SE466571B - Termisk detektoruppsaettning omfattande diskreta termiska detektorelement - Google Patents

Termisk detektoruppsaettning omfattande diskreta termiska detektorelement

Info

Publication number
SE466571B
SE466571B SE8702531A SE8702531A SE466571B SE 466571 B SE466571 B SE 466571B SE 8702531 A SE8702531 A SE 8702531A SE 8702531 A SE8702531 A SE 8702531A SE 466571 B SE466571 B SE 466571B
Authority
SE
Sweden
Prior art keywords
elements
thermal
substrate
layer
detector
Prior art date
Application number
SE8702531A
Other languages
English (en)
Swedish (sv)
Other versions
SE8702531L (sv
SE8702531D0 (sv
Inventor
D J Pedder
N M Shorrocks
A D Parsons
R W Whatmore
Original Assignee
Marconi Gec Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Gec Ltd filed Critical Marconi Gec Ltd
Publication of SE8702531D0 publication Critical patent/SE8702531D0/xx
Publication of SE8702531L publication Critical patent/SE8702531L/
Publication of SE466571B publication Critical patent/SE466571B/sv

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/15—Charge-coupled device [CCD] image sensors
    • H10F39/157—CCD or CID infrared image sensors
    • H10F39/1575—CCD or CID infrared image sensors of the hybrid type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N19/00—Integrated devices, or assemblies of multiple devices, comprising at least one thermoelectric or thermomagnetic element covered by groups H10N10/00 - H10N15/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202—Arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/206—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices on foils

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Solid State Image Pick-Up Elements (AREA)
SE8702531A 1985-09-12 1987-06-17 Termisk detektoruppsaettning omfattande diskreta termiska detektorelement SE466571B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8522638A GB2200246B (en) 1985-09-12 1985-09-12 Thermal detector array

Publications (3)

Publication Number Publication Date
SE8702531D0 SE8702531D0 (sv) 1987-06-17
SE8702531L SE8702531L (sv) 1988-08-06
SE466571B true SE466571B (sv) 1992-03-02

Family

ID=10585093

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8702531A SE466571B (sv) 1985-09-12 1987-06-17 Termisk detektoruppsaettning omfattande diskreta termiska detektorelement

Country Status (7)

Country Link
BE (1) BE102T1 (it)
DE (1) DE3644882A1 (it)
FR (2) FR2624603B1 (it)
GB (1) GB2200246B (it)
IT (1) IT1235675B (it)
NL (1) NL8615006A (it)
SE (1) SE466571B (it)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8621688D0 (en) * 1986-09-09 1986-10-15 Graviner Ltd Radiation detection arrangements
GB2206997A (en) * 1987-07-10 1989-01-18 Philips Electronic Associated Arrays of pyroelectric or ferroelectric infrared detector elements
US5047644A (en) * 1989-07-31 1991-09-10 Texas Instruments Incorporated Polyimide thermal isolation mesa for a thermal imaging system
US5306912A (en) * 1989-10-21 1994-04-26 Thorn Emi Plc Optically addressed thermal imaging device
FR2670325B1 (fr) * 1990-12-11 1993-01-22 Thomson Composants Militaires Detecteur infrarouge monolithique a materiau pyroelectrique.
US5288649A (en) * 1991-09-30 1994-02-22 Texas Instruments Incorporated Method for forming uncooled infrared detector
CA2118597C (en) * 1991-11-04 2001-12-11 Paul W. Kruse, Jr. Thin film pyroelectric imaging array
GB2274543A (en) * 1993-01-21 1994-07-27 Central Research Lab Ltd Infrared detector
US5942791A (en) * 1996-03-06 1999-08-24 Gec-Marconi Limited Micromachined devices having microbridge structure
GB9604786D0 (en) * 1996-03-06 1996-09-25 Marconi Gec Ltd Micromachined devices
EP0853237B1 (en) * 1997-01-14 2000-06-21 Infrared Integrated Systems Ltd. Sensor using a detector array
GB2335077B (en) * 1998-03-04 2003-05-28 Marconi Gec Ltd Radiation detectors
FR2788885B1 (fr) * 1999-01-21 2003-07-18 Commissariat Energie Atomique Dispositif de detection thermique de rayonnements electromagnetiques et procede de fabrication de celui-ci
EP1178294A1 (fr) * 2000-08-04 2002-02-06 Ecole Polytechnique Federale De Lausanne Capteur pyroélectrique ayant entre ses pixels un couplage thermique parasite réduit
EP1402581A1 (fr) * 2001-06-08 2004-03-31 IR Microsystems S.A. Capteur infrarouge et procede de fabrication
FR2862160B1 (fr) * 2003-11-10 2006-05-12 Ulis Dispositif de detection de rayonnements infrarouges a detecteurs bolometriques
FR2875606B1 (fr) 2004-09-22 2006-11-10 Commissariat Energie Atomique Detecteur de rayonnement electromagnetique et de particules a nombre de connexions reduit
DE102005001966B4 (de) * 2005-01-15 2009-08-20 Infratec Gmbh Infrarotsensorik Und Messtechnik Mikrophoniereduzierter pyroelektrischer Detektor
JP5644121B2 (ja) * 2010-01-26 2014-12-24 セイコーエプソン株式会社 熱型光検出器、熱型光検出装置、電子機器および熱型光検出器の製造方法
JP4833382B2 (ja) * 2010-03-11 2011-12-07 パナソニック株式会社 焦電型温度センサを用いて温度を測定する方法
CN102437166B (zh) * 2011-10-09 2013-05-01 中国科学院苏州纳米技术与纳米仿生研究所 一种非制冷红外探测系统像素阵列的制作方法
FR3006438B1 (fr) 2013-06-04 2015-06-26 Commissariat Energie Atomique Capteur de temperature
DK4074367T3 (da) * 2019-12-31 2023-05-22 Novocure Gmbh Arrays til levering af tumorbehandlingsfelter (tt-felter) med individuelt tilgængelige elektrodeelementer og temperatursensorer

