SE322674B - - Google Patents
Info
- Publication number
- SE322674B SE322674B SE10259/65A SE1025965A SE322674B SE 322674 B SE322674 B SE 322674B SE 10259/65 A SE10259/65 A SE 10259/65A SE 1025965 A SE1025965 A SE 1025965A SE 322674 B SE322674 B SE 322674B
- Authority
- SE
- Sweden
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
- Electron Sources, Ion Sources (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEST022502 | 1964-08-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SE322674B true SE322674B (xx) | 1970-04-13 |
Family
ID=7459414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE10259/65A SE322674B (xx) | 1964-08-05 | 1965-08-05 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3417224A (xx) |
| AT (1) | AT263168B (xx) |
| BE (1) | BE667877A (xx) |
| CH (1) | CH436516A (xx) |
| DE (1) | DE1515200C3 (xx) |
| GB (1) | GB1086578A (xx) |
| NL (1) | NL154051B (xx) |
| SE (1) | SE322674B (xx) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3529123A (en) * | 1968-07-24 | 1970-09-15 | Smith Corp A O | Electron beam heating with controlled beam |
| US3659097A (en) * | 1971-02-16 | 1972-04-25 | Nat Res Dev | Magnetic lenses |
| US5563415A (en) * | 1995-06-07 | 1996-10-08 | Arch Development Corporation | Magnetic lens apparatus for a low-voltage high-resolution electron microscope |
| US6051839A (en) | 1996-06-07 | 2000-04-18 | Arch Development Corporation | Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes |
| JPH11283544A (ja) * | 1998-03-31 | 1999-10-15 | Advantest Corp | 電子ビーム照射装置 |
| EP1432007B1 (en) * | 2002-12-17 | 2010-03-10 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Multi-axis compound lens, beam system making use of the compound lens, and method of manufacturing the compound lens |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE903017C (de) * | 1951-01-31 | 1954-02-01 | Sueddeutsche Lab G M B H | Herstellung kleiner Kugeln aus hochschmelzbaren Materialien |
| CH311812A (de) * | 1951-11-05 | 1955-12-15 | Zeiss Carl Fa | Aufdampfeinrichtung. |
| US2897396A (en) * | 1955-05-10 | 1959-07-28 | Vakutronik Veb | Electron emitting system |
| US3152238A (en) * | 1962-05-11 | 1964-10-06 | United Aircraft Corp | Electron beam centering apparatus |
| DE1156522B (de) * | 1962-09-25 | 1963-10-31 | Heraeus Gmbh W C | Elektronenlinsenanordnung fuer Elektronenstrahlschmelz- oder -verdampfungsanlagen |
| US3351731A (en) * | 1962-10-23 | 1967-11-07 | Jeol Ltd | Method and apparatus for treating material with a charged beam |
| US3202794A (en) * | 1963-02-18 | 1965-08-24 | Thermionics Lab Inc | Permanent magnet transverse electron beam evaporation source |
-
1964
- 1964-08-05 DE DE1515200A patent/DE1515200C3/de not_active Expired
-
1965
- 1965-07-30 GB GB32640/65A patent/GB1086578A/en not_active Expired
- 1965-08-02 CH CH1098465A patent/CH436516A/de unknown
- 1965-08-03 AT AT715065A patent/AT263168B/de active
- 1965-08-04 BE BE667877D patent/BE667877A/xx unknown
- 1965-08-05 NL NL656510195A patent/NL154051B/xx unknown
- 1965-08-05 US US477486A patent/US3417224A/en not_active Expired - Lifetime
- 1965-08-05 SE SE10259/65A patent/SE322674B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| AT263168B (de) | 1968-07-10 |
| CH436516A (de) | 1967-05-31 |
| BE667877A (xx) | 1965-12-01 |
| US3417224A (en) | 1968-12-17 |
| NL154051B (nl) | 1977-07-15 |
| DE1515200C3 (de) | 1974-06-27 |
| GB1086578A (en) | 1967-10-11 |
| DE1515200B2 (de) | 1973-11-22 |
| NL6510195A (xx) | 1966-02-07 |
| DE1515200A1 (de) | 1969-09-18 |