravd kondensator anordnad enligt förfarandet
CNB988059134A CN1155029C (zh) 1997-06-06 1998-06-04 埋置式电容器的装设方法和用这种方法装设的埋置式电容器
JP50226899A JP2002503395A (ja) 1997-06-06 1998-06-04 埋め込み型キャパシタの配置方法および前記方法に従って配置された埋め込み型キャパシタ
CA002292664A CA2292664A1 (en) 1997-06-06 1998-06-04 Method for arrangement of a buried capacitor, and a buried capacitor arranged according to said method
KR1019997011498A KR20010013492A (ko) 1997-06-06 1998-06-04 매설된 캐패시터를 배열하는 방법 및 이 방법에 따라배열된 매설된 캐패시터
PCT/SE1998/001063 WO1998056020A2 (en) 1997-06-06 1998-06-04 Method for arrangement of a buried capacitor, and a buried capacitor arranged according to said method
AU80472/98A AU8047298A (en) 1997-06-06 1998-06-04 Method for arrangement of a buried capacitor, and a buried capacitor arranged according to said method
EP98928754A EP1025570A2 (en) 1997-06-06 1998-06-04 Method for arrangement of a buried capacitor, and a buried capacitor arranged according to said method
US09/090,218 US6140199A (en) 1997-06-06 1998-06-04 Method and arrangement of a buried capacitor, and a buried capacitor arranged according to said method
TW087109300A TW385515B (en) 1997-06-06 1998-06-11 Method for arrangement of a buried capacitor and a buried capacitor arranged according to said method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE9702182A SE510455C2 (sv) 1997-06-06 1997-06-06 Förfarande för att anordna en begravd kondensator och en begravd kondensator anordnad enligt förfarandet

Publications (3)

Publication Number Publication Date
SE9702182D0 SE9702182D0 (sv) 1997-06-06
SE9702182L true SE9702182L (sv) 1998-12-07
SE510455C2 SE510455C2 (sv) 1999-05-25

Family

ID=20407294

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9702182A SE510455C2 (sv) 1997-06-06 1997-06-06 Förfarande för att anordna en begravd kondensator och en begravd kondensator anordnad enligt förfarandet

Country Status (10)

Country Link
US (1) US6140199A (sv)
EP (1) EP1025570A2 (sv)
JP (1) JP2002503395A (sv)
KR (1) KR20010013492A (sv)
CN (1) CN1155029C (sv)
AU (1) AU8047298A (sv)
CA (1) CA2292664A1 (sv)
SE (1) SE510455C2 (sv)
TW (1) TW385515B (sv)
WO (1) WO1998056020A2 (sv)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6339228B1 (en) * 1999-10-27 2002-01-15 International Business Machines Corporation DRAM cell buried strap leakage measurement structure and method
DE10158798A1 (de) * 2001-11-30 2003-06-18 Infineon Technologies Ag Kondensator und Verfahren zum Herstellen eines Kondensators
US6953980B2 (en) * 2002-06-11 2005-10-11 Semiconductor Components Industries, Llc Semiconductor filter circuit and method
US8143659B2 (en) * 2008-04-14 2012-03-27 Infineon Technologies Ag Vertical trench capacitor, chip comprising the capacitor, and method for producing the capacitor
CN103474479B (zh) * 2012-06-08 2016-09-07 上海华虹宏力半导体制造有限公司 垂直mim电容及其制造方法
CN108288653B (zh) * 2018-01-10 2020-01-21 嘉善品智联科技有限公司 一种具有参考电容的传感器件及其制造方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6148956A (ja) * 1984-08-16 1986-03-10 Toshiba Corp 半導体装置の製造方法
JPH01227468A (ja) * 1988-03-08 1989-09-11 Oki Electric Ind Co Ltd 半導体記憶装置
JPH0216763A (ja) * 1988-07-05 1990-01-19 Toshiba Corp 半導体装置の製造方法
WO1990011619A1 (en) * 1989-03-23 1990-10-04 Grumman Aerospace Corporation Single trench mosfet-capacitor cell for analog signal processing
US5013680A (en) * 1990-07-18 1991-05-07 Micron Technology, Inc. Process for fabricating a DRAM array having feature widths that transcend the resolution limit of available photolithography
US5213999A (en) * 1990-09-04 1993-05-25 Delco Electronics Corporation Method of metal filled trench buried contacts
KR960004443B1 (ko) * 1992-03-19 1996-04-03 삼성전자주식회사 커패시터를 갖는 반도체 장치 및 그 제조방법
US5708559A (en) * 1995-10-27 1998-01-13 International Business Machines Corporation Precision analog metal-metal capacitor
US5937296A (en) * 1996-12-20 1999-08-10 Siemens Aktiengesellschaft Memory cell that includes a vertical transistor and a trench capacitor

Also Published As

Publication number Publication date
WO1998056020A2 (en) 1998-12-10
SE9702182D0 (sv) 1997-06-06
CA2292664A1 (en) 1998-12-10
JP2002503395A (ja) 2002-01-29
EP1025570A2 (en) 2000-08-09
US6140199A (en) 2000-10-31
AU8047298A (en) 1998-12-21
WO1998056020A3 (en) 1999-03-04
CN1259225A (zh) 2000-07-05
CN1155029C (zh) 2004-06-23
KR20010013492A (ko) 2001-02-26
TW385515B (en) 2000-03-21
SE510455C2 (sv) 1999-05-25

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Legal Events

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