SE393880B - Forfarande och anordning for inriktning av en forsta artikel med en andra artikel - Google Patents

Forfarande och anordning for inriktning av en forsta artikel med en andra artikel

Info

Publication number
SE393880B
SE393880B SE7505834A SE7505834A SE393880B SE 393880 B SE393880 B SE 393880B SE 7505834 A SE7505834 A SE 7505834A SE 7505834 A SE7505834 A SE 7505834A SE 393880 B SE393880 B SE 393880B
Authority
SE
Sweden
Prior art keywords
article
originating
procedure
another
another article
Prior art date
Application number
SE7505834A
Other languages
English (en)
Swedish (sv)
Other versions
SE7505834L (sv
Inventor
L J Montone
D C Walls
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of SE7505834L publication Critical patent/SE7505834L/xx
Publication of SE393880B publication Critical patent/SE393880B/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7069—Alignment mark illumination, e.g. darkfield, dual focus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7088—Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Control Of Position Or Direction (AREA)
  • Feeding Of Articles To Conveyors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Image Processing (AREA)
  • Wire Bonding (AREA)
  • Die Bonding (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Length Measuring Devices By Optical Means (AREA)
SE7505834A 1974-05-31 1975-05-22 Forfarande och anordning for inriktning av en forsta artikel med en andra artikel SE393880B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US475006A US3903363A (en) 1974-05-31 1974-05-31 Automatic positioning system and method

Publications (2)

Publication Number Publication Date
SE7505834L SE7505834L (sv) 1975-12-01
SE393880B true SE393880B (sv) 1977-05-23

Family

ID=23885861

Family Applications (1)

Application Number Title Priority Date Filing Date
SE7505834A SE393880B (sv) 1974-05-31 1975-05-22 Forfarande och anordning for inriktning av en forsta artikel med en andra artikel

Country Status (14)

Country Link
US (1) US3903363A (ja)
JP (1) JPS5711142B2 (ja)
BE (1) BE829643A (ja)
BR (1) BR7503172A (ja)
CA (1) CA1022258A (ja)
DE (1) DE2523858C2 (ja)
ES (1) ES438079A1 (ja)
FR (1) FR2275821A1 (ja)
GB (1) GB1509574A (ja)
HK (1) HK72979A (ja)
IL (1) IL47364A (ja)
IT (1) IT1032985B (ja)
NL (1) NL183915C (ja)
SE (1) SE393880B (ja)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3988535A (en) * 1975-11-04 1976-10-26 Western Electric Company, Inc. Automated positioning
JPS52140278A (en) * 1976-05-19 1977-11-22 Hitachi Ltd Position detector
DE2643809B2 (de) * 1976-09-29 1980-10-09 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Einjustieren eines Körpers
DE2803653C3 (de) * 1978-01-27 1986-05-28 Texas Instruments Deutschland Gmbh, 8050 Freising Ausrichtvorrichtung
JPS54114182A (en) * 1978-02-27 1979-09-06 Canon Inc Alingment device
JPS54114183A (en) * 1978-02-27 1979-09-06 Canon Inc Position matching method
JPS54114181A (en) * 1978-02-27 1979-09-06 Canon Inc Alignment device
JPS5850420B2 (ja) * 1978-02-28 1983-11-10 株式会社新川 パタ−ン位置合せ装置
US4208675A (en) * 1978-03-20 1980-06-17 Agence Nationale De Valorization De La Recherche (Anvar) Method and apparatus for positioning an object
CH643959A5 (de) * 1978-04-14 1984-06-29 Siemens Ag Verfahren und vorrichtung zur automatischen lageerkennung von halbleiterchips.
JPS5856402B2 (ja) * 1978-08-30 1983-12-14 大日本スクリ−ン製造株式会社 位置決め用センサ−
US4253111A (en) * 1978-09-25 1981-02-24 Gca Corporation Apparatus for bonding leads to semiconductor chips
US4233625A (en) * 1978-11-03 1980-11-11 Teledyne, Inc. Television monitoring system for automatically aligning semiconductor devices during manufacture
JPS5588347A (en) * 1978-12-27 1980-07-04 Fujitsu Ltd Automatic aligning system
US4318081A (en) * 1979-12-19 1982-03-02 Hajime Industries Ltd. Object inspection system
US4260979A (en) * 1979-12-31 1981-04-07 International Business Machines Corporation Apparatus for sensing non-coded images
US4316189A (en) * 1980-05-08 1982-02-16 Westinghouse Electric Corp. Electromechanical display apparatus
US4376584A (en) * 1980-06-02 1983-03-15 Bell Telephone Laboratories, Inc. Pattern printing including aligning masks and monitoring such alignment
US4342090A (en) * 1980-06-27 1982-07-27 International Business Machines Corp. Batch chip placement system
JPS58130840A (ja) * 1982-01-29 1983-08-04 Fuji Electric Co Ltd 紙葉類搬送装置
US4471947A (en) * 1983-04-19 1984-09-18 Osborne Charles W Fence Construction
US4551912A (en) * 1983-06-30 1985-11-12 International Business Machines Corporation Highly integrated universal tape bonding
US4593406A (en) * 1984-01-16 1986-06-03 The United States Of America As Represented By The United States Department Of Energy Automatic image acquisition processor and method
US4604648A (en) * 1984-10-12 1986-08-05 Kley Victor B Electronic viewing system for integrated circuit packages
US4651203A (en) * 1985-10-29 1987-03-17 At&T Technologies, Inc. Video controlled article positioning system
DE3621056A1 (de) * 1986-06-24 1988-01-14 Polygram Gmbh Verfahren zum ausrichten der drehlage von drehbaren oder positionieren von verschieblichen gegenstaenden
US4880309A (en) * 1987-04-14 1989-11-14 General Signal Corporation Dark field target design system for alignment of semiconductor wafers
GB8801691D0 (en) * 1988-01-26 1988-02-24 Protocol Eng Plc Film punch registration
GB9125603D0 (en) * 1991-12-02 1992-01-29 Gec-Marconi Limited Optical analysis system and positioning apparatus therefor
JP3223583B2 (ja) * 1992-06-29 2001-10-29 株式会社島津製作所 マイクロマニピュレータ用操作装置
US6587581B1 (en) * 1997-01-10 2003-07-01 Hitachi, Ltd. Visual inspection method and apparatus therefor
US6331891B1 (en) * 1998-04-07 2001-12-18 Fujitsu Limited Apparatus and method for assembling semiconductor device and semiconductor device thus fabricated
EP0949660B1 (en) * 1998-04-07 2007-08-01 Fujitsu Limited Apparatus and method for assembling semiconductor device
US7141450B2 (en) * 2002-04-08 2006-11-28 Lucent Technologies Inc. Flip-chip alignment method
US8146497B2 (en) * 2004-05-04 2012-04-03 Sys Tec S.R.L. Method and machine for aligning flexographic printing plates on printing cylinders
US7344273B2 (en) 2005-03-22 2008-03-18 Binary Works, Inc. Ring light with user manipulable control
WO2013190606A1 (ja) * 2012-06-18 2013-12-27 富士機械製造株式会社 バルクフィーダ

