DE602007011888D1 - Kühlung der Spule einer Magnetlinse - Google Patents

Kühlung der Spule einer Magnetlinse

Info

Publication number
DE602007011888D1
DE602007011888D1 DE602007011888T DE602007011888T DE602007011888D1 DE 602007011888 D1 DE602007011888 D1 DE 602007011888D1 DE 602007011888 T DE602007011888 T DE 602007011888T DE 602007011888 T DE602007011888 T DE 602007011888T DE 602007011888 D1 DE602007011888 D1 DE 602007011888D1
Authority
DE
Germany
Prior art keywords
coil
cooling
magnetic lens
lens
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602007011888T
Other languages
English (en)
Inventor
Pavel Adamec
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Original Assignee
ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH filed Critical ICT Integrated Circuit Testing Gesellschaft fuer Halbleiterprueftechnik mbH
Publication of DE602007011888D1 publication Critical patent/DE602007011888D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/002—Cooling arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/14—Lenses magnetic
    • H01J2237/1405—Constructional details

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
DE602007011888T 2007-03-14 2007-03-14 Kühlung der Spule einer Magnetlinse Active DE602007011888D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP07005310A EP1970935B1 (de) 2007-03-14 2007-03-14 Kühlung der Spule einer Magnetlinse

Publications (1)

Publication Number Publication Date
DE602007011888D1 true DE602007011888D1 (de) 2011-02-24

Family

ID=38328419

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602007011888T Active DE602007011888D1 (de) 2007-03-14 2007-03-14 Kühlung der Spule einer Magnetlinse

Country Status (3)

Country Link
US (1) US8044368B2 (de)
EP (1) EP1970935B1 (de)
DE (1) DE602007011888D1 (de)

Families Citing this family (10)

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TW200829942A (en) * 2006-06-13 2008-07-16 Semequip Inc Magnetic analyzer apparatus and method for ion implantation
CN103189955A (zh) 2010-08-27 2013-07-03 Ge传感与检测技术有限公司 用于高分辨率x射线设备的微焦点x射线管
US20130134322A1 (en) 2010-10-27 2013-05-30 Param Corporation Electron lens and the electron beam device
JP5667618B2 (ja) * 2012-12-14 2015-02-12 株式会社アドバンテスト 電磁レンズ及び電子ビーム露光装置
CN103474308A (zh) * 2013-09-30 2013-12-25 桂林狮达机电技术工程有限公司 带有电磁合轴装置的电子枪
JP6022717B2 (ja) * 2013-11-14 2016-11-09 マッパー・リソグラフィー・アイピー・ビー．ブイ． 多電極電子光学系
US10486232B2 (en) * 2015-04-21 2019-11-26 Varian Semiconductor Equipment Associates, Inc. Semiconductor manufacturing device with embedded fluid conduits
CN105702545B (zh) * 2016-04-07 2017-11-07 桂林狮达机电技术工程有限公司 带有聚焦补偿功能的电子束快速成型机电子枪系统
DE102019127963A1 (de) * 2019-10-16 2021-04-22 Carl Zeiss Microscopy Gmbh Partikelstrahlsystem
US20230133576A1 (en) * 2021-10-29 2023-05-04 Kla Corporation Systems and methods for uniform cooling of electromagnetic coil

Family Cites Families (25)

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Publication number Priority date Publication date Assignee Title
US2819431A (en) * 1952-12-05 1958-01-07 Louis R Maxwell Electromagnet
DE1209224B (de) * 1963-08-16 1966-01-20 Siemens Ag Magnetische Linsenanordnung fuer an der Pumpe arbeitende Korpuskularstrahlgeraete
NL145716B (nl) * 1964-06-06 1975-04-15 Philips Nv Elektronenstraalapparaat.
DE2731458C3 (de) * 1977-07-12 1980-03-20 Siemens Ag, 1000 Berlin Und 8000 Muenchen Magnetische Objektivlinseneinrichtung für unter Vakuum arbeitende Korpuskularstrahlgeräte, insbesondere Objektivlinseneinrichtung für Höchstspannungs-Elektronenmikroskope und Verwendung
US4345152A (en) * 1980-08-11 1982-08-17 The Perkin-Elmer Corporation Magnetic lens
JPS62295346A (ja) * 1986-06-12 1987-12-22 Hitachi Ltd 電子レンズ
US4896130A (en) * 1987-11-16 1990-01-23 Ermilov Igor V Magnetic system
US5289009A (en) * 1990-08-02 1994-02-22 U.S. Philips Corporation Charged particle beam system and cooling device, a coil comprising a cooling member and a cooling member for use in such a charged particle beam system
US5113165A (en) * 1990-08-03 1992-05-12 General Electric Company Superconductive magnet with thermal diode
JP2539121B2 (ja) * 1991-09-19 1996-10-02 株式会社日立製作所 超伝導磁石
JP2760213B2 (ja) * 1992-05-29 1998-05-28 富士通株式会社 電子ビーム露光方法及び装置
US5446433A (en) * 1994-09-21 1995-08-29 General Electric Company Superconducting magnet having a shock-resistant support structure
US5530413A (en) * 1995-10-20 1996-06-25 General Electric Company Superconducting magnet with re-entrant tube suspension resistant to buckling
US5651256A (en) * 1996-05-31 1997-07-29 General Electric Company Superconductive magnet having a thermal shield
JP3702063B2 (ja) * 1997-02-25 2005-10-05 株式会社東芝 断熱容器、断熱装置および断熱方法
US6053241A (en) * 1998-09-17 2000-04-25 Nikon Corporation Cooling method and apparatus for charged particle lenses and deflectors
EP0989583A1 (de) * 1998-09-25 2000-03-29 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Verfahren und Vorrichtung zur Fokusierung eines Ladungsträgerstrahls
US6396377B1 (en) * 2000-08-25 2002-05-28 Everson Electric Company Liquid cryogen-free superconducting magnet system
US20020148971A1 (en) * 2001-03-05 2002-10-17 Michael Sogard Lens assembly for electron beam column
US6570476B1 (en) * 2002-07-17 2003-05-27 General Electric Company Thermal shield suspension for superconductive magnets
US6825475B2 (en) * 2002-09-19 2004-11-30 Applied Materials Israel, Ltd. Deflection method and system for use in a charged particle beam column
GB2397691B (en) * 2003-01-24 2005-08-10 Leica Microsys Lithography Ltd Cooling of a device for influencing an electron beam
US6852982B1 (en) * 2003-07-14 2005-02-08 Fei Company Magnetic lens
US7345287B2 (en) * 2005-09-30 2008-03-18 Applied Materials, Inc. Cooling module for charged particle beam column elements
WO2007146395A2 (en) * 2006-06-13 2007-12-21 Semequip, Inc. Ion beam apparatus and method employing magnetic scanning

Also Published As

Publication number Publication date
EP1970935B1 (de) 2011-01-12
US20080224062A1 (en) 2008-09-18
US8044368B2 (en) 2011-10-25
EP1970935A1 (de) 2008-09-17

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