SE348076B - - Google Patents
Info
- Publication number
- SE348076B SE348076B SE11338/67A SE1133867A SE348076B SE 348076 B SE348076 B SE 348076B SE 11338/67 A SE11338/67 A SE 11338/67A SE 1133867 A SE1133867 A SE 1133867A SE 348076 B SE348076 B SE 348076B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Microscoopes, Condenser (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL666611425A NL154050B (nl) | 1966-08-13 | 1966-08-13 | Elektronenmicroscoop. |
| US8214170A | 1970-10-19 | 1970-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE348076B true SE348076B (nl) | 1972-08-21 |
Family
ID=26644080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE11338/67A SE348076B (nl) | 1966-08-13 | 1967-08-10 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3629575A (nl) |
| BE (1) | BE702608A (nl) |
| CH (1) | CH471463A (nl) |
| DK (1) | DK129677B (nl) |
| GB (1) | GB1195896A (nl) |
| NL (1) | NL154050B (nl) |
| SE (1) | SE348076B (nl) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2223367C3 (de) * | 1972-05-12 | 1978-11-30 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen | Mikrostrahlsonde zur quantitativen Erfassung von geladenen Sekundärteilchen |
| JPS5136196B2 (nl) * | 1972-05-22 | 1976-10-07 | ||
| NL177578C (nl) * | 1976-05-14 | 1985-10-16 | Thomson Csf | Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel. |
| NL8100449A (nl) * | 1981-01-30 | 1982-08-16 | Philips Nv | Elektronenmikroskoop met roentgendetektor. |
| US4852563A (en) * | 1987-06-22 | 1989-08-01 | The Kendall Company | Multifunction connector for a breathing circuit |
| JP3112527B2 (ja) * | 1991-11-14 | 2000-11-27 | 日本電子株式会社 | 電子顕微鏡 |
| JP2002217088A (ja) * | 2001-01-17 | 2002-08-02 | Nikon Corp | 荷電粒子線露光装置、荷電粒子線露光方法及び半導体デバイスの製造方法 |
| WO2019244468A1 (ja) * | 2018-06-20 | 2019-12-26 | 国立研究開発法人産業技術総合研究所 | 画像形成方法及びインピーダンス顕微鏡 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL98715C (nl) * | 1953-09-04 | |||
| NL265945A (nl) * | 1960-06-18 | |||
| US3333098A (en) * | 1963-07-31 | 1967-07-25 | Hitachi Ltd | Aperture device for electron microscopes and the like |
-
1966
- 1966-08-13 NL NL666611425A patent/NL154050B/nl not_active IP Right Cessation
-
1967
- 1967-08-10 CH CH1125367A patent/CH471463A/de not_active IP Right Cessation
- 1967-08-10 GB GB36714/67A patent/GB1195896A/en not_active Expired
- 1967-08-10 SE SE11338/67A patent/SE348076B/xx unknown
- 1967-08-10 DK DK407667AA patent/DK129677B/da unknown
- 1967-08-11 BE BE702608D patent/BE702608A/xx unknown
-
1970
- 1970-10-19 US US82141A patent/US3629575A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| DE1614269B2 (de) | 1976-02-12 |
| NL6611425A (nl) | 1968-02-14 |
| DE1614269A1 (de) | 1970-06-25 |
| NL154050B (nl) | 1977-07-15 |
| US3629575A (en) | 1971-12-21 |
| GB1195896A (en) | 1970-06-24 |
| BE702608A (nl) | 1968-02-12 |
| DK129677C (nl) | 1975-04-14 |
| CH471463A (de) | 1969-04-15 |
| DK129677B (da) | 1974-11-04 |