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3207904A (en) * 1962-04-09 1965-09-21 Western Electric Co Electro-optical article positioning system
US3497705A (en) * 1968-02-12 1970-02-24 Itek Corp Mask alignment system using radial patterns and flying spot scanning
US3749830A (en) * 1968-04-09 1973-07-31 Westinghouse Electric Corp Pattern sensing and positioning system
US3593286A (en) * 1968-11-27 1971-07-13 Norman G Altman Pattern recognition system having electronically controllable aperture shape, scan shape, and scan position
US3581375A (en) * 1969-03-07 1971-06-01 Ibm Method and apparatus for manufacturing integrated circuits
US3811011A (en) * 1969-07-08 1974-05-14 Itek Corp Multiple image registration system
CA968439A (en) * 1971-05-26 1975-05-27 Western Electric Company, Incorporated Video controlled positioning method and apparatus
US3796497A (en) * 1971-12-01 1974-03-12 Ibm Optical alignment method and apparatus

Also Published As

Publication number Publication date
JPS513580A (ja) 1976-01-13
US3903363A (en) 1975-09-02
SE7505834L (sv) 1975-12-01
DE2523858A1 (de) 1975-12-18
NL183915C (nl) 1989-02-16
FR2275821B1 (ja) 1979-07-06
NL7506234A (nl) 1975-12-02
CA1022258A (en) 1977-12-06
GB1509574A (en) 1978-05-04
IL47364A0 (en) 1975-07-28
HK72979A (en) 1979-10-26
BE829643A (fr) 1975-09-15
ES438079A1 (es) 1977-02-01
FR2275821A1 (fr) 1976-01-16
BR7503172A (pt) 1976-05-25
IL47364A (en) 1977-02-28
DE2523858C2 (de) 1984-08-23
JPS5711142B2 (ja) 1982-03-02
IT1032985B (it) 1979-06-20

Similar Documents

Publication Publication Date Title
SE7505834L (sv) Forfarande och anordning for inriktning av en forsta artikel med en andra artikel
SE405512B (sv) Forfarande och anordning for bearbetning av ekosignaler
SE412652B (sv) Avsokningsanordning med planfeltsegenskaper
FR2285859A1 (fr) Phenylsulfinyl-amidines et derives
TR18916A (tr) Siniflara dagitma cihazi
SE428432B (sv) Forfarande och anordning for fluidpaleggning
SE7601277L (sv) Anordning och forfarande for kompensering av reaktiveffekt
AT373071B (de) Zentriergeraet
SE409675B (sv) Ritningsforfarande och ritanordning for genomforande av forfarandet
IT1030136B (it) Procedimento e dispositivo per modellare materiali tessili
SE403853B (sv) Tyristor med en forsta och en andra hjelpemitter
SE7513361L (sv) Forpackning med forstyvningsinsats
SE7512850L (sv) Forfarande och anordning for behandling av foremal med en gasstrom
SE7509627L (sv) Forfarande och anordning for varmdragning
SE409471B (sv) Blesterupphettare for masugnar och dylikt
SE7413663L (sv) Anordning innefattande en forsta del och en med denna sammanforbar andra del
SE7512009L (sv) Berstativ for tvettstell och dylikt
SE7513083L (sv) Polyvalent anordning for svetsning av samlare och liknande
SE423799B (sv) Forfarande och anordning for framstellning av en serigrafisk schablon
NO136583C (no) Mekanisk tremasse med hoey absorpsjonshastighet, samt fremgangsmaate for fremstilling derav
SE7508680L (sv) Anordning med tva referenshalrum for frekvensfoljning
SE7605974L (sv) Forfarande och anordning for framstellning av forpackningsemnen
SE7510782L (sv) Forfarande och anordning for framstellning av strengformiga foremal
SE7710200L (sv) Forfarande och anordning for stoppande av vexelriktare
SE423339B (sv) Forfarande och anordning for formning av kolvringar

Legal Events

Date Code Title Description
NUG Patent has lapsed

Ref document number: 7505834-7

Effective date: 19921204

Format of ref document f/p: F