NL6406449A - - Google Patents

Info

Publication number
NL6406449A
NL6406449A NL6406449A NL6406449A NL6406449A NL 6406449 A NL6406449 A NL 6406449A NL 6406449 A NL6406449 A NL 6406449A NL 6406449 A NL6406449 A NL 6406449A NL 6406449 A NL6406449 A NL 6406449A
Authority
NL
Netherlands
Application number
NL6406449A
Other versions
NL145716B (nl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to NL646406449A priority Critical patent/NL145716B/xx
Priority to DEN26822A priority patent/DE1260048B/de
Priority to CH775565A priority patent/CH437562A/de
Priority to US460981A priority patent/US3394254A/en
Priority to AT505965A priority patent/AT256197B/de
Priority to SE07302/65A priority patent/SE332466B/xx
Priority to FR19624A priority patent/FR1443476A/fr
Priority to BE664970A priority patent/BE664970A/xx
Priority to GB23933/65A priority patent/GB1098865A/en
Publication of NL6406449A publication Critical patent/NL6406449A/xx
Publication of NL145716B publication Critical patent/NL145716B/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL646406449A 1964-06-06 1964-06-06 Elektronenstraalapparaat. NL145716B (nl)

Priority Applications (9)

Application Number Priority Date Filing Date Title
NL646406449A NL145716B (nl) 1964-06-06 1964-06-06 Elektronenstraalapparaat.
DEN26822A DE1260048B (de) 1964-06-06 1965-06-02 Elektronenstrahlgeraet mit elektromagnetischer Linse
CH775565A CH437562A (de) 1964-06-06 1965-06-03 Elektronenstrahlgerät
US460981A US3394254A (en) 1964-06-06 1965-06-03 Electron-optical system with a magnetic focussing lens having a cooling means
AT505965A AT256197B (de) 1964-06-06 1965-06-03 Elektronenstrahlgerät
SE07302/65A SE332466B (xx) 1964-06-06 1965-06-03
FR19624A FR1443476A (fr) 1964-06-06 1965-06-04 Appareil à faisceau électronique
BE664970A BE664970A (xx) 1964-06-06 1965-06-04
GB23933/65A GB1098865A (en) 1964-06-06 1965-06-04 Improvements in or relating to electro-magnetic lenses and to apparatus including such lenses

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL646406449A NL145716B (nl) 1964-06-06 1964-06-06 Elektronenstraalapparaat.

Publications (2)

Publication Number Publication Date
NL6406449A true NL6406449A (xx) 1965-12-07
NL145716B NL145716B (nl) 1975-04-15

Family

ID=19790247

Family Applications (1)

Application Number Title Priority Date Filing Date
NL646406449A NL145716B (nl) 1964-06-06 1964-06-06 Elektronenstraalapparaat.

Country Status (8)

Country Link
US (1) US3394254A (xx)
AT (1) AT256197B (xx)
BE (1) BE664970A (xx)
CH (1) CH437562A (xx)
DE (1) DE1260048B (xx)
GB (1) GB1098865A (xx)
NL (1) NL145716B (xx)
SE (1) SE332466B (xx)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1234183A (xx) * 1967-08-18 1971-06-03
GB1238889A (xx) * 1968-11-26 1971-07-14
NL175245C (nl) * 1977-05-26 1984-10-01 Philips Nv Elektronenmicroscoop met hulplens en elektromagnetische lens hiervoor.
DE2752598C3 (de) * 1977-11-25 1981-10-15 Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür
JPS5842935B2 (ja) * 1978-04-07 1983-09-22 日本電子株式会社 走査電子顕微鏡等の対物レンズ
JP2744823B2 (ja) * 1989-11-16 1998-04-28 日本電子株式会社 電子レンズ
US5289009A (en) * 1990-08-02 1994-02-22 U.S. Philips Corporation Charged particle beam system and cooling device, a coil comprising a cooling member and a cooling member for use in such a charged particle beam system
GB2397691B (en) 2003-01-24 2005-08-10 Leica Microsys Lithography Ltd Cooling of a device for influencing an electron beam
EP2267754B1 (en) * 2005-11-28 2012-11-21 Carl Zeiss SMT GmbH Particle-optical inspection system
DE602007011888D1 (de) * 2007-03-14 2011-02-24 Integrated Circuit Testing Kühlung der Spule einer Magnetlinse
DE102008064696B4 (de) * 2008-12-23 2022-01-27 Carl Zeiss Microscopy Gmbh Teilchenoptische Vorrichtung mit Magnetanordnung und ihre Verwendung zum Abbilden oder Beleuchten
US10486232B2 (en) * 2015-04-21 2019-11-26 Varian Semiconductor Equipment Associates, Inc. Semiconductor manufacturing device with embedded fluid conduits

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE895350C (de) * 1938-11-06 1953-11-02 Siemens Ag Elektronenmikroskop
US2202505A (en) * 1939-01-13 1940-05-28 Baird Television Ltd Electromagnetic focusing coil
US3008044A (en) * 1960-02-25 1961-11-07 Gen Electric Application of superconductivity in guiding charged particles
NL278366A (xx) * 1961-05-27

Also Published As

Publication number Publication date
GB1098865A (en) 1968-01-10
CH437562A (de) 1967-06-15
DE1260048B (de) 1968-02-01
BE664970A (xx) 1965-12-06
SE332466B (xx) 1971-02-08
AT256197B (de) 1967-08-10
NL145716B (nl) 1975-04-15
US3394254A (en) 1968-07-23

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Legal Events

Date Code Title Description
VJC Lapsed due to non-payment of the due maintenance fee for the patent or patent application
NL80 Abbreviated name of patent owner mentioned of already nullified patent

Owner name: PHILIPS