RU95110694A - Способ устранения локализованного разряда в области баллона безэлектродной лампы, безэлектродная лампа (варианты), способ предотвращения образования электрической дуги и способ работы лампы - Google Patents

Способ устранения локализованного разряда в области баллона безэлектродной лампы, безэлектродная лампа (варианты), способ предотвращения образования электрической дуги и способ работы лампы

Info

Publication number
RU95110694A
RU95110694A RU95110694/07A RU95110694A RU95110694A RU 95110694 A RU95110694 A RU 95110694A RU 95110694/07 A RU95110694/07 A RU 95110694/07A RU 95110694 A RU95110694 A RU 95110694A RU 95110694 A RU95110694 A RU 95110694A
Authority
RU
Russia
Prior art keywords
lamp
envelope
electrode
rotates
region
Prior art date
Application number
RU95110694/07A
Other languages
English (en)
Other versions
RU2143151C1 (ru
Inventor
Т.Долан Джеймс
Us]
Х.Вуд Чарльз
Камарехи Мохаммед
Е.Симпсон Джеймс
Тернер Брайан
А.Премислер Филип
Original Assignee
Фьюжн Системз Корпорейшн (US)
Фьюжн Системз Корпорейшн
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/046,671 external-priority patent/US5493184A/en
Application filed by Фьюжн Системз Корпорейшн (US), Фьюжн Системз Корпорейшн filed Critical Фьюжн Системз Корпорейшн (US)
Publication of RU95110694A publication Critical patent/RU95110694A/ru
Application granted granted Critical
Publication of RU2143151C1 publication Critical patent/RU2143151C1/ru

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/16—Circuit arrangements in which the lamp is fed by dc or by low-frequency ac, e.g. by 50 cycles/sec ac, or with network frequencies
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/025—Associated optical elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/30—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/54—Igniting arrangements, e.g. promoting ionisation for starting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
    • H05B41/14—Circuit arrangements
    • H05B41/24—Circuit arrangements in which the lamp is fed by high frequency ac, or with separate oscillator frequency

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Circuit Arrangements For Discharge Lamps (AREA)
  • Discharge Lamp (AREA)

Abstract

Баллон безэлектродной лампы вращается со скоростью, достаточной для устранения локализованных разрядов. Баллон коаксиально возбуждаемой безэлектродной лампы вращается таким образом, что различные области баллона находятся вблизи области сильного поля, создаваемого внутренним коаксиальным проводником, предотвращая тем самым образование дугового разряда. Баллон безэлектродной лампы вращается с высокой скоростью, достаточной для повышения производительности лампы и снижения требований к охлаждению. Баллон безэлектродной лампы имеет стенку уменьшенной толщины в той области баллона, в которой желательно сконденсировать наполнитель после выключения мощности, что обеспечивает более быстрый старт.

Claims (1)

  1. Баллон безэлектродной лампы вращается со скоростью, достаточной для устранения локализованных разрядов. Баллон коаксиально возбуждаемой безэлектродной лампы вращается таким образом, что различные области баллона находятся вблизи области сильного поля, создаваемого внутренним коаксиальным проводником, предотвращая тем самым образование дугового разряда. Баллон безэлектродной лампы вращается с высокой скоростью, достаточной для повышения производительности лампы и снижения требований к охлаждению. Баллон безэлектродной лампы имеет стенку уменьшенной толщины в той области баллона, в которой желательно сконденсировать наполнитель после выключения мощности, что обеспечивает более быстрый старт.
RU95110694/09A 1992-09-30 1993-09-30 Безэлектродная лампа (варианты) RU2143151C1 (ru)

Applications Claiming Priority (13)

Application Number Priority Date Filing Date Title
US95305692A 1992-09-30 1992-09-30
US07/953.056 1992-09-30
US97693892A 1992-11-18 1992-11-18
US07/976.938 1992-11-18
US4709093A 1993-04-16 1993-04-16
US08/046.671 1993-04-16
US08/047,090 1993-04-16
US08/046,671 US5493184A (en) 1990-10-25 1993-04-16 Electrodeless lamp with improved efficiency
US07/953,056 1993-04-16
US08/047.090 1993-04-16
US08/046,671 1993-04-16
US07/976,938 1993-04-16
PCT/US1993/009373 WO1994008439A1 (en) 1992-09-30 1993-09-30 Electrodeless lamp with bulb rotation

