SE0301144L - Metod för att framställa en anordning - Google Patents
Metod för att framställa en anordningInfo
- Publication number
- SE0301144L SE0301144L SE0301144A SE0301144A SE0301144L SE 0301144 L SE0301144 L SE 0301144L SE 0301144 A SE0301144 A SE 0301144A SE 0301144 A SE0301144 A SE 0301144A SE 0301144 L SE0301144 L SE 0301144L
- Authority
- SE
- Sweden
- Prior art keywords
- substrate
- membrane layer
- layer
- membrane
- sides
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/008—Manufacture of substrate-free structures separating the processed structure from a mother substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/724—Devices having flexible or movable element
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49007—Indicating transducer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49083—Heater type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49147—Assembling terminal to base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49789—Obtaining plural product pieces from unitary workpiece
- Y10T29/49798—Dividing sequentially from leading end, e.g., by cutting or breaking
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Disintegrating Or Milling (AREA)
- Catalysts (AREA)
- Glass Compositions (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Laminated Bodies (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0301144A SE526192C2 (sv) | 2003-04-17 | 2003-04-17 | Metod för att framställa en anordning |
PCT/SE2004/000561 WO2004092050A1 (en) | 2003-04-17 | 2004-04-08 | Method for producing a micromachined layered device |
AT04726696T ATE363454T1 (de) | 2003-04-17 | 2004-04-08 | Verfahren zur herstellung einer durch mikromaterialbearbeitung hergestellten geschichteten vorrichtung |
EP04726696A EP1620356B1 (en) | 2003-04-17 | 2004-04-08 | Method for producing a micromachined layered device |
JP2006508015A JP2006523540A (ja) | 2003-04-17 | 2004-04-08 | ミクロ機械加工された層状デバイスを作製するための方法 |
ES04726696T ES2287719T3 (es) | 2003-04-17 | 2004-04-08 | Procedimiento para la produccion de un dispositivo por capas micromecanizado. |
US10/553,447 US7322100B2 (en) | 2003-04-17 | 2004-04-08 | Method for producing a micromachined layered device |
DE602004006742T DE602004006742T2 (de) | 2003-04-17 | 2004-04-08 | Verfahren zur herstellung einer durch mikromaterialbearbeitung hergestellten geschichteten vorrichtung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0301144A SE526192C2 (sv) | 2003-04-17 | 2003-04-17 | Metod för att framställa en anordning |
Publications (3)
Publication Number | Publication Date |
---|---|
SE0301144D0 SE0301144D0 (sv) | 2003-04-17 |
SE0301144L true SE0301144L (sv) | 2004-10-18 |
SE526192C2 SE526192C2 (sv) | 2005-07-26 |
Family
ID=20291064
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE0301144A SE526192C2 (sv) | 2003-04-17 | 2003-04-17 | Metod för att framställa en anordning |
Country Status (8)
Country | Link |
---|---|
US (1) | US7322100B2 (sv) |
EP (1) | EP1620356B1 (sv) |
JP (1) | JP2006523540A (sv) |
AT (1) | ATE363454T1 (sv) |
DE (1) | DE602004006742T2 (sv) |
ES (1) | ES2287719T3 (sv) |
SE (1) | SE526192C2 (sv) |
WO (1) | WO2004092050A1 (sv) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004037128A1 (de) * | 2004-07-30 | 2006-03-23 | Robert Bosch Gmbh | Laserbearbeitung von mikromechanischen Strukturen |
DE102006017549A1 (de) * | 2006-04-13 | 2007-10-18 | Imi Intelligent Medical Implants Ag | Verfahren zur Herstellung von Implantatstrukturen zur Kontaktierung oder Elektrostimulation von lebenden Gewebezellen oder Nerven |
US9242073B2 (en) | 2006-08-18 | 2016-01-26 | Boston Scientific Scimed, Inc. | Electrically actuated annelid |
DE102012224284A1 (de) * | 2012-12-21 | 2014-06-26 | Heraeus Precious Metals Gmbh & Co. Kg | Dünne Metallmembran mit Träger |
US11615979B2 (en) * | 2019-12-18 | 2023-03-28 | Disco Corporation | Method of processing wafer |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0749460A (ja) * | 1993-08-06 | 1995-02-21 | Nippondenso Co Ltd | 可変焦点ミラーおよびその製造方法 |
SE513975C2 (sv) * | 1994-08-19 | 2000-12-04 | Telia Ab | Repeterare och metod för DECT-system |
SE9500849D0 (sv) * | 1995-03-10 | 1995-03-10 | Pharmacia Ab | Methods for the manufacturing of micromachined structures and micromachined structures manufactured using such methods |
JPH09293913A (ja) * | 1996-04-25 | 1997-11-11 | Casio Comput Co Ltd | 機能性高分子素子 |
JPH11121900A (ja) * | 1997-10-15 | 1999-04-30 | Sumitomo Electric Ind Ltd | 回路基板の製造方法 |
JPH11288863A (ja) * | 1998-04-01 | 1999-10-19 | Mitsubishi Electric Corp | X線マスクおよびその製造方法 |
JP3857526B2 (ja) * | 1999-03-31 | 2006-12-13 | シーメンス アクチエンゲゼルシヤフト | 無支持の微細構造体または肉薄の扁平部分またはダイアフラムを製造する方法および該方法により製造された無支持の微細構造体の使用法 |
AU2001261026A1 (en) | 2000-04-17 | 2001-10-30 | The Penn State Research Foundation | Deposited thin films and their use in separation and sarcrificial layer applications |
-
2003
- 2003-04-17 SE SE0301144A patent/SE526192C2/sv not_active IP Right Cessation
-
2004
- 2004-04-08 JP JP2006508015A patent/JP2006523540A/ja active Pending
- 2004-04-08 EP EP04726696A patent/EP1620356B1/en not_active Expired - Lifetime
- 2004-04-08 ES ES04726696T patent/ES2287719T3/es not_active Expired - Lifetime
- 2004-04-08 DE DE602004006742T patent/DE602004006742T2/de not_active Expired - Lifetime
- 2004-04-08 AT AT04726696T patent/ATE363454T1/de not_active IP Right Cessation
- 2004-04-08 US US10/553,447 patent/US7322100B2/en not_active Expired - Fee Related
- 2004-04-08 WO PCT/SE2004/000561 patent/WO2004092050A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
ES2287719T3 (es) | 2007-12-16 |
EP1620356B1 (en) | 2007-05-30 |
SE0301144D0 (sv) | 2003-04-17 |
US20070050969A1 (en) | 2007-03-08 |
ATE363454T1 (de) | 2007-06-15 |
EP1620356A1 (en) | 2006-02-01 |
DE602004006742T2 (de) | 2008-01-31 |
DE602004006742D1 (de) | 2007-07-12 |
JP2006523540A (ja) | 2006-10-19 |
WO2004092050A1 (en) | 2004-10-28 |
US7322100B2 (en) | 2008-01-29 |
SE526192C2 (sv) | 2005-07-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NUG | Patent has lapsed |