SE332466B - - Google Patents

Info

Publication number
SE332466B
SE332466B SE07302/65A SE730265A SE332466B SE 332466 B SE332466 B SE 332466B SE 07302/65 A SE07302/65 A SE 07302/65A SE 730265 A SE730265 A SE 730265A SE 332466 B SE332466 B SE 332466B
Authority
SE
Sweden
Prior art keywords
lens
coil
length
surrounded
specified
Prior art date
Application number
SE07302/65A
Other languages
English (en)
Inventor
Poole J Le
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of SE332466B publication Critical patent/SE332466B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
SE07302/65A 1964-06-06 1965-06-03 SE332466B (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL646406449A NL145716B (nl) 1964-06-06 1964-06-06 Elektronenstraalapparaat.

Publications (1)

Publication Number Publication Date
SE332466B true SE332466B (xx) 1971-02-08

Family

ID=19790247

Family Applications (1)

Application Number Title Priority Date Filing Date
SE07302/65A SE332466B (xx) 1964-06-06 1965-06-03

Country Status (8)

Country Link
US (1) US3394254A (xx)
AT (1) AT256197B (xx)
BE (1) BE664970A (xx)
CH (1) CH437562A (xx)
DE (1) DE1260048B (xx)
GB (1) GB1098865A (xx)
NL (1) NL145716B (xx)
SE (1) SE332466B (xx)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1234183A (xx) * 1967-08-18 1971-06-03
GB1238889A (xx) * 1968-11-26 1971-07-14
NL175245C (nl) * 1977-05-26 1984-10-01 Philips Nv Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor.
DE2752598C3 (de) * 1977-11-25 1981-10-15 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür
JPS5842935B2 (ja) * 1978-04-07 1983-09-22 日本電子株式会社 走査電子顕微鏡等の対物レンズ
JP2744823B2 (ja) * 1989-11-16 1998-04-28 日本電子株式会社 電子レンズ
US5289009A (en) * 1990-08-02 1994-02-22 U.S. Philips Corporation Charged particle beam system and cooling device, a coil comprising a cooling member and a cooling member for use in such a charged particle beam system
GB2397691B (en) * 2003-01-24 2005-08-10 Leica Microsys Lithography Ltd Cooling of a device for influencing an electron beam
CN102103967B (zh) * 2005-11-28 2013-02-06 卡尔蔡司Smt有限责任公司 粒子光学组件
DE602007011888D1 (de) * 2007-03-14 2011-02-24 Integrated Circuit Testing Kühlung der Spule einer Magnetlinse
DE102008064696B4 (de) 2008-12-23 2022-01-27 Carl Zeiss Microscopy Gmbh Teilchenoptische Vorrichtung mit Magnetanordnung und ihre Verwendung zum Abbilden oder Beleuchten
US10486232B2 (en) * 2015-04-21 2019-11-26 Varian Semiconductor Equipment Associates, Inc. Semiconductor manufacturing device with embedded fluid conduits

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE895350C (de) * 1938-11-06 1953-11-02 Siemens Ag Elektronenmikroskop
US2202505A (en) * 1939-01-13 1940-05-28 Baird Television Ltd Electromagnetic focusing coil
US3008044A (en) * 1960-02-25 1961-11-07 Gen Electric Application of superconductivity in guiding charged particles
NL278366A (xx) * 1961-05-27

Also Published As

Publication number Publication date
AT256197B (de) 1967-08-10
US3394254A (en) 1968-07-23
NL145716B (nl) 1975-04-15
NL6406449A (xx) 1965-12-07
BE664970A (xx) 1965-12-06
CH437562A (de) 1967-06-15
GB1098865A (en) 1968-01-10
DE1260048B (de) 1968-02-01

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