SE449531B - Forfarande och anordning for kontroll av mikromasker - Google Patents

Forfarande och anordning for kontroll av mikromasker

Info

Publication number
SE449531B
SE449531B SE8008725A SE8008725A SE449531B SE 449531 B SE449531 B SE 449531B SE 8008725 A SE8008725 A SE 8008725A SE 8008725 A SE8008725 A SE 8008725A SE 449531 B SE449531 B SE 449531B
Authority
SE
Sweden
Prior art keywords
micromask
laser beam
signal
control signal
intensity
Prior art date
Application number
SE8008725A
Other languages
English (en)
Swedish (sv)
Other versions
SE8008725L (sv
Inventor
Gerhard Westerberg
Original Assignee
Gerhard Westerberg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gerhard Westerberg filed Critical Gerhard Westerberg
Priority to SE8008725A priority Critical patent/SE449531B/sv
Priority to DE19813148121 priority patent/DE3148121A1/de
Priority to US06/328,681 priority patent/US4465350A/en
Priority to GB8137347A priority patent/GB2089504B/en
Priority to DD81235629A priority patent/DD202080A5/de
Priority to FR818123219A priority patent/FR2496262B1/fr
Publication of SE8008725L publication Critical patent/SE8008725L/xx
Publication of SE449531B publication Critical patent/SE449531B/sv

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
    • G03F1/84—Inspecting

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
SE8008725A 1980-12-11 1980-12-11 Forfarande och anordning for kontroll av mikromasker SE449531B (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
SE8008725A SE449531B (sv) 1980-12-11 1980-12-11 Forfarande och anordning for kontroll av mikromasker
DE19813148121 DE3148121A1 (de) 1980-12-11 1981-12-04 Verfahren und vorrichtung zur kontrolle von mikromasken
US06/328,681 US4465350A (en) 1980-12-11 1981-12-08 Method and device for inspecting micromask patterns
GB8137347A GB2089504B (en) 1980-12-11 1981-12-10 Checking micromasks
DD81235629A DD202080A5 (de) 1980-12-11 1981-12-10 Verfahren und vorrichtung zur kontrolle von mikromasken
FR818123219A FR2496262B1 (fr) 1980-12-11 1981-12-11 Procede et dispositif de controle de micromasques

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE8008725A SE449531B (sv) 1980-12-11 1980-12-11 Forfarande och anordning for kontroll av mikromasker

Publications (2)

Publication Number Publication Date
SE8008725L SE8008725L (sv) 1982-06-12
SE449531B true SE449531B (sv) 1987-05-04

Family

ID=20342444

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8008725A SE449531B (sv) 1980-12-11 1980-12-11 Forfarande och anordning for kontroll av mikromasker

Country Status (6)

Country Link
US (1) US4465350A (fr)
DD (1) DD202080A5 (fr)
DE (1) DE3148121A1 (fr)
FR (1) FR2496262B1 (fr)
GB (1) GB2089504B (fr)
SE (1) SE449531B (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5958586A (ja) * 1982-09-28 1984-04-04 Toshiba Mach Co Ltd マスクの検査方法および装置
JPS5963725A (ja) * 1982-10-05 1984-04-11 Toshiba Corp パタ−ン検査装置
US4550374A (en) * 1982-11-15 1985-10-29 Tre Semiconductor Equipment Corporation High speed alignment method for wafer stepper
CH663483A5 (fr) * 1985-03-04 1987-12-15 Eie Electronic Ind Equipment S Dispositif pour exposer des parties discretes d'une surface photosensible au moyen d'un faisceau de lumiere.
US4770536A (en) * 1986-12-04 1988-09-13 Moshe Golberstein Reflective photometry instrument
US5025826A (en) * 1990-09-04 1991-06-25 Adolf Schoepe Faucet handle universal coupling

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3670153A (en) * 1970-10-08 1972-06-13 Rca Corp Machine implemented method for positioning and inspecting an object
SE375216B (fr) * 1972-09-12 1975-04-07 G Westerberg
US3844461A (en) * 1973-04-09 1974-10-29 Gerber Scientific Instr Co Precise indexing apparatus and method
FR2257102B1 (fr) * 1973-04-19 1976-09-10 Frehling Andre
US3881098A (en) * 1973-07-05 1975-04-29 Gerber Scientific Instr Co Photoexposure system
US3903536A (en) * 1973-11-19 1975-09-02 Gerhard Westerberg Device for generating masks for microcircuits
DE2441472A1 (de) * 1974-08-29 1976-03-11 Siemens Ag Anordnung zum lichtoptischen rechnergesteuerten zeichnen von masken fuer halbleiter-bauelemente
SE399628B (sv) * 1975-02-13 1978-02-20 Westerberg Erik Gerhard Natana Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar
US4056716A (en) * 1976-06-30 1977-11-01 International Business Machines Corporation Defect inspection of objects such as electronic circuits
DE2700252C2 (de) * 1977-01-05 1985-03-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Prüfen definierter Strukturen
US4218142A (en) * 1978-03-08 1980-08-19 Aerodyne Research, Inc. Mask analysis
US4247203A (en) * 1978-04-03 1981-01-27 Kla Instrument Corporation Automatic photomask inspection system and apparatus
US4295198A (en) * 1979-04-02 1981-10-13 Cogit Systems, Inc. Automatic printed circuit dimensioning, routing and inspecting apparatus
US4231659A (en) * 1979-04-11 1980-11-04 The Gerber Scientific Instrument Company Method of making an overlay mask and a printing plate therefrom
DE2929846A1 (de) * 1979-07-23 1981-03-12 Siemens AG, 1000 Berlin und 8000 München Opto-elektronisches pruefsystem zur automatischen beschaffenheitspruefung von leiterplatten, deren zwischenprodukte und druckwerkzeuge

Also Published As

Publication number Publication date
GB2089504B (en) 1985-04-11
DD202080A5 (de) 1983-08-24
SE8008725L (sv) 1982-06-12
GB2089504A (en) 1982-06-23
DE3148121C2 (fr) 1992-09-24
US4465350A (en) 1984-08-14
DE3148121A1 (de) 1982-08-05
FR2496262A1 (fr) 1982-06-18
FR2496262B1 (fr) 1985-07-26

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