SE7606903L - Tryckkenslig transor samt forfarande for framstellning av en deri ingaende substratenhet - Google Patents

Tryckkenslig transor samt forfarande for framstellning av en deri ingaende substratenhet

Info

Publication number
SE7606903L
SE7606903L SE7606903A SE7606903A SE7606903L SE 7606903 L SE7606903 L SE 7606903L SE 7606903 A SE7606903 A SE 7606903A SE 7606903 A SE7606903 A SE 7606903A SE 7606903 L SE7606903 L SE 7606903L
Authority
SE
Sweden
Prior art keywords
transor
procedure
manufacture
pressure sensor
substrate unit
Prior art date
Application number
SE7606903A
Other languages
English (en)
Inventor
S A Johnston
Original Assignee
Bunker Ramo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bunker Ramo filed Critical Bunker Ramo
Publication of SE7606903L publication Critical patent/SE7606903L/sv

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
SE7606903A 1975-06-18 1976-06-17 Tryckkenslig transor samt forfarande for framstellning av en deri ingaende substratenhet SE7606903L (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/587,807 US4040118A (en) 1975-06-18 1975-06-18 Pressure sensitive transducer

Publications (1)

Publication Number Publication Date
SE7606903L true SE7606903L (sv) 1976-12-19

Family

ID=24351283

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7606903A SE7606903L (sv) 1975-06-18 1976-06-17 Tryckkenslig transor samt forfarande for framstellning av en deri ingaende substratenhet

Country Status (7)

Country Link
US (1) US4040118A (sv)
JP (1) JPS522581A (sv)
CA (1) CA1065642A (sv)
DE (1) DE2626774A1 (sv)
FR (1) FR2315024A1 (sv)
GB (1) GB1531366A (sv)
SE (1) SE7606903L (sv)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4128006A (en) * 1976-12-13 1978-12-05 Bunker Ramo Corporation Packaging of pressure sensor cells
US4177680A (en) * 1977-10-14 1979-12-11 Bunker Ramo Corporation Dual pressure sensor
US4168517A (en) * 1977-11-10 1979-09-18 Lee Shih Y Capacitive pressure transducer
US4289035A (en) * 1978-02-15 1981-09-15 The Bendix Corporation Compensated capacitive transducer demodulator circuit
FR2442438A1 (fr) * 1978-11-24 1980-06-20 Vaisala Oy Manometre
US4237989A (en) * 1979-05-11 1980-12-09 National Controls, Inc. Capacitive load cell and method of manufacture
US4345299A (en) * 1980-11-03 1982-08-17 Motorola, Inc. Capacitive pressure transducer assembly with improved output lead design
US4420790A (en) * 1982-04-02 1983-12-13 Honeywell Inc. High sensitivity variable capacitance transducer
FI69211C (fi) * 1984-02-21 1985-12-10 Vaisala Oy Kapacitiv styckgivare
JPS63149531A (ja) * 1986-12-12 1988-06-22 Fuji Electric Co Ltd 静電容量式圧力センサ
JP2570420B2 (ja) * 1988-06-23 1997-01-08 富士電機株式会社 静電容量式圧力検出器
DE8815425U1 (sv) * 1988-12-12 1990-04-12 Fibronix Sensoren Gmbh, 2300 Kiel, De
US4996627A (en) * 1989-01-30 1991-02-26 Dresser Industries, Inc. High sensitivity miniature pressure transducer
US5553486A (en) * 1993-10-01 1996-09-10 Hysitron Incorporated Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
US5661235A (en) * 1993-10-01 1997-08-26 Hysitron Incorporated Multi-dimensional capacitive transducer
US5576483A (en) * 1993-10-01 1996-11-19 Hysitron Incorporated Capacitive transducer with electrostatic actuation
US6026677A (en) * 1993-10-01 2000-02-22 Hysitron, Incorporated Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
JP4582889B2 (ja) * 2000-09-28 2010-11-17 京セラ株式会社 圧力検出装置用パッケージ
JP4073199B2 (ja) * 2001-10-30 2008-04-09 長野計器株式会社 歪み検出素子の製造方法
US8118748B2 (en) * 2005-04-28 2012-02-21 Medtronic, Inc. Implantable capacitive pressure sensor system and method
KR101339078B1 (ko) 2006-03-13 2013-12-09 아실럼 리서치 코포레이션 나노압입자
US7505723B2 (en) * 2007-02-13 2009-03-17 Xerox Corporation Air knife system with pressure sensor
WO2019225205A1 (ja) * 2018-05-22 2019-11-28 株式会社村田製作所 圧力検出素子および圧力検出装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3808480A (en) * 1973-04-16 1974-04-30 Bunker Ramo Capacitive pressure transducer
US3880009A (en) * 1973-05-24 1975-04-29 Bunker Ramo Pressure transducer

Also Published As

Publication number Publication date
FR2315024A1 (fr) 1977-01-14
GB1531366A (en) 1978-11-08
US4040118A (en) 1977-08-02
CA1065642A (en) 1979-11-06
DE2626774A1 (de) 1976-12-30
JPS522581A (en) 1977-01-10

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