Publications (2)

Publication Number Publication Date
RU95110694A true RU95110694A (ru) 1997-06-27
RU2143151C1 RU2143151C1 (ru) 1999-12-20

Family

ID=27489085

Family Applications (1)

Application Number Title Priority Date Filing Date
RU95110694/09A RU2143151C1 (ru) 1992-09-30 1993-09-30 Безэлектродная лампа (варианты)

Country Status (11)

Country Link
EP (2) EP0663139B1 (ru)
JP (1) JPH08502381A (ru)
KR (1) KR950703844A (ru)
AT (1) ATE194748T1 (ru)
AU (2) AU685402B2 (ru)
BR (1) BR9307138A (ru)
CA (1) CA2144978A1 (ru)
DE (1) DE69329032T2 (ru)
HU (1) HU215880B (ru)
RU (1) RU2143151C1 (ru)
WO (1) WO1994008439A1 (ru)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001001448A1 (en) * 1999-06-25 2001-01-04 Jury Vladimirovich Korchagin Method and device for excitation and maintenance of a discharge in electrodeless lamp

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5834895A (en) * 1990-10-25 1998-11-10 Fusion Lighting, Inc. Visible lamp including selenium
AU689194B2 (en) * 1993-10-15 1998-03-26 Fusion Lighting, Inc. Electrodeless lamp with improved efficacy
US5448135A (en) * 1993-10-28 1995-09-05 Fusion Lighting, Inc. Apparatus for coupling electromagnetic radiation from a waveguide to an electrodeless lamp
US5767626A (en) * 1995-12-06 1998-06-16 Fusion Systems Corporation Electrodeless lamp starting/operation with sources at different frequencies
US5818167A (en) * 1996-02-01 1998-10-06 Osram Sylvania Inc. Electrodeless high intensity discharge lamp having a phosphorus fill
US6291936B1 (en) 1996-05-31 2001-09-18 Fusion Lighting, Inc. Discharge lamp with reflective jacket
US5903091A (en) 1996-05-31 1999-05-11 Fusion Lighting, Inc. Lamp method and apparatus using multiple reflections
US5838108A (en) * 1996-08-14 1998-11-17 Fusion Uv Systems, Inc. Method and apparatus for starting difficult to start electrodeless lamps using a field emission source
TW406280B (en) 1997-05-21 2000-09-21 Fusion Lighting Inc non-rotating electrodeless lamp containing molecular fill
US6605484B2 (en) * 2001-11-30 2003-08-12 Axcelis Technologies, Inc. Process for optically erasing charge buildup during fabrication of an integrated circuit
DE102004036827B4 (de) 2004-07-29 2009-11-26 Eastman Kodak Co. Mikrowellenheizvorrichtung
EP2175474A3 (en) 2008-10-09 2012-02-08 uv-technik Speziallampen GmbH Plasma light bulb and method for making a plasma light bulb
KR101241049B1 (ko) 2011-08-01 2013-03-15 주식회사 플라즈마트 플라즈마 발생 장치 및 플라즈마 발생 방법
KR101246191B1 (ko) 2011-10-13 2013-03-21 주식회사 윈텔 플라즈마 장치 및 기판 처리 장치
KR101332337B1 (ko) 2012-06-29 2013-11-22 태원전기산업 (주) 초고주파 발광 램프 장치
WO2015086258A1 (en) 2013-12-13 2015-06-18 Asml Netherlands B.V. Radiation source, metrology apparatus, lithographic system and device manufacturing method
US10206273B2 (en) 2017-01-18 2019-02-12 Phoenix Llc High power ion beam generator systems and methods

