SE9200553D0 - PROCEDURE MAKES PREPARATION OF TWO BACKGROUNDING AREAS OF SINELY DIFFERENT DOPPING ON THE SURFACE OF A SEMICONDUCTOR BODY - Google Patents
PROCEDURE MAKES PREPARATION OF TWO BACKGROUNDING AREAS OF SINELY DIFFERENT DOPPING ON THE SURFACE OF A SEMICONDUCTOR BODYInfo
- Publication number
- SE9200553D0 SE9200553D0 SE9200553A SE9200553A SE9200553D0 SE 9200553 D0 SE9200553 D0 SE 9200553D0 SE 9200553 A SE9200553 A SE 9200553A SE 9200553 A SE9200553 A SE 9200553A SE 9200553 D0 SE9200553 D0 SE 9200553D0
- Authority
- SE
- Sweden
- Prior art keywords
- semiconductor body
- sinely
- backgrounding
- dopping
- areas
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/266—Bombardment with radiation with high-energy radiation producing ion implantation using masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
- H01L21/823842—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Drying Of Semiconductors (AREA)
- Element Separation (AREA)
- Bipolar Transistors (AREA)
Abstract
Two self-aligned and contiguous regions (5, 7) of mutually different dopings can be generated at the surface (11) of a semiconductor body (1) by generating a first layer on the surface of the semiconductor body, selectively introducing a dopant through this layer within a defined portion of the semiconductor body at the surface thereof, changing the etching properties of the layer within said defined portion, removing the layer outside this portion by etching and, finally, doping the semiconductor body with the remaining part (21) of the layer as mask.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9200553A SE469916B (en) | 1992-02-25 | 1992-02-25 | Process for producing two adjacent regions of mutually different dopings at the surface of a semiconductor body |
PCT/SE1993/000095 WO1993017450A1 (en) | 1992-02-25 | 1993-02-03 | Method for manufacturing two contiguous regions of mutually different dopings at the surface of a semiconductor body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9200553A SE469916B (en) | 1992-02-25 | 1992-02-25 | Process for producing two adjacent regions of mutually different dopings at the surface of a semiconductor body |
Publications (3)
Publication Number | Publication Date |
---|---|
SE9200553D0 true SE9200553D0 (en) | 1992-02-25 |
SE9200553L SE9200553L (en) | 1993-08-26 |
SE469916B SE469916B (en) | 1993-10-04 |
Family
ID=20385420
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE9200553A SE469916B (en) | 1992-02-25 | 1992-02-25 | Process for producing two adjacent regions of mutually different dopings at the surface of a semiconductor body |
Country Status (2)
Country | Link |
---|---|
SE (1) | SE469916B (en) |
WO (1) | WO1993017450A1 (en) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4435896A (en) * | 1981-12-07 | 1984-03-13 | Bell Telephone Laboratories, Incorporated | Method for fabricating complementary field effect transistor devices |
-
1992
- 1992-02-25 SE SE9200553A patent/SE469916B/en not_active IP Right Cessation
-
1993
- 1993-02-03 WO PCT/SE1993/000095 patent/WO1993017450A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO1993017450A1 (en) | 1993-09-02 |
SE9200553L (en) | 1993-08-26 |
SE469916B (en) | 1993-10-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |
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