SE348076B - - Google Patents

Info

Publication number
SE348076B
SE348076B SE11338/67A SE1133867A SE348076B SE 348076 B SE348076 B SE 348076B SE 11338/67 A SE11338/67 A SE 11338/67A SE 1133867 A SE1133867 A SE 1133867A SE 348076 B SE348076 B SE 348076B
Authority
SE
Sweden
Application number
SE11338/67A
Inventor
C Rakels
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of SE348076B publication Critical patent/SE348076B/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Electron Sources, Ion Sources (AREA)
SE11338/67A 1966-08-13 1967-08-10 SE348076B (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL666611425A NL154050B (nl) 1966-08-13 1966-08-13 Elektronenmicroscoop.
US8214170A 1970-10-19 1970-10-19

Publications (1)

Publication Number Publication Date
SE348076B true SE348076B (nl) 1972-08-21

Family

ID=26644080

Family Applications (1)

Application Number Title Priority Date Filing Date
SE11338/67A SE348076B (nl) 1966-08-13 1967-08-10

Country Status (7)

Country Link
US (1) US3629575A (nl)
BE (1) BE702608A (nl)
CH (1) CH471463A (nl)
DK (1) DK129677B (nl)
GB (1) GB1195896A (nl)
NL (1) NL154050B (nl)
SE (1) SE348076B (nl)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2223367C3 (de) * 1972-05-12 1978-11-30 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Mikrostrahlsonde zur quantitativen Erfassung von geladenen Sekundärteilchen
JPS5136196B2 (nl) * 1972-05-22 1976-10-07
NL177578C (nl) * 1976-05-14 1985-10-16 Thomson Csf Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel.
NL8100449A (nl) * 1981-01-30 1982-08-16 Philips Nv Elektronenmikroskoop met roentgendetektor.
US4852563A (en) * 1987-06-22 1989-08-01 The Kendall Company Multifunction connector for a breathing circuit
JP3112527B2 (ja) * 1991-11-14 2000-11-27 日本電子株式会社 電子顕微鏡
JP2002217088A (ja) * 2001-01-17 2002-08-02 Nikon Corp 荷電粒子線露光装置、荷電粒子線露光方法及び半導体デバイスの製造方法
US11454605B2 (en) * 2018-06-20 2022-09-27 National Institute Of Advanced Industrial Science And Technology Image forming method and impedance microscope

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL98715C (nl) * 1953-09-04
NL265945A (nl) * 1960-06-18
US3333098A (en) * 1963-07-31 1967-07-25 Hitachi Ltd Aperture device for electron microscopes and the like

Also Published As

Publication number Publication date
DE1614269A1 (de) 1970-06-25
GB1195896A (en) 1970-06-24
CH471463A (de) 1969-04-15
US3629575A (en) 1971-12-21
DK129677B (da) 1974-11-04
DK129677C (nl) 1975-04-14
NL6611425A (nl) 1968-02-14
DE1614269B2 (de) 1976-02-12
BE702608A (nl) 1968-02-12
NL154050B (nl) 1977-07-15

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