CH471463A - Elektronenmikroskop - Google Patents

Elektronenmikroskop

Info

Publication number
CH471463A
CH471463A CH1125367A CH1125367A CH471463A CH 471463 A CH471463 A CH 471463A CH 1125367 A CH1125367 A CH 1125367A CH 1125367 A CH1125367 A CH 1125367A CH 471463 A CH471463 A CH 471463A
Authority
CH
Switzerland
Prior art keywords
electron microscope
microscope
electron
Prior art date
Application number
CH1125367A
Other languages
English (en)
Inventor
Johannes Rakels Christiaan
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH471463A publication Critical patent/CH471463A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microscoopes, Condenser (AREA)
  • Electron Sources, Ion Sources (AREA)
CH1125367A 1966-08-13 1967-08-10 Elektronenmikroskop CH471463A (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL666611425A NL154050B (nl) 1966-08-13 1966-08-13 Elektronenmicroscoop.
US8214170A 1970-10-19 1970-10-19

Publications (1)

Publication Number Publication Date
CH471463A true CH471463A (de) 1969-04-15

Family

ID=26644080

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1125367A CH471463A (de) 1966-08-13 1967-08-10 Elektronenmikroskop

Country Status (7)

Country Link
US (1) US3629575A (de)
BE (1) BE702608A (de)
CH (1) CH471463A (de)
DK (1) DK129677B (de)
GB (1) GB1195896A (de)
NL (1) NL154050B (de)
SE (1) SE348076B (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2223367C3 (de) * 1972-05-12 1978-11-30 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Mikrostrahlsonde zur quantitativen Erfassung von geladenen Sekundärteilchen
JPS5136196B2 (de) * 1972-05-22 1976-10-07
NL177578C (nl) * 1976-05-14 1985-10-16 Thomson Csf Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel.
NL8100449A (nl) * 1981-01-30 1982-08-16 Philips Nv Elektronenmikroskoop met roentgendetektor.
US4852563A (en) * 1987-06-22 1989-08-01 The Kendall Company Multifunction connector for a breathing circuit
JP3112527B2 (ja) * 1991-11-14 2000-11-27 日本電子株式会社 電子顕微鏡
JP2002217088A (ja) * 2001-01-17 2002-08-02 Nikon Corp 荷電粒子線露光装置、荷電粒子線露光方法及び半導体デバイスの製造方法
US11454605B2 (en) * 2018-06-20 2022-09-27 National Institute Of Advanced Industrial Science And Technology Image forming method and impedance microscope

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1049988B (de) * 1953-09-04
NL265945A (de) * 1960-06-18
US3333098A (en) * 1963-07-31 1967-07-25 Hitachi Ltd Aperture device for electron microscopes and the like

Also Published As

Publication number Publication date
BE702608A (de) 1968-02-12
SE348076B (de) 1972-08-21
NL6611425A (de) 1968-02-14
DK129677B (da) 1974-11-04
GB1195896A (en) 1970-06-24
DE1614269A1 (de) 1970-06-25
DE1614269B2 (de) 1976-02-12
NL154050B (nl) 1977-07-15
US3629575A (en) 1971-12-21
DK129677C (de) 1975-04-14

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Legal Events

Date Code Title Description
PL Patent ceased