SE300173B - - Google Patents

Info

Publication number
SE300173B
SE300173B SE3631/63A SE363163A SE300173B SE 300173 B SE300173 B SE 300173B SE 3631/63 A SE3631/63 A SE 3631/63A SE 363163 A SE363163 A SE 363163A SE 300173 B SE300173 B SE 300173B
Authority
SE
Sweden
Application number
SE3631/63A
Inventor
M Anderson
R Schrader
M Tyler
Original Assignee
Air Reduction
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Reduction filed Critical Air Reduction
Publication of SE300173B publication Critical patent/SE300173B/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
SE3631/63A 1962-04-13 1963-04-02 SE300173B (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US187341A US3227133A (en) 1962-04-13 1962-04-13 Multiple layer coating and cleaning

Publications (1)

Publication Number Publication Date
SE300173B true SE300173B (ja) 1968-04-08

Family

ID=22688579

Family Applications (1)

Application Number Title Priority Date Filing Date
SE3631/63A SE300173B (ja) 1962-04-13 1963-04-02

Country Status (10)

Country Link
US (1) US3227133A (ja)
AT (1) AT247097B (ja)
BE (1) BE630728A (ja)
CH (1) CH414303A (ja)
DE (1) DE1298833B (ja)
DK (1) DK125169B (ja)
GB (1) GB979700A (ja)
LU (1) LU43540A1 (ja)
NL (1) NL291466A (ja)
SE (1) SE300173B (ja)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3467057A (en) * 1966-07-27 1969-09-16 Hitachi Ltd Electron beam evaporator
CA997228A (en) * 1972-06-27 1976-09-21 Hans-Juergen C. Blume Deposition of films
DE2917841A1 (de) * 1979-05-03 1980-11-13 Leybold Heraeus Gmbh & Co Kg Verdampfer fuer vakuumaufdampfanlagen
DE3200848C2 (de) * 1982-01-14 1984-09-27 GfO Gesellschaft für Oberflächentechnik mbH, 7070 Schwäbisch Gmünd Vorrichtung zum Beschicken von Verdampfern in Aufdampfanlagen
DE3316554C1 (de) * 1983-05-06 1984-07-12 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Verdampfervorrichtung mit Strahlheizung zum Aufdampfen mehrerer Materialien
CH663037A5 (de) * 1985-02-05 1987-11-13 Balzers Hochvakuum Dampfquelle fuer vakuumbeschichtungsanlagen.
GB8726639D0 (en) * 1987-11-13 1987-12-16 Vg Instr Groups Ltd Vacuum evaporation & deposition
DE102004006849B4 (de) * 2004-02-12 2011-06-01 Ald Vacuum Technologies Ag Vorrichtung zum Beschichten von Substraten
DE102010017896A1 (de) * 2010-04-21 2011-10-27 Ald Vacuum Technologies Gmbh Vorrichtung und Verfahren zum Beschichten von Substraten nach dem EB/PVD-Verfahren
EP2868768B1 (en) 2013-10-29 2021-06-16 Oerlikon Surface Solutions AG, Pfäffikon Shutter system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE895086C (de) * 1942-04-15 1953-10-29 Siemens Ag Verfahren zur Herstellung metallischer Niederschlaege durch thermische Verdampfung
DE882174C (de) * 1942-10-07 1953-07-06 Bosch Gmbh Robert Verfahren zum Verdampfen von Stoffen im Vakuum mittels Elektronenstrahlen
US2482329A (en) * 1946-05-27 1949-09-20 Rca Corp Apparatus for selective vapor coating
GB754102A (en) * 1951-06-22 1956-08-01 Edwards & Co London Ltd W Improvements in or relating to a method and apparatus for vapourising materials, forexample, metal in vacuum
CH311812A (de) * 1951-11-05 1955-12-15 Zeiss Carl Fa Aufdampfeinrichtung.
BE514927A (ja) * 1952-01-22
US2932588A (en) * 1955-07-06 1960-04-12 English Electric Valve Co Ltd Methods of manufacturing thin films of refractory dielectric materials
DE1072451B (de) * 1955-07-06 1960-06-02 English Electric Valve Company Limited, London Vorrichtung zur Herstellung von Überzügen durch Vakuumaufdampfen
DE1054802B (de) * 1956-03-05 1959-04-09 Westinghouse Electric Corp Verfahren zur Verdampfung von Stoffen, insbesondere zur Erzeugung der UEbergangszonen (junctions) von Transistoren
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof

Also Published As

Publication number Publication date
AT247097B (de) 1966-05-25
LU43540A1 (ja) 1963-06-11
US3227133A (en) 1966-01-04
CH414303A (de) 1966-05-31
BE630728A (ja) 1963-11-04
DK125169B (da) 1973-01-08
DE1298833B (de) 1969-07-03
GB979700A (en) 1965-01-06
NL291466A (ja)

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