SE9603587D0 - A device for epitaxially growing objects and method for such a growth - Google Patents
A device for epitaxially growing objects and method for such a growthInfo
- Publication number
- SE9603587D0 SE9603587D0 SE9603587A SE9603587A SE9603587D0 SE 9603587 D0 SE9603587 D0 SE 9603587D0 SE 9603587 A SE9603587 A SE 9603587A SE 9603587 A SE9603587 A SE 9603587A SE 9603587 D0 SE9603587 D0 SE 9603587D0
- Authority
- SE
- Sweden
- Prior art keywords
- conduit
- epitaxially growing
- growth
- room
- substrate
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Polyesters Or Polycarbonates (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9603587A SE9603587D0 (sv) | 1996-10-01 | 1996-10-01 | A device for epitaxially growing objects and method for such a growth |
EP97944244A EP0931186B1 (en) | 1996-10-01 | 1997-09-25 | A device for epitaxially growing objects and method for such a growth |
DE69728681T DE69728681T2 (de) | 1996-10-01 | 1997-09-25 | Verfahren und Vorrichtung zur epiktaktischem Wachsen von Objekten |
JP51643398A JP4510151B2 (ja) | 1996-10-01 | 1997-09-25 | 目的物をエピタキシャル成長させるための装置およびそのような成長をさせるための方法 |
AT97944244T ATE264413T1 (de) | 1996-10-01 | 1997-09-25 | Verfahren und vorrichtung zur epitaktischem wachsen von objekten |
PCT/SE1997/001612 WO1998014643A1 (en) | 1996-10-01 | 1997-09-25 | A device for epitaxially growing objects and method for such a growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9603587A SE9603587D0 (sv) | 1996-10-01 | 1996-10-01 | A device for epitaxially growing objects and method for such a growth |
Publications (1)
Publication Number | Publication Date |
---|---|
SE9603587D0 true SE9603587D0 (sv) | 1996-10-01 |
Family
ID=20404095
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE9603587A SE9603587D0 (sv) | 1996-10-01 | 1996-10-01 | A device for epitaxially growing objects and method for such a growth |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0931186B1 (sv) |
JP (1) | JP4510151B2 (sv) |
AT (1) | ATE264413T1 (sv) |
DE (1) | DE69728681T2 (sv) |
SE (1) | SE9603587D0 (sv) |
WO (1) | WO1998014643A1 (sv) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE9503428D0 (sv) † | 1995-10-04 | 1995-10-04 | Abb Research Ltd | A method for epitaxially growing objects and a device for such a growth |
JP2008034780A (ja) * | 2006-07-07 | 2008-02-14 | Fuji Electric Holdings Co Ltd | エピタキシャルSiC膜付き半導体SiC基板の製造方法およびそのエピタキシャルSiC成膜装置 |
JP4347325B2 (ja) * | 2006-08-10 | 2009-10-21 | 信越化学工業株式会社 | 単結晶SiC、その製造方法及び単結晶SiCの製造装置 |
JP4923881B2 (ja) | 2006-09-06 | 2012-04-25 | 株式会社デンソー | 炭化珪素製造装置 |
JP7306217B2 (ja) * | 2019-10-23 | 2023-07-11 | 株式会社レゾナック | 坩堝及びSiC単結晶成長装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4444812A (en) * | 1980-07-28 | 1984-04-24 | Monsanto Company | Combination gas curtains for continuous chemical vapor deposition production of silicon bodies |
JPH0637355B2 (ja) * | 1985-07-08 | 1994-05-18 | 日本電気株式会社 | 炭化珪素単結晶膜の製造方法 |
JPS6237374A (ja) * | 1985-08-08 | 1987-02-18 | Sumitomo Electric Ind Ltd | 気相成長装置 |
JPS62193242A (ja) * | 1986-02-20 | 1987-08-25 | Canon Inc | 堆積膜形成法 |
US5204314A (en) * | 1990-07-06 | 1993-04-20 | Advanced Technology Materials, Inc. | Method for delivering an involatile reagent in vapor form to a CVD reactor |
JPH08148439A (ja) * | 1994-11-15 | 1996-06-07 | Nissin Electric Co Ltd | 薄膜気相成長装置 |
SE9502288D0 (sv) * | 1995-06-26 | 1995-06-26 | Abb Research Ltd | A device and a method for epitaxially growing objects by CVD |
-
1996
- 1996-10-01 SE SE9603587A patent/SE9603587D0/sv unknown
-
1997
- 1997-09-25 JP JP51643398A patent/JP4510151B2/ja not_active Expired - Lifetime
- 1997-09-25 EP EP97944244A patent/EP0931186B1/en not_active Expired - Lifetime
- 1997-09-25 WO PCT/SE1997/001612 patent/WO1998014643A1/en active IP Right Grant
- 1997-09-25 AT AT97944244T patent/ATE264413T1/de active
- 1997-09-25 DE DE69728681T patent/DE69728681T2/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0931186B1 (en) | 2004-04-14 |
JP4510151B2 (ja) | 2010-07-21 |
DE69728681D1 (de) | 2004-05-19 |
ATE264413T1 (de) | 2004-04-15 |
WO1998014643A1 (en) | 1998-04-09 |
JP2001501161A (ja) | 2001-01-30 |
EP0931186A1 (en) | 1999-07-28 |
DE69728681T2 (de) | 2005-04-14 |
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