SE9003461D0 - Flerskiktat keramiskt detektorelement - Google Patents

Flerskiktat keramiskt detektorelement

Info

Publication number
SE9003461D0
SE9003461D0 SE9003461A SE9003461A SE9003461D0 SE 9003461 D0 SE9003461 D0 SE 9003461D0 SE 9003461 A SE9003461 A SE 9003461A SE 9003461 A SE9003461 A SE 9003461A SE 9003461 D0 SE9003461 D0 SE 9003461D0
Authority
SE
Sweden
Prior art keywords
sheets
sensor element
ceramic sheet
detector element
layer ceramic
Prior art date
Application number
SE9003461A
Other languages
English (en)
Other versions
SE9003461L (sv
Inventor
G W Johnson
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of SE9003461D0 publication Critical patent/SE9003461D0/sv
Publication of SE9003461L publication Critical patent/SE9003461L/sv

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49007—Indicating transducer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
SE9003461A 1989-11-27 1990-10-30 Flerskiktat keramiskt detektorelement SE9003461L (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/441,589 US4991283A (en) 1989-11-27 1989-11-27 Sensor elements in multilayer ceramic tape structures

Publications (2)

Publication Number Publication Date
SE9003461D0 true SE9003461D0 (sv) 1990-10-30
SE9003461L SE9003461L (sv) 1991-05-28

Family

ID=23753491

Family Applications (1)

Application Number Title Priority Date Filing Date
SE9003461A SE9003461L (sv) 1989-11-27 1990-10-30 Flerskiktat keramiskt detektorelement

Country Status (5)

Country Link
US (1) US4991283A (sv)
JP (1) JPH03188350A (sv)
DE (1) DE4037195A1 (sv)
GB (1) GB2238429A (sv)
SE (1) SE9003461L (sv)

