SE0102925D0 - Adhesive sacrificial bonding of spatial light modulators - Google Patents
Adhesive sacrificial bonding of spatial light modulatorsInfo
- Publication number
- SE0102925D0 SE0102925D0 SE0102925A SE0102925A SE0102925D0 SE 0102925 D0 SE0102925 D0 SE 0102925D0 SE 0102925 A SE0102925 A SE 0102925A SE 0102925 A SE0102925 A SE 0102925A SE 0102925 D0 SE0102925 D0 SE 0102925D0
- Authority
- SE
- Sweden
- Prior art keywords
- sacrificial substrate
- sacrificial
- spatial light
- light modulators
- support structure
- Prior art date
Links
- 239000000853 adhesive Substances 0.000 title 1
- 230000001070 adhesive effect Effects 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 7
- 239000000463 material Substances 0.000 abstract 2
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0081—Thermal properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/04—Networks or arrays of similar microstructural devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
- B81C1/00468—Releasing structures
- B81C1/00476—Releasing structures removing a sacrificial layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Thermal Sciences (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Integrated Circuits (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE0102925A SE523596C2 (sv) | 2001-08-31 | 2001-08-31 | Spatial ljusmodulator (SLM) och dess framställningsförfarande innefattande mikrospeglar av monokristallint material vilka är uppburna och sammankopplade av stödelement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE0102925A SE523596C2 (sv) | 2001-08-31 | 2001-08-31 | Spatial ljusmodulator (SLM) och dess framställningsförfarande innefattande mikrospeglar av monokristallint material vilka är uppburna och sammankopplade av stödelement |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| SE0102925D0 true SE0102925D0 (sv) | 2001-08-31 |
| SE0102925L SE0102925L (sv) | 2003-04-30 |
| SE523596C2 SE523596C2 (sv) | 2004-05-04 |
Family
ID=20285214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SE0102925A SE523596C2 (sv) | 2001-08-31 | 2001-08-31 | Spatial ljusmodulator (SLM) och dess framställningsförfarande innefattande mikrospeglar av monokristallint material vilka är uppburna och sammankopplade av stödelement |
Country Status (1)
| Country | Link |
|---|---|
| SE (1) | SE523596C2 (sv) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005002967B4 (de) * | 2005-01-21 | 2011-03-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Herstellen eines Bauelementes mit einem beweglichen Abschnitt |
-
2001
- 2001-08-31 SE SE0102925A patent/SE523596C2/sv not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| SE0102925L (sv) | 2003-04-30 |
| SE523596C2 (sv) | 2004-05-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| NUG | Patent has lapsed |