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3801949A (en) * 1973-03-08 1974-04-02 Rca Corp Thermal detector and method of making the same
US4039833A (en) * 1976-08-17 1977-08-02 The United States Of America As Represented By The Secretary Of The Navy High density infrared detector array
GB1523347A (en) * 1976-11-16 1978-08-31 Secr Defence Pyroelectric tragets
GB1532293A (en) * 1977-06-14 1978-11-15 Secr Defence Pyroelectric vidicon targets and a method and machine for reticulating them
GB1592500A (en) * 1977-12-01 1981-07-08 Roundy C B Pyroelectric infrared detection system
GB2030023B (en) * 1977-12-19 1982-08-04 Texas Instruments Inc Ferroelectric imaging system
GB2028579B (en) * 1978-08-22 1982-12-22 English Electric Valve Co Ltd Target for a pyroelectric camera
GB2035685B (en) * 1978-10-28 1983-05-05 Plessey Co Ltd Pyroelectric detectors
US4317063A (en) * 1978-10-28 1982-02-23 Plessey Handel Und Investments Ag Pyroelectric detectors
US4532434A (en) * 1978-10-30 1985-07-30 Phillips Petroleum Company Waveform generator
US4354109A (en) * 1979-12-31 1982-10-12 Honeywell Inc. Mounting for pyroelectric detecctor arrays
DE3045118C2 (de) * 1980-11-29 1983-10-13 Georg Dipl.-Ing. 7500 Karlsruhe Richter Infrarotdetektor und Verfahren zur Herstellung
GB2095905B (en) * 1981-03-27 1985-01-16 Philips Electronic Associated Infra-red radiation imaging devices and methods for their manufacture
GB2100058B (en) * 1981-06-05 1985-03-20 Philips Electronic Associated Pyroelectric detector
US4532424A (en) * 1983-04-25 1985-07-30 Rockwell International Corporation Pyroelectric thermal detector array
GB2163596B (en) * 1984-08-24 1988-02-03 Philips Electronic Associated A thermal imaging device and a method of manufacturing a thermal imaging device

Also Published As

Publication number Publication date
GB2200246A (en) 1988-07-27
BE102T1 (fr) 1988-08-10
DE3644882A1 (de) 1988-11-17
SE8702531L (sv) 1988-08-06
FR2624603B1 (fr) 1993-04-30
GB8522638D0 (en) 1988-05-25
FR2620531A1 (fr) 1989-03-17
GB2200246B (en) 1989-11-01
IT1235675B (it) 1992-09-21
SE8702531D0 (sv) 1987-06-17
NL8615006A (nl) 1988-08-01
FR2624603A1 (fr) 1989-06-16
FR2620531B1 (fr) 1993-11-05

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