SE399628B - Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar - Google Patents

Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar

Info

Publication number
SE399628B
SE399628B SE7501605A SE7501605A SE399628B SE 399628 B SE399628 B SE 399628B SE 7501605 A SE7501605 A SE 7501605A SE 7501605 A SE7501605 A SE 7501605A SE 399628 B SE399628 B SE 399628B
Authority
SE
Sweden
Prior art keywords
scream
specifically
drive device
machine manufacturer
manufacturer
Prior art date
Application number
SE7501605A
Other languages
English (en)
Other versions
SE7501605L (sv
Inventor
Sok
Original Assignee
Westerberg Erik Gerhard Natana
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westerberg Erik Gerhard Natana filed Critical Westerberg Erik Gerhard Natana
Priority to SE7501605A priority Critical patent/SE399628B/sv
Priority to GB3119/76A priority patent/GB1532301A/en
Priority to US05/656,282 priority patent/US4060816A/en
Priority to FR7603649A priority patent/FR2301025A1/fr
Priority to CH167176A priority patent/CH607329A5/xx
Priority to CA245,879A priority patent/CA1060124A/en
Priority to NO760460A priority patent/NO141028C/no
Priority to JP51014333A priority patent/JPS5936820B2/ja
Priority to DE2605659A priority patent/DE2605659C2/de
Publication of SE7501605L publication Critical patent/SE7501605L/sv
Publication of SE399628B publication Critical patent/SE399628B/sv

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Electron Beam Exposure (AREA)
  • Lasers (AREA)
  • Control Of Position Or Direction (AREA)
SE7501605A 1975-02-13 1975-02-13 Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar SE399628B (sv)

Priority Applications (9)

Application Number Priority Date Filing Date Title
SE7501605A SE399628B (sv) 1975-02-13 1975-02-13 Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar
GB3119/76A GB1532301A (en) 1975-02-13 1976-01-27 Scanning apparatus
US05/656,282 US4060816A (en) 1975-02-13 1976-02-09 Scanning apparatus, for producing masks for micro circuits
FR7603649A FR2301025A1 (fr) 1975-02-13 1976-02-10 Appareil de balayage destine en particulier a la fabrication de masques pour micro-circuits
CH167176A CH607329A5 (sv) 1975-02-13 1976-02-11
CA245,879A CA1060124A (en) 1975-02-13 1976-02-12 Scanning apparatus, particularly to be used in producing masks for micro circuits
NO760460A NO141028C (no) 1975-02-13 1976-02-12 Avsoekningsanordning, saerlig for anvendelse ved fremstilling av masker for elektriske mikrokretser
JP51014333A JPS5936820B2 (ja) 1975-02-13 1976-02-12 走査装置
DE2605659A DE2605659C2 (de) 1975-02-13 1976-02-12 Belichtungsvorrichtung, insbesondere zur Herstellung von Masken für Mikroschaltungen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE7501605A SE399628B (sv) 1975-02-13 1975-02-13 Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar

Publications (2)

Publication Number Publication Date
SE7501605L SE7501605L (sv) 1976-08-16
SE399628B true SE399628B (sv) 1978-02-20

Family

ID=20323677

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7501605A SE399628B (sv) 1975-02-13 1975-02-13 Drivanordning, speciellt for anvendning vid en avsokningsanordning for framstellning av masker for mikrokretsar

Country Status (9)

Country Link
US (1) US4060816A (sv)
JP (1) JPS5936820B2 (sv)
CA (1) CA1060124A (sv)
CH (1) CH607329A5 (sv)
DE (1) DE2605659C2 (sv)
FR (1) FR2301025A1 (sv)
GB (1) GB1532301A (sv)
NO (1) NO141028C (sv)
SE (1) SE399628B (sv)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE449531B (sv) * 1980-12-11 1987-05-04 Gerhard Westerberg Forfarande och anordning for kontroll av mikromasker
US4608578A (en) * 1983-11-14 1986-08-26 Matrix Instruments Inc. Braked media transport for laser scanners
NL8401476A (nl) * 1984-05-09 1985-12-02 Philips Nv Inrichting voor het wisselen van maskers.

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH436751A (de) * 1966-05-31 1967-05-31 Contraves Ag Koordinatograph
FR2030468A5 (sv) * 1969-01-29 1970-11-13 Thomson Brandt Csf
US3573849A (en) * 1969-02-04 1971-04-06 Bell Telephone Labor Inc Pattern generating apparatus
US3903536A (en) * 1973-11-19 1975-09-02 Gerhard Westerberg Device for generating masks for microcircuits
US3925785A (en) * 1974-08-09 1975-12-09 Bell Telephone Labor Inc Pattern generating apparatus

Also Published As

Publication number Publication date
JPS5936820B2 (ja) 1984-09-06
FR2301025A1 (fr) 1976-09-10
NO760460L (sv) 1976-08-16
FR2301025B1 (sv) 1979-08-10
NO141028C (no) 1979-12-27
GB1532301A (en) 1978-11-15
US4060816A (en) 1977-11-29
DE2605659C2 (de) 1984-07-05
DE2605659A1 (de) 1976-08-26
SE7501605L (sv) 1976-08-16
CH607329A5 (sv) 1978-12-15
CA1060124A (en) 1979-08-07
JPS51135370A (en) 1976-11-24
NO141028B (no) 1979-09-17

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