SE8600228L - Sett att transportera alster vid en tillverknings- och/eller efterbehandlingsprocess - Google Patents
Sett att transportera alster vid en tillverknings- och/eller efterbehandlingsprocessInfo
- Publication number
- SE8600228L SE8600228L SE8600228A SE8600228A SE8600228L SE 8600228 L SE8600228 L SE 8600228L SE 8600228 A SE8600228 A SE 8600228A SE 8600228 A SE8600228 A SE 8600228A SE 8600228 L SE8600228 L SE 8600228L
- Authority
- SE
- Sweden
- Prior art keywords
- magazine
- products
- equipment
- vacuum
- manufacturing
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- General Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Packaging For Recording Disks (AREA)
- Warehouses Or Storage Devices (AREA)
- Specific Conveyance Elements (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE8600228A SE456570B (sv) | 1986-01-20 | 1986-01-20 | Sett att transportera alster vid en tillverknings- och/eller efterbehandlingsprocess |
JP50078487A JPS63502176A (ja) | 1986-01-20 | 1987-01-20 | 製造工程における生成物の移送方法 |
EP19870900912 EP0283477A1 (en) | 1986-01-20 | 1987-01-20 | Method of transporting products in a manufacturing process |
PCT/SE1987/000022 WO1987004414A1 (en) | 1986-01-20 | 1987-01-20 | Method of transporting products in a manufacturing process |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE8600228A SE456570B (sv) | 1986-01-20 | 1986-01-20 | Sett att transportera alster vid en tillverknings- och/eller efterbehandlingsprocess |
Publications (3)
Publication Number | Publication Date |
---|---|
SE8600228D0 SE8600228D0 (sv) | 1986-01-20 |
SE8600228L true SE8600228L (sv) | 1987-07-21 |
SE456570B SE456570B (sv) | 1988-10-17 |
Family
ID=20363148
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE8600228A SE456570B (sv) | 1986-01-20 | 1986-01-20 | Sett att transportera alster vid en tillverknings- och/eller efterbehandlingsprocess |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0283477A1 (sv) |
JP (1) | JPS63502176A (sv) |
SE (1) | SE456570B (sv) |
WO (1) | WO1987004414A1 (sv) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6103055A (en) * | 1986-04-18 | 2000-08-15 | Applied Materials, Inc. | System for processing substrates |
EP0246453A3 (en) * | 1986-04-18 | 1989-09-06 | General Signal Corporation | Novel multiple-processing and contamination-free plasma etching system |
US5308431A (en) * | 1986-04-18 | 1994-05-03 | General Signal Corporation | System providing multiple processing of substrates |
US4733631B1 (en) * | 1986-09-30 | 1993-03-09 | Apparatus for coating substrate devices | |
DE3827343A1 (de) * | 1988-08-12 | 1990-02-15 | Leybold Ag | Vorrichtung nach dem karussel-prinzip zum beschichten von substraten |
FR2621023B1 (fr) * | 1987-09-24 | 1992-03-20 | Stein Heurtey | Installation automatique de traitement thermochimique rapide |
US5156521A (en) * | 1987-10-15 | 1992-10-20 | Epsilon Technology, Inc. | Method for loading a substrate into a GVD apparatus |
US5435682A (en) * | 1987-10-15 | 1995-07-25 | Advanced Semiconductor Materials America, Inc. | Chemical vapor desposition system |
US5092728A (en) * | 1987-10-15 | 1992-03-03 | Epsilon Technology, Inc. | Substrate loading apparatus for a CVD process |
EP0322205A3 (en) * | 1987-12-23 | 1990-09-12 | Texas Instruments Incorporated | Automated photolithographic work cell |
US5076205A (en) * | 1989-01-06 | 1991-12-31 | General Signal Corporation | Modular vapor processor system |
FR2644567A1 (fr) * | 1989-03-17 | 1990-09-21 | Etudes Const Mecaniques | Dispositif pour l'execution de traitements thermiques enchaines en continu sous vide |
US5174827A (en) * | 1989-07-26 | 1992-12-29 | Consorzio Ce.Te.V Centro Tecnologie Del Vuoto | Double chamber vacuum apparatus for thin layer deposition |
US5713711A (en) * | 1995-01-17 | 1998-02-03 | Bye/Oasis | Multiple interface door for wafer storage and handling container |
US5882171A (en) | 1996-10-01 | 1999-03-16 | Balzers Aktiengesellschaft | Transport and transfer apparatus |
NL1027638C2 (nl) * | 2004-12-01 | 2006-06-02 | Ecim Technologies Bv | Informatiedrager en werkwijze en inrichting voor de vervaardiging daarvan. |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4311427A (en) * | 1979-12-21 | 1982-01-19 | Varian Associates, Inc. | Wafer transfer system |
US4293249A (en) * | 1980-03-03 | 1981-10-06 | Texas Instruments Incorporated | Material handling system and method for manufacturing line |
GB2150098B (en) * | 1983-11-24 | 1986-10-08 | Dyna Pert Precima Limited | Machine for placing electronic components on a substrate |
NL8400658A (nl) * | 1984-03-01 | 1985-10-01 | Bok Edward | Verbeterde installatie voor vacuum processing van substraten. |
US4544317A (en) * | 1984-04-16 | 1985-10-01 | International Business Machines Corporation | Vacuum-to-vacuum entry system apparatus |
-
1986
- 1986-01-20 SE SE8600228A patent/SE456570B/sv not_active IP Right Cessation
-
1987
- 1987-01-20 EP EP19870900912 patent/EP0283477A1/en not_active Withdrawn
- 1987-01-20 JP JP50078487A patent/JPS63502176A/ja active Pending
- 1987-01-20 WO PCT/SE1987/000022 patent/WO1987004414A1/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP0283477A1 (en) | 1988-09-28 |
SE8600228D0 (sv) | 1986-01-20 |
SE456570B (sv) | 1988-10-17 |
JPS63502176A (ja) | 1988-08-25 |
WO1987004414A1 (en) | 1987-07-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |
Ref document number: 8600228-4 Effective date: 19930810 Format of ref document f/p: F |