BE702608A - - Google Patents

Info

Publication number
BE702608A
BE702608A BE702608DA BE702608A BE 702608 A BE702608 A BE 702608A BE 702608D A BE702608D A BE 702608DA BE 702608 A BE702608 A BE 702608A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE702608A publication Critical patent/BE702608A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Electron Sources, Ion Sources (AREA)
BE702608D 1966-08-13 1967-08-11 BE702608A (xx)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL666611425A NL154050B (nl) 1966-08-13 1966-08-13 Elektronenmicroscoop.
US8214170A 1970-10-19 1970-10-19

Publications (1)

Publication Number Publication Date
BE702608A true BE702608A (xx) 1968-02-12

Family

ID=26644080

Family Applications (1)

Application Number Title Priority Date Filing Date
BE702608D BE702608A (xx) 1966-08-13 1967-08-11

Country Status (7)

Country Link
US (1) US3629575A (xx)
BE (1) BE702608A (xx)
CH (1) CH471463A (xx)
DK (1) DK129677B (xx)
GB (1) GB1195896A (xx)
NL (1) NL154050B (xx)
SE (1) SE348076B (xx)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2223367C3 (de) * 1972-05-12 1978-11-30 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Mikrostrahlsonde zur quantitativen Erfassung von geladenen Sekundärteilchen
JPS5136196B2 (xx) * 1972-05-22 1976-10-07
NL177578C (nl) * 1976-05-14 1985-10-16 Thomson Csf Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel.
NL8100449A (nl) * 1981-01-30 1982-08-16 Philips Nv Elektronenmikroskoop met roentgendetektor.
US4852563A (en) * 1987-06-22 1989-08-01 The Kendall Company Multifunction connector for a breathing circuit
JP3112527B2 (ja) * 1991-11-14 2000-11-27 日本電子株式会社 電子顕微鏡
JP2002217088A (ja) * 2001-01-17 2002-08-02 Nikon Corp 荷電粒子線露光装置、荷電粒子線露光方法及び半導体デバイスの製造方法
US11454605B2 (en) * 2018-06-20 2022-09-27 National Institute Of Advanced Industrial Science And Technology Image forming method and impedance microscope

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL98715C (xx) * 1953-09-04
NL265945A (xx) * 1960-06-18
US3333098A (en) * 1963-07-31 1967-07-25 Hitachi Ltd Aperture device for electron microscopes and the like

Also Published As

Publication number Publication date
DE1614269A1 (de) 1970-06-25
GB1195896A (en) 1970-06-24
CH471463A (de) 1969-04-15
US3629575A (en) 1971-12-21
SE348076B (xx) 1972-08-21
DK129677B (da) 1974-11-04
DK129677C (xx) 1975-04-14
NL6611425A (xx) 1968-02-14
DE1614269B2 (de) 1976-02-12
NL154050B (nl) 1977-07-15

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