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3942058A (en) * 1975-04-21 1976-03-02 Gte Laboratories Incorporated Electrodeless light source having improved arc shaping capability
US4507587A (en) * 1982-05-24 1985-03-26 Fusion Systems Corporation Microwave generated electrodeless lamp for producing bright output
US4485332A (en) * 1982-05-24 1984-11-27 Fusion Systems Corporation Method & apparatus for cooling electrodeless lamps
JPS614153A (ja) * 1984-06-14 1986-01-10 フュージョン・システムズ・コーポレーション マイクロ波無電極光源装置用の無電極ランプ
US4954756A (en) * 1987-07-15 1990-09-04 Fusion Systems Corporation Method and apparatus for changing the emission characteristics of an electrodeless lamp
US4902935A (en) * 1988-06-29 1990-02-20 Fusion Systems Corporation Method and apparatus for evening out the temperature distribution of electrodeless lamp bulbs
US4887192A (en) * 1988-11-04 1989-12-12 Fusion Systems Corporation Electrodeless lamp having compound resonant structure
ATE151201T1 (de) * 1990-10-25 1997-04-15 Fusion Systems Corp Hochleistungslampe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001001448A1 (en) * 1999-06-25 2001-01-04 Jury Vladimirovich Korchagin Method and device for excitation and maintenance of a discharge in electrodeless lamp

Also Published As

Publication number Publication date
DE69329032D1 (de) 2000-08-17
ATE194748T1 (de) 2000-07-15
DE69329032T2 (de) 2001-03-22
HU215880B (hu) 1999-03-29
EP0942457A3 (en) 2001-04-04
EP0663139A1 (en) 1995-07-19
WO1994008439A1 (en) 1994-04-14
JPH08502381A (ja) 1996-03-12
AU704234B2 (en) 1999-04-15
HU9500854D0 (en) 1995-05-29
AU685402B2 (en) 1998-01-22
BR9307138A (pt) 1999-07-27
AU6193298A (en) 1998-07-02
AU5350894A (en) 1994-04-26
RU2143151C1 (ru) 1999-12-20
EP0942457A2 (en) 1999-09-15
HUT70733A (en) 1995-10-30
EP0663139A4 (en) 1997-03-19
EP0663139B1 (en) 2000-07-12
KR950703844A (ko) 1995-09-20
CA2144978A1 (en) 1994-04-14

Similar Documents

Publication Publication Date Title
RU95110694A (ru) Способ устранения локализованного разряда в области баллона безэлектродной лампы, безэлектродная лампа (варианты), способ предотвращения образования электрической дуги и способ работы лампы
US6062163A (en) Plasma initiating assembly
CN1106674C (zh) 金属卤化物放电灯
EP0885981A3 (de) Verfahren und Anlage zum Behandeln von Substraten mittels Ionen aus einer Niedervoltbogenentladung
JP2001508227A (ja) 始動困難な無電極ランプを始動させる方法及び装置
US8063564B2 (en) Starting aid for HID lamp
JPH1143766A (ja) 薄膜形成方法及び装置
US4745335A (en) Magnesium vapor discharge lamp
JP2001515265A (ja) 無電極ランプ放電を信頼性を持って点灯し且つ再点灯時間を減少させる方法及び装置
JPH076888A (ja) 無電極型高輝度放電ランプ用始動回路
US4195253A (en) Method of ageing a gas discharge lamp
JPS60223126A (ja) プラズマ処理装置
JPH0260048A (ja) 高光度放電ランプ用始動電極
CA1067952A (en) Method of ageing a gas discharge lamp
JPH06140196A (ja) パルス引出型の電子サイクロトロン共振イオン源
JPH0713174Y2 (ja) 無電極放電灯装置
RU2038644C1 (ru) Способ эксплуатации газоразрядных ламп
JPH04174957A (ja) 無電極放電ランプ
JP2731651B2 (ja) 無電極放電灯
TW202414507A (zh) 具有等離子體形成用觸發器的準分子燈組件
GB1122558A (en) Process for producing cf and ccif
RU2040068C1 (ru) Люминесцентная лампа
KR20240041605A (ko) 무전극 엑시머 램프
JPH06139978A (ja) パルス駆動型の電子サイクロトロン共振イオン源
SU654998A1 (ru) Способ объемного возбуждени газа

Legal Events

Date Code Title Description
MM4A The patent is invalid due to non-payment of fees

Effective date: 20031001