SA517382074B1 - غشاء موصل شفاف منخفض المقاومة وطريقة لتحضيره - Google Patents
غشاء موصل شفاف منخفض المقاومة وطريقة لتحضيره Download PDFInfo
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- SA517382074B1 SA517382074B1 SA517382074A SA517382074A SA517382074B1 SA 517382074 B1 SA517382074 B1 SA 517382074B1 SA 517382074 A SA517382074 A SA 517382074A SA 517382074 A SA517382074 A SA 517382074A SA 517382074 B1 SA517382074 B1 SA 517382074B1
- Authority
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- Saudi Arabia
- Prior art keywords
- layer
- film
- transparent conductive
- low
- conductive film
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 35
- 229910052751 metal Inorganic materials 0.000 claims abstract description 65
- 239000002184 metal Substances 0.000 claims abstract description 65
- 239000004005 microsphere Substances 0.000 claims abstract description 32
- 239000011148 porous material Substances 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 238000000151 deposition Methods 0.000 claims abstract description 21
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 86
- 239000011787 zinc oxide Substances 0.000 claims description 43
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 34
- 229910052709 silver Inorganic materials 0.000 claims description 32
- 239000004332 silver Substances 0.000 claims description 32
- 230000001788 irregular Effects 0.000 claims description 28
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 24
- 230000004888 barrier function Effects 0.000 claims description 20
- 230000008021 deposition Effects 0.000 claims description 16
- 230000008569 process Effects 0.000 claims description 16
- FMRLDPWIRHBCCC-UHFFFAOYSA-L Zinc carbonate Chemical compound [Zn+2].[O-]C([O-])=O FMRLDPWIRHBCCC-UHFFFAOYSA-L 0.000 claims description 14
- 229910052759 nickel Inorganic materials 0.000 claims description 13
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 239000010949 copper Substances 0.000 claims description 12
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 239000010936 titanium Substances 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 8
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 8
- 229910052500 inorganic mineral Inorganic materials 0.000 claims description 8
- 239000011707 mineral Substances 0.000 claims description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- 238000009826 distribution Methods 0.000 claims description 7
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 7
- 229910001887 tin oxide Inorganic materials 0.000 claims description 7
- 229910001316 Ag alloy Inorganic materials 0.000 claims description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 6
- 238000002360 preparation method Methods 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 229910003437 indium oxide Inorganic materials 0.000 claims description 5
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 4
- 229910052737 gold Inorganic materials 0.000 claims description 4
- 239000010931 gold Substances 0.000 claims description 4
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims description 3
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims description 2
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 2
- 230000004224 protection Effects 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 235000012239 silicon dioxide Nutrition 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 239000004408 titanium dioxide Substances 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 60
- 229910044991 metal oxide Inorganic materials 0.000 claims 10
- -1 nickel metal oxide Chemical class 0.000 claims 8
- 239000012788 optical film Substances 0.000 claims 2
- 241000196324 Embryophyta Species 0.000 claims 1
- DEFJQIDDEAULHB-IMJSIDKUSA-N L-alanyl-L-alanine Chemical compound C[C@H](N)C(=O)N[C@@H](C)C(O)=O DEFJQIDDEAULHB-IMJSIDKUSA-N 0.000 claims 1
- 241001175904 Labeo bata Species 0.000 claims 1
- 241000272168 Laridae Species 0.000 claims 1
- 241000876472 Umma Species 0.000 claims 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 1
- 108010056243 alanylalanine Proteins 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 239000012896 selective serotonin reuptake inhibitor Substances 0.000 claims 1
- 229940124834 selective serotonin reuptake inhibitor Drugs 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 239000011800 void material Substances 0.000 claims 1
- 229910052725 zinc Inorganic materials 0.000 claims 1
- 239000011701 zinc Substances 0.000 claims 1
- 238000003618 dip coating Methods 0.000 abstract description 3
- 230000005693 optoelectronics Effects 0.000 abstract description 2
- 235000014692 zinc oxide Nutrition 0.000 description 39
- 238000002834 transmittance Methods 0.000 description 15
- 239000000463 material Substances 0.000 description 8
- 235000010755 mineral Nutrition 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- 239000012528 membrane Substances 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 3
- 239000004926 polymethyl methacrylate Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 239000002042 Silver nanowire Substances 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 2
- FPIPGXGPPPQFEQ-OVSJKPMPSA-N all-trans-retinol Chemical compound OC\C=C(/C)\C=C\C=C(/C)\C=C\C1=C(C)CCCC1(C)C FPIPGXGPPPQFEQ-OVSJKPMPSA-N 0.000 description 2