Families Citing this family (61)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5135556A (en) * 1991-04-08 1992-08-04 Grumman Aerospace Corporation Method for making fused high density multi-layer integrated circuit module
US5767405A (en) * 1992-04-07 1998-06-16 The Charles Stark Draper Laboratory, Inc. Comb-drive micromechanical tuning fork gyroscope with piezoelectric readout
US5312674A (en) * 1992-07-31 1994-05-17 Hughes Aircraft Company Low-temperature-cofired-ceramic (LTCC) tape structures including cofired ferromagnetic elements, drop-in components and multi-layer transformer
DE69316536T2 (de) * 1992-11-06 1998-06-04 Texas Instruments Inc Verfahren zur Herstellung eines kapazitiven Druckwandlers
JPH06164222A (ja) * 1992-11-25 1994-06-10 Murata Mfg Co Ltd マイクロ波用磁性体及びその製造方法
US5657811A (en) * 1993-06-04 1997-08-19 Pcc Composites, Inc. Cast-in hermetic electrical feed-throughs
JP3672921B2 (ja) * 1993-10-01 2005-07-20 ヒシトロン インコーポレイテッド 高精度のスケール及び位置センサ
US5736783A (en) * 1993-10-08 1998-04-07 Stratedge Corporation. High frequency microelectronics package
US5753972A (en) * 1993-10-08 1998-05-19 Stratedge Corporation Microelectronics package
US5465008A (en) * 1993-10-08 1995-11-07 Stratedge Corporation Ceramic microelectronics package
US5436795A (en) * 1994-03-28 1995-07-25 Texas Instruments Incorporated Pressure transducer apparatus and method for making same
US5726621A (en) * 1994-09-12 1998-03-10 Cooper Industries, Inc. Ceramic chip fuses with multiple current carrying elements and a method for making the same
JP3570447B2 (ja) * 1994-12-21 2004-09-29 セイコーエプソン株式会社 積層型インクジェット式記録ヘッド、及びその製造方法、及び記録装置
US5856235A (en) * 1995-04-12 1999-01-05 Northrop Grumman Corporation Process of vacuum annealing a thin film metallization on high purity alumina
DE19601079A1 (de) * 1996-01-13 1997-07-24 Bosch Gmbh Robert Kraftsensor
US6111520A (en) * 1997-04-18 2000-08-29 Georgia Tech Research Corp. System and method for the wireless sensing of physical properties
US5961932A (en) * 1997-06-20 1999-10-05 Eastman Kodak Company Reaction chamber for an integrated micro-ceramic chemical plant
US6145380A (en) * 1997-12-18 2000-11-14 Alliedsignal Silicon micro-machined accelerometer using integrated electrical and mechanical packaging
US6278379B1 (en) * 1998-04-02 2001-08-21 Georgia Tech Research Corporation System, method, and sensors for sensing physical properties
US6592696B1 (en) 1998-10-09 2003-07-15 Motorola, Inc. Method for fabricating a multilayered structure and the structures formed by the method
US6572830B1 (en) 1998-10-09 2003-06-03 Motorola, Inc. Integrated multilayered microfludic devices and methods for making the same
US6639508B1 (en) 1999-09-22 2003-10-28 Aptek Williams, Inc. Electrical switch device and process for manufacturing same
WO2002085040A1 (en) * 2001-04-13 2002-10-24 Comsat Corporation Ltcc-based modular mems phased array
US7181977B2 (en) * 2002-01-22 2007-02-27 Measurement Specialties, Inc. Sensor assembly with lead attachment
GB0224267D0 (en) * 2002-10-18 2002-11-27 Univ Middlesex Serv Ltd Sensors
US20040080917A1 (en) * 2002-10-23 2004-04-29 Steddom Clark Morrison Integrated microwave package and the process for making the same
US6895645B2 (en) * 2003-02-25 2005-05-24 Palo Alto Research Center Incorporated Methods to make bimorph MEMS devices
US6964201B2 (en) * 2003-02-25 2005-11-15 Palo Alto Research Center Incorporated Large dimension, flexible piezoelectric ceramic tapes
US7089635B2 (en) * 2003-02-25 2006-08-15 Palo Alto Research Center, Incorporated Methods to make piezoelectric ceramic thick film arrays and elements
US20040200291A1 (en) * 2003-04-11 2004-10-14 Xunhu Dai Multilayer ceramic pressure sensor
US20040220627A1 (en) * 2003-04-30 2004-11-04 Crespi Ann M. Complex-shaped ceramic capacitors for implantable cardioverter defibrillators and method of manufacture
JP2005221450A (ja) * 2004-02-09 2005-08-18 Yamaha Corp 物理量センサ
CH702409B1 (de) * 2004-05-26 2011-06-30 Sauter Ag Differenzdrucksensor.
US20060116602A1 (en) * 2004-12-01 2006-06-01 Alden Dana A Medical sensing device and system
