SE363243B - - Google Patents

Info

Publication number
SE363243B
SE363243B SE1766769A SE1766769A SE363243B SE 363243 B SE363243 B SE 363243B SE 1766769 A SE1766769 A SE 1766769A SE 1766769 A SE1766769 A SE 1766769A SE 363243 B SE363243 B SE 363243B
Authority
SE
Sweden
Application number
SE1766769A
Inventor
E Sirtl
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19681816083 external-priority patent/DE1816083C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of SE363243B publication Critical patent/SE363243B/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • H01L21/3228Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of AIIIBV compounds, e.g. to make them semi-insulating
    • AHUMAN NECESSITIES
    • A01AGRICULTURE; FORESTRY; ANIMAL HUSBANDRY; HUNTING; TRAPPING; FISHING
    • A01DHARVESTING; MOWING
    • A01D19/00Digging machines with centrifugal wheels, drums or spinners
    • A01D19/04Digging machines with centrifugal wheels, drums or spinners with working tools rotating around a horizontal axis arranged parallel to the direction of travel
    • A01D19/06Digging machines with centrifugal wheels, drums or spinners with working tools rotating around a horizontal axis arranged parallel to the direction of travel with scoop wheels or drums
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • H01L21/3221Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291Oxides or nitrides or carbides, e.g. ceramics, glass
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Environmental Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
SE1766769A 1968-12-20 1969-12-19 SE363243B (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681816083 DE1816083C3 (de) 1968-12-20 Verfahren zur Getterung schnell diffundierender Verunreinigungen in Halbleiterkristallscheiben

Publications (1)

Publication Number Publication Date
SE363243B true SE363243B (enrdf_load_stackoverflow) 1974-01-14

Family

ID=5716946

Family Applications (1)

Application Number Title Priority Date Filing Date
SE1766769A SE363243B (enrdf_load_stackoverflow) 1968-12-20 1969-12-19

Country Status (6)

Country Link
AT (1) AT311419B (enrdf_load_stackoverflow)
CH (1) CH522290A (enrdf_load_stackoverflow)
FR (1) FR2026656B1 (enrdf_load_stackoverflow)
GB (1) GB1267700A (enrdf_load_stackoverflow)
NL (1) NL6918858A (enrdf_load_stackoverflow)
SE (1) SE363243B (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1307546A (en) * 1970-05-22 1973-02-21 Mullard Ltd Methods of manufacturing semiconductor devices
JPH01214127A (ja) * 1987-12-30 1989-08-28 Monsanto Co 単結晶ガリウムヒ素半導体基板

Also Published As

Publication number Publication date
FR2026656A1 (enrdf_load_stackoverflow) 1970-09-18
DE1816083A1 (de) 1970-06-25
NL6918858A (enrdf_load_stackoverflow) 1970-06-23
GB1267700A (en) 1972-03-22
FR2026656B1 (enrdf_load_stackoverflow) 1975-04-18
CH522290A (de) 1972-06-15
AT311419B (de) 1973-11-12
DE1816083B2 (de) 1976-05-13

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