- 238000000089 atomic force micrograph Methods 0.000 description 2
- 229910000423 chromium oxide Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000010410 dusting Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 230000003179 granulation Effects 0.000 description 2
- 238000005469 granulation Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000002070 nanowire Substances 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 238000005201 scrubbing Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 102100030931 Ladinin-1 Human genes 0.000 description 1
- 101710177601 Ladinin-1 Proteins 0.000 description 1
- 241000234435 Lilium Species 0.000 description 1
- NIPNSKYNPDTRPC-UHFFFAOYSA-N N-[2-oxo-2-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)ethyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 NIPNSKYNPDTRPC-UHFFFAOYSA-N 0.000 description 1
- 229910001260 Pt alloy Inorganic materials 0.000 description 1
- 101150107869 Sarg gene Proteins 0.000 description 1
- IHWJXGQYRBHUIF-UHFFFAOYSA-N [Ag].[Pt] Chemical group [Ag].[Pt] IHWJXGQYRBHUIF-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000011717 all-trans-retinol Substances 0.000 description 1
- 235000019169 all-trans-retinol Nutrition 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- ZNKMCMOJCDFGFT-UHFFFAOYSA-N gold titanium Chemical compound [Ti].[Au] ZNKMCMOJCDFGFT-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- VDDJZJLTGRNDEE-UHFFFAOYSA-N molybdenum;oxotin Chemical compound [Mo].[Sn]=O VDDJZJLTGRNDEE-UHFFFAOYSA-N 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000011120 plywood Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000004984 smart glass Substances 0.000 description 1
- SKRWFPLZQAAQSU-UHFFFAOYSA-N stibanylidynetin;hydrate Chemical compound O.[Sn].[Sb] SKRWFPLZQAAQSU-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 239000004557 technical material Substances 0.000 description 1
- 229910001258 titanium gold Inorganic materials 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical class [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510639806.XA CN105225728B (zh) | 2015-09-29 | 2015-09-29 | 一种低电阻透明导电薄膜及其制备方法 |
| PCT/CN2015/092377 WO2017054265A1 (zh) | 2015-09-29 | 2015-10-21 | 一种低电阻透明导电薄膜及其制备方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SA517382074B1 true SA517382074B1 (ar) | 2021-11-07 |
Family
ID=54994626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SA517382074A SA517382074B1 (ar) | 2015-09-29 | 2017-08-08 | غشاء موصل شفاف منخفض المقاومة وطريقة لتحضيره |
Country Status (4)
| Country | Link |
|---|---|
| CN (1) | CN105225728B (zh) |
| SA (1) | SA517382074B1 (zh) |
| TW (1) | TWI594886B (zh) |
| WO (1) | WO2017054265A1 (zh) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101778723B1 (ko) * | 2016-11-17 | 2017-09-25 | 한국에너지기술연구원 | Ｃｉｇｓ계 태양전지 셀의 제조방법 및 cigs계 태양전지 셀 |
| CN108206070B (zh) * | 2017-06-23 | 2019-10-29 | 中国科学院福建物质结构研究所 | 一种透明导电薄膜及采用晶界印刷法制备该薄膜的方法 |
| CN107275007B (zh) * | 2017-06-29 | 2019-11-29 | 华南理工大学 | 一种复合透明导电薄膜及其制备方法 |
| CN107910383B (zh) * | 2017-10-09 | 2021-01-12 | 华南师范大学 | 一种金属网状导电膜的制备方法 |
| CN108336175A (zh) * | 2018-01-04 | 2018-07-27 | 江苏理工学院 | 一种银纳米网增强的非晶硅太阳能电池及其制备方法 |
| CN109585582A (zh) * | 2018-12-06 | 2019-04-05 | 北京大学东莞光电研究院 | 一种用于太阳能发电的透明导电面板 |
| CN111574066A (zh) * | 2020-06-23 | 2020-08-25 | 中建材蚌埠玻璃工业设计研究院有限公司 | 一种快速加热的防病毒玻璃及其制备方法 |
| CN112713394A (zh) * | 2020-12-20 | 2021-04-27 | 英特睿达(山东)电子科技有限公司 | 混合透明天线 |
| CN114455857B (zh) * | 2022-02-23 | 2023-05-23 | 江苏铁锚玻璃股份有限公司 | 透明导电玻璃及其表面电阻降低方法 |
| CN114477786B (zh) * | 2022-02-23 | 2023-05-23 | 江苏铁锚玻璃股份有限公司 | 透明导电玻璃及其表面电阻升高方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW560240B (en) * | 1998-08-10 | 2003-11-01 | Sumitomo Bakelite Co | Transparent electromagnetic wave shield |
| JP3813034B2 (ja) * | 1999-05-18 | 2006-08-23 | 三井化学株式会社 | 光学フィルター |
| US7085444B2 (en) * | 2003-02-25 | 2006-08-01 | Eastman Kodak Company | Porous optical switch films |
| CN101577148B (zh) * | 2009-06-23 | 2012-11-07 | 中国乐凯胶片集团公司 | 一种透明导电膜及其制备方法 |
| SG178225A1 (en) * | 2009-08-03 | 2012-03-29 | 3M Innovative Properties Co | Process for forming optically clear conductive metal or metal alloy thin films and films made therefrom |
| CN102087884A (zh) * | 2009-12-08 | 2011-06-08 | 中国科学院福建物质结构研究所 | 基于有机聚合物和银纳米线的柔性透明导电薄膜及其制备方法 |
| CN102082186B (zh) * | 2010-10-29 | 2013-05-08 | 华南师范大学 | 电极及其制造方法 |
| CN102569432B (zh) * | 2010-12-17 | 2014-12-10 | 国家纳米科学中心 | 一种透明电极材料及其制备方法 |
| WO2012108068A1 (ja) * | 2011-02-07 | 2012-08-16 | ソニー株式会社 | 透明導電性素子、入力装置、電子機器および透明導電性素子作製用原盤 |
| CN103258956B (zh) * | 2013-03-21 | 2015-10-28 | 北京工业大学 | 一种二维岛状红外光谱等离子激元金属结构的制备方法 |
-
2015
- 2015-09-29 CN CN201510639806.XA patent/CN105225728B/zh active Active
- 2015-10-21 WO PCT/CN2015/092377 patent/WO2017054265A1/zh active Application Filing
- 2015-11-19 TW TW104138243A patent/TWI594886B/zh active
-
2017
- 2017-08-08 SA SA517382074A patent/SA517382074B1/ar unknown
Also Published As
| Publication number | Publication date |
|---|---|
| WO2017054265A1 (zh) | 2017-04-06 |
| CN105225728B (zh) | 2017-01-04 |
| CN105225728A (zh) | 2016-01-06 |
| TW201711843A (zh) | 2017-04-01 |
| TWI594886B (zh) | 2017-08-11 |
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