JPS5136196B2 - - Google Patents
Info
- Publication number
- JPS5136196B2 JPS5136196B2 JP47050594A JP5059472A JPS5136196B2 JP S5136196 B2 JPS5136196 B2 JP S5136196B2 JP 47050594 A JP47050594 A JP 47050594A JP 5059472 A JP5059472 A JP 5059472A JP S5136196 B2 JPS5136196 B2 JP S5136196B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47050594A JPS5136196B2 (nl) | 1972-05-22 | 1972-05-22 | |
| US00359669A US3852597A (en) | 1972-05-22 | 1973-05-14 | Method and apparatus for observing a low magnification electron microscope image |
| DE19732326042 DE2326042C3 (de) | 1972-05-22 | 1973-05-22 | Verfahren zur Erzeugung und Beobachtung eines Bildes einer Probe in einem Elektronenmikroskop und Elektronenmikroskop zur Durchführung des Verfahrens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47050594A JPS5136196B2 (nl) | 1972-05-22 | 1972-05-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4917168A JPS4917168A (nl) | 1974-02-15 |
| JPS5136196B2 true JPS5136196B2 (nl) | 1976-10-07 |
Family
ID=12863284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47050594A Expired JPS5136196B2 (nl) | 1972-05-22 | 1972-05-22 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3852597A (nl) |
| JP (1) | JPS5136196B2 (nl) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5423476A (en) * | 1977-07-25 | 1979-02-22 | Akashi Seisakusho Kk | Composite electron lens |
| DE2752598C3 (de) * | 1977-11-25 | 1981-10-15 | Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel | Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür |
| US5336891A (en) * | 1992-06-16 | 1994-08-09 | Arch Development Corporation | Aberration free lens system for electron microscope |
| US5627373A (en) * | 1996-06-17 | 1997-05-06 | Hewlett-Packard Company | Automatic electron beam alignment and astigmatism correction in scanning electron microscope |
| JP4611755B2 (ja) * | 2005-01-13 | 2011-01-12 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡及びその撮像方法 |
| JP4896626B2 (ja) * | 2006-08-22 | 2012-03-14 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
| JP5350123B2 (ja) * | 2009-08-10 | 2013-11-27 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置及び画像表示方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB646019A (en) * | 1946-01-05 | 1950-11-15 | Philips Nv | Improvements in or relating to electron microscopes |
| NL98715C (nl) * | 1953-09-04 | |||
| NL265945A (nl) * | 1960-06-18 | |||
| US3374346A (en) * | 1964-07-15 | 1968-03-19 | Hitachi Ltd | Spectroscopic electron microscope wherein a specimen is irradiated with x-rays and the electrons emitted are energy analyzed |
| US3359418A (en) * | 1964-12-11 | 1967-12-19 | Gunter F Bahr | Electromagnetic actuating means for a shutter mechanism in an electron microscope |
| NL154050B (nl) * | 1966-08-13 | 1977-07-15 | Philips Nv | Elektronenmicroscoop. |
| DE1614122B1 (de) * | 1967-02-24 | 1970-06-25 | Max Planck Gesellschaft | Magnetische,insbesondere elektromagnetische,Polschuhlinse fuer Korpuskularstrahlgeraete,insbesondere fuer Elektronenmikroskope und Verfahren zu ihrer Justierung |
| US3715582A (en) * | 1970-02-13 | 1973-02-06 | Hitachi Ltd | Method of and apparatus for attaining focusing following variation in magnification in electron microscope |
-
1972
- 1972-05-22 JP JP47050594A patent/JPS5136196B2/ja not_active Expired
-
1973
- 1973-05-14 US US00359669A patent/US3852597A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4917168A (nl) | 1974-02-15 |
| US3852597A (en) | 1974-12-03 |
| DE2326042B2 (de) | 1975-07-03 |
| DE2326042A1 (de) | 1973-12-06 |