SE8402589L - TERROR-FREE OPTICAL SIN - Google Patents

TERROR-FREE OPTICAL SIN

Info

Publication number
SE8402589L
SE8402589L SE8402589A SE8402589A SE8402589L SE 8402589 L SE8402589 L SE 8402589L SE 8402589 A SE8402589 A SE 8402589A SE 8402589 A SE8402589 A SE 8402589A SE 8402589 L SE8402589 L SE 8402589L
Authority
SE
Sweden
Prior art keywords
distance
probe
photodetector
reflected
astigmatism
Prior art date
Application number
SE8402589A
Other languages
Unknown language ( )
Swedish (sv)
Other versions
SE8402589D0 (en
Inventor
J L Doty
Original Assignee
Spectron Dev Lab Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Spectron Dev Lab Inc filed Critical Spectron Dev Lab Inc
Publication of SE8402589D0 publication Critical patent/SE8402589D0/en
Publication of SE8402589L publication Critical patent/SE8402589L/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B13/00—Optical objectives specially designed for the purposes specified below
    • G02B13/08—Anamorphotic objectives

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

An optical probe, having particular application in contour mapping and small distance gauging, includes a light generation and projection means 14, 17 which projects a light beam 16 through crossed cylindrical lenses 18, 20 to induce astigmatism in the beam. The astigmatic beam is then directed onto a target surface 30 to be mapped. The back-scattered radiation 32 reflected from the target surface is collected by a collection means 34 and focused onto a photodetector 36. The shape of the image projected onto the photodetector is dependent upon the distance between the probe and surface. By observing the output of the detector the distance between the probe end surface may be measured, or maintained constant, and a contour map generated using known mapping techniques. In an alternative embodiment, astigmatism is induced in the reflected beam, instead of in the incident beam. <IMAGE>
SE8402589A 1984-05-05 1984-05-14 TERROR-FREE OPTICAL SIN SE8402589L (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08411592A GB2158228A (en) 1984-05-05 1984-05-05 Astigmatic non-contact optical probe

Publications (2)

Publication Number Publication Date
SE8402589D0 SE8402589D0 (en) 1984-05-14
SE8402589L true SE8402589L (en) 1985-11-15

Family

ID=10560565

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8402589A SE8402589L (en) 1984-05-05 1984-05-14 TERROR-FREE OPTICAL SIN

Country Status (5)

Country Link
CH (1) CH658312A5 (en)
DE (1) DE3418767A1 (en)
FR (1) FR2564602A1 (en)
GB (1) GB2158228A (en)
SE (1) SE8402589L (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732485A (en) * 1985-04-17 1988-03-22 Olympus Optical Co., Ltd. Optical surface profile measuring device
DE3536700C3 (en) * 1985-10-15 1994-07-07 Focus Mestechnik Gmbh & Co Kg Device for determining the local distance of a test surface from a reference surface, the geometric position of which is known in relation to the device
FR2595815B1 (en) * 1986-03-17 1991-04-26 Clecim Sa METHOD AND DEVICE FOR TRACKING FLAT DEFECTS ON A SHEET
FR2604515B1 (en) * 1986-09-29 1991-06-14 Spectec Sa DEVICE FOR MEASURING POSITION BY MEASURING ASTIGMATISM USING DIFFERENTIAL OPTICAL DETECTION
NZ223988A (en) * 1987-03-24 1990-11-27 Commw Scient Ind Res Org Optical distance measuring
DK574487A (en) * 1987-11-02 1989-05-03 Lars Bager
WO1991003988A1 (en) * 1989-09-22 1991-04-04 Peter Rohleder Device for the production of tooth replacement parts
DE4012927C2 (en) * 1990-04-24 1995-10-12 Daimler Benz Aerospace Ag Measuring method and device for three-dimensional position control of the focal point of a high-energy laser beam
GB9028215D0 (en) * 1990-12-31 1991-02-13 Smiths Industries Plc Electro-optic apparatus
GB9705105D0 (en) 1997-03-12 1997-04-30 Brown & Sharpe Limited Optical surface measurement apparatus and methods
US5923425A (en) * 1997-11-20 1999-07-13 Tropel Corporation Grazing incidence interferometry for measuring transparent plane-parallel plates
DE19955702C2 (en) * 1999-11-18 2001-11-15 Fraunhofer Ges Forschung Method and device for probing the surface of a three-dimensional object and method and device for measuring at least a part of the surface of a three-dimensional object
GB2468177B (en) * 2009-02-27 2011-01-12 Univ Sogang Ind Univ Coop Foun Optical surface measuring apparatus and method
WO2014023344A1 (en) 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh Improved chromatic sensor and method
US9599558B2 (en) 2012-08-07 2017-03-21 Carl Zeiss Industrielle Messtechnik Gmbh Measuring device for measuring a measurement object and related method
CN109752858B (en) * 2019-03-18 2021-05-18 贵州航天电子科技有限公司 Line polarization laser emission optical device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2271590B1 (en) * 1974-01-15 1978-12-01 Thomson Brandt
GB2066449B (en) * 1979-12-21 1984-03-21 Rolls Royce Monitoring distance variations

Also Published As

Publication number Publication date
CH658312A5 (en) 1986-10-31
DE3418767A1 (en) 1985-11-21
GB2158228A (en) 1985-11-06
FR2564602A1 (en) 1985-11-22
SE8402589D0 (en) 1984-05-14
GB8411592D0 (en) 1984-06-13

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Effective date: 19880510