SE363246B - - Google Patents
Info
- Publication number
- SE363246B SE363246B SE14145/71A SE1414571A SE363246B SE 363246 B SE363246 B SE 363246B SE 14145/71 A SE14145/71 A SE 14145/71A SE 1414571 A SE1414571 A SE 1414571A SE 363246 B SE363246 B SE 363246B
- Authority
- SE
- Sweden
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/14—Feed and outlet means for the gases; Modifying the flow of the reactive gases
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45587—Mechanical means for changing the gas flow
- C23C16/45589—Movable means, e.g. fans
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2054538A DE2054538C3 (de) | 1970-11-05 | 1970-11-05 | Vorrichtung zum Abscheiden von Schichten aus Halbleitermaterial |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE363246B true SE363246B (show.php) | 1974-01-14 |
Family
ID=5787272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE14145/71A SE363246B (show.php) | 1970-11-05 | 1971-11-05 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3735727A (show.php) |
| CA (1) | CA948075A (show.php) |
| DE (1) | DE2054538C3 (show.php) |
| FR (1) | FR2113442A5 (show.php) |
| GB (1) | GB1328584A (show.php) |
| IT (1) | IT939155B (show.php) |
| NL (1) | NL7115280A (show.php) |
| SE (1) | SE363246B (show.php) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3880112A (en) * | 1971-10-20 | 1975-04-29 | Commissariat Energie Atomique | Device for the preparation of thin films |
| US4291640A (en) * | 1977-09-09 | 1981-09-29 | The Continental Group, Inc. | Powder coating apparatus for two-piece cans |
| US4203387A (en) * | 1978-12-28 | 1980-05-20 | General Signal Corporation | Cage for low pressure silicon dioxide deposition reactors |
| US4649859A (en) * | 1985-02-19 | 1987-03-17 | The United States Of America As Represented By The United States Department Of Energy | Reactor design for uniform chemical vapor deposition-grown films without substrate rotation |
| FR2623524B1 (fr) * | 1987-11-20 | 1990-03-30 | Lami Philippe | Perfectionnement au procede et au dispositif de depot metallique sur un echantillon |
| NL1022155C2 (nl) * | 2002-12-12 | 2004-06-22 | Otb Group Bv | Werkwijze, alsmede inrichting voor het behandelen van een oppervlak van ten minste één substraat. |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2884894A (en) * | 1956-11-02 | 1959-05-05 | Metallgesellschaft Ag | Apparatus for producing hard coatings on workpieces |
| US3367303A (en) * | 1963-05-29 | 1968-02-06 | Monsanto Co | Chemical equipment |
| US3460510A (en) * | 1966-05-12 | 1969-08-12 | Dow Corning | Large volume semiconductor coating reactor |
| US3598082A (en) * | 1969-08-14 | 1971-08-10 | Texas Instruments Inc | Continuous epitaxial deposition system |
-
1970
- 1970-11-05 DE DE2054538A patent/DE2054538C3/de not_active Expired
-
1971
- 1971-09-30 GB GB4550671A patent/GB1328584A/en not_active Expired
- 1971-10-29 US US00193743A patent/US3735727A/en not_active Expired - Lifetime
- 1971-11-02 FR FR7139176A patent/FR2113442A5/fr not_active Expired
- 1971-11-03 IT IT30677/71A patent/IT939155B/it active
- 1971-11-04 CA CA126,834A patent/CA948075A/en not_active Expired
- 1971-11-05 SE SE14145/71A patent/SE363246B/xx unknown
- 1971-11-05 NL NL7115280A patent/NL7115280A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR2113442A5 (show.php) | 1972-06-23 |
| US3735727A (en) | 1973-05-29 |
| GB1328584A (en) | 1973-08-30 |
| DE2054538B2 (de) | 1978-07-27 |
| DE2054538A1 (de) | 1972-05-10 |
| DE2054538C3 (de) | 1979-03-22 |
| IT939155B (it) | 1973-02-10 |
| CA948075A (en) | 1974-05-28 |
| NL7115280A (show.php) | 1972-05-09 |