US7554247B2 (en) * 2004-12-15 2009-06-30 Nihon Dempa Kogyo Co., Ltd Component measuring device
WO2006064954A1 (ja) * 2004-12-15 2006-06-22 Nihon Dempa Kogyo Co., Ltd 水晶センサ及び感知装置
EP1830169B1 (en) * 2004-12-15 2014-02-12 Nihon Dempa Kogyo Co., Ltd. Quartz sensor and sensing device
CN1906715B (zh) * 2004-12-20 2010-06-16 株式会社村田制作所 层压陶瓷电子元件及其制造方法
JP4134025B2 (ja) * 2004-12-28 2008-08-13 日本電波工業株式会社 感知装置
US8118748B2 (en) * 2005-04-28 2012-02-21 Medtronic, Inc. Implantable capacitive pressure sensor system and method
TWI436063B (zh) 2005-08-03 2014-05-01 Nihon Dempa Kogyo Co Concentration sensor and concentration detection device
JP4811106B2 (ja) * 2006-05-08 2011-11-09 株式会社明電舎 Ｑｃｍセンサデバイス
US7911315B2 (en) * 2006-07-28 2011-03-22 Honeywell International Inc. Miniature pressure sensor assembly for catheter
US8206025B2 (en) 2007-08-07 2012-06-26 International Business Machines Corporation Microfluid mixer, methods of use and methods of manufacture thereof
DE102007051075B4 (de) * 2007-10-17 2013-10-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Aktorisch wirksames oder aktorisch wirksames und sensitives Element, Verfahren zu seiner Herstellung sowie seine Verwendung
FR2923017B1 (fr) * 2007-10-30 2009-11-20 Eads Europ Aeronautic Defence Transducteur piezoelectrique pour le controle non-destructif d'une structure comportant un trou
DE102009060002A1 (de) 2009-12-21 2011-06-22 Micro-Epsilon Messtechnik GmbH & Co. KG, 94496 Sensor
CN102575964B (zh) * 2009-12-25 2014-06-18 阿尔卑斯电气株式会社 测力传感器及其制造方法
JP5445196B2 (ja) * 2010-02-10 2014-03-19 セイコーエプソン株式会社 応力検出素子、触覚センサー、および把持装置
KR101174338B1 (ko) * 2010-11-30 2012-08-16 한국세라믹기술원 세라믹 적층형 바이오칩 모듈 및 그 제조 방법
DE102011081887A1 (de) * 2011-08-31 2013-02-28 Robert Bosch Gmbh Polymerschichtsystem-Drucksensorvorrichtung und Polymerschichtsystem-Drucksensorverfahren
DE102012010423A1 (de) 2012-05-16 2013-11-21 Annica Brandenburg Zylindrische Vorrichtung in Multilayertechnik als Plattform für die Hochtemperatur-Gasdetektion
US8943896B2 (en) * 2012-10-10 2015-02-03 Auto Industrial Co., Ltd. Pressure transducer using ceramic diaphragm
JP6068168B2 (ja) * 2013-01-31 2017-01-25 株式会社フジクラ 差圧検出素子
JP6362493B2 (ja) 2014-09-19 2018-07-25 日本電波工業株式会社 感知センサ
CN104568284A (zh) * 2014-11-10 2015-04-29 徐建 可动态测量旋转力矩的转轴系统及其方法和装置
CN108320875A (zh) * 2018-03-21 2018-07-24 东莞市有辰电子有限公司 一种贴片压敏电阻及其制作方法
CN110323061B (zh) 2019-07-10 2024-05-31 南方科技大学 具有多种烧制模式的三维模组
US20210247218A1 (en) * 2020-02-10 2021-08-12 Hutchinson Technology Incorporated Systems And Methods To Increase Sensor Robustness
JP7438837B2 (ja) * 2020-04-23 2024-02-27 株式会社シマノ 人力駆動車用のコンポーネント
CN114199420A (zh) * 2021-12-10 2022-03-18 中国兵器工业集团第二一四研究所苏州研发中心 一种基于ltcc的耐高温压力传感器及其制作方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1086565A (en) * 1963-11-20 1967-10-11 British Aircraft Corp Ltd Improvements relating to temperature and/or strain gauges
NL7903964A (nl) * 1979-05-21 1980-11-25 Philips Nv Pieezo-elektrisch lichaam voor een elektromechanisch omvormingselement.
JPS5712329A (en) * 1980-06-25 1982-01-22 Hitachi Ltd Frost sensor
DE3027254C2 (de) * 1980-07-18 1985-07-18 Robert Bosch Gmbh, 7000 Stuttgart Sensor
JPS5948636A (ja) * 1982-09-13 1984-03-19 Toyo Commun Equip Co Ltd 高速復帰型微粒子付着検知センサ
CH656015A5 (en) * 1984-02-27 1986-05-30 Vibro Meter Ag Method of detecting a risk of freezing, warning device for implementing the method and its use
US4645552A (en) * 1984-11-19 1987-02-24 Hughes Aircraft Company Process for fabricating dimensionally stable interconnect boards
US4665610A (en) * 1985-04-22 1987-05-19 Stanford University Method of making a semiconductor transducer having multiple level diaphragm structure
JPH0731091B2 (ja) * 1987-05-27 1995-04-10 日本碍子株式会社 歪検出器
US4809552A (en) * 1987-11-23 1989-03-07 Allied-Signal, Inc. Multidirectional force-sensing transducer

Also Published As

Publication number Publication date
GB9025392D0 (en) 1991-01-09
SE9003461L (sv) 1991-05-28
DE4037195A1 (de) 1991-05-29
US4991283A (en) 1991-02-12
GB2238429A (en) 1991-05-29
JPH03188350A (ja) 1991-08-16

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