RU2416656C2 - Способ изготовления продукта переработки, включающего содержащий кремний сплав ниобия и тантала (варианты), лунки глубокой вытяжки и мишени ионного распыления, полученные из него - Google Patents

Способ изготовления продукта переработки, включающего содержащий кремний сплав ниобия и тантала (варианты), лунки глубокой вытяжки и мишени ионного распыления, полученные из него Download PDF

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Publication number
RU2416656C2
RU2416656C2 RU2005132957/02A RU2005132957A RU2416656C2 RU 2416656 C2 RU2416656 C2 RU 2416656C2 RU 2005132957/02 A RU2005132957/02 A RU 2005132957/02A RU 2005132957 A RU2005132957 A RU 2005132957A RU 2416656 C2 RU2416656 C2 RU 2416656C2
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RU
Russia
Prior art keywords
semi
finished product
niobium
annealing
silicon
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RU2005132957/02A
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English (en)
Russian (ru)
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RU2005132957A (ru
Inventor
Пол Р. ЭЙМОН (US)
Пол Р. ЭЙМОН
Керт Д. МОЗЕР (US)
Керт Д. МОЗЕР
Роберт А. ДОРВЕЛ (US)
Роберт А. ДОРВЕЛ
Райан БОЛТЕР (US)
Райан БОЛТЕР
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Х.К. Штарк Инк.
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    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22FCHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
    • C22F1/00Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
    • C22F1/16Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
    • C22F1/18High-melting or refractory metals or alloys based thereon
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C1/00Making non-ferrous alloys
    • C22C1/04Making non-ferrous alloys by powder metallurgy
    • C22C1/045Alloys based on refractory metals
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C27/00Alloys based on rhenium or a refractory metal not mentioned in groups C22C14/00 or C22C16/00
    • C22C27/02Alloys based on vanadium, niobium, or tantalum
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Forging (AREA)
  • Conductive Materials (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Catalysts (AREA)
  • Materials For Medical Uses (AREA)
  • Powder Metallurgy (AREA)
RU2005132957/02A 2004-10-27 2005-10-26 Способ изготовления продукта переработки, включающего содержащий кремний сплав ниобия и тантала (варианты), лунки глубокой вытяжки и мишени ионного распыления, полученные из него RU2416656C2 (ru)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/974,519 US7666243B2 (en) 2004-10-27 2004-10-27 Fine grain niobium sheet via ingot metallurgy
US10/974.519 2004-10-27

Publications (2)

Publication Number Publication Date
RU2005132957A RU2005132957A (ru) 2007-05-10
RU2416656C2 true RU2416656C2 (ru) 2011-04-20

Family

ID=35432842

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2005132957/02A RU2416656C2 (ru) 2004-10-27 2005-10-26 Способ изготовления продукта переработки, включающего содержащий кремний сплав ниобия и тантала (варианты), лунки глубокой вытяжки и мишени ионного распыления, полученные из него

Country Status (12)

Country Link
US (1) US7666243B2 (enExample)
EP (1) EP1652945B1 (enExample)
JP (1) JP5382977B2 (enExample)
CN (1) CN1766143A (enExample)
AT (1) ATE385261T1 (enExample)
BR (1) BRPI0505475A (enExample)
CA (1) CA2524430A1 (enExample)
DE (1) DE602005004584T2 (enExample)
MX (1) MXPA05011491A (enExample)
NO (1) NO20054942L (enExample)
RU (1) RU2416656C2 (enExample)
ZA (1) ZA200508600B (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2595084C1 (ru) * 2015-03-11 2016-08-20 Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт авиационных материалов" (ФГУП "ВИАМ") Способ получения жаропрочного сплава на основе ниобиевой матрицы с интерметаллидным упрочнением
RU2618038C2 (ru) * 2015-10-13 2017-05-02 Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт авиационных материалов" (ФГУП "ВИАМ") Способ получения жаропрочного сплава на основе ниобия
RU2680321C1 (ru) * 2018-01-31 2019-02-19 Акционерное Общество "Форт" Способ получения полуфабриката из сплава на основе ниобия

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7666243B2 (en) 2004-10-27 2010-02-23 H.C. Starck Inc. Fine grain niobium sheet via ingot metallurgy
US20070044873A1 (en) * 2005-08-31 2007-03-01 H. C. Starck Inc. Fine grain niobium sheet via ingot metallurgy
JP4947384B2 (ja) * 2008-08-07 2012-06-06 大学共同利用機関法人 高エネルギー加速器研究機構 超伝導高周波加速空洞の製造方法
CN103014386B (zh) * 2012-12-10 2014-07-09 西安诺博尔稀贵金属材料有限公司 一种铌钨钼锆合金铸锭的制备方法
EP3489373A1 (de) * 2017-11-28 2019-05-29 Heraeus Deutschland GmbH & Co. KG Verfahren zur schmelzmetallurgischen darstellung der intermetallischen verbindung nb3sn

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GB759859A (en) * 1953-10-08 1956-10-24 Aluminium Lab Ltd Process for deep-drawing blanks
US3933474A (en) * 1974-03-27 1976-01-20 Norton Company Leech alloying
RU2100467C1 (ru) * 1990-06-06 1997-12-27 Кабот Корпорейшн Изделие из сплава на основе тугоплавкого металла и проволока из сплава на основе тантала
US5846287A (en) * 1993-08-05 1998-12-08 Cabot Corporation Consumable electrode method for forming micro-alloyed products
RU2228382C2 (ru) * 1998-05-22 2004-05-10 Кабот Корпорейшн Тантал-кремниевый сплав, изделия, содержащие их, и способ получения сплавов
WO2004074530A2 (en) * 2003-02-13 2004-09-02 Cabot Corporation Method of forming metal blanks for sputtering targets

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US3269826A (en) * 1963-10-08 1966-08-30 Du Pont Compaction of finely divided metals
US3565602A (en) * 1968-05-21 1971-02-23 Kobe Steel Ltd Method of producing an alloy from high melting temperature reactive metals
US5242481A (en) 1989-06-26 1993-09-07 Cabot Corporation Method of making powders and products of tantalum and niobium
US5171379A (en) * 1991-05-15 1992-12-15 Cabot Corporation Tantalum base alloys
US5498186A (en) 1994-10-06 1996-03-12 General Electric Company Method of making an improved target/stem connection for x-ray tube anode assemblies
US5699401A (en) 1996-10-15 1997-12-16 General Electric Company Anode assembly for use in x-ray tubes, and related articles of manufacture
US6004368A (en) 1998-02-09 1999-12-21 Hitchiner Manufacturing Co., Inc. Melting of reactive metallic materials
US6348113B1 (en) 1998-11-25 2002-02-19 Cabot Corporation High purity tantalum, products containing the same, and methods of making the same
US6334912B1 (en) 1998-12-31 2002-01-01 General Electric Company Thermomechanical method for producing superalloys with increased strength and thermal stability
WO2001096620A2 (en) 2000-05-22 2001-12-20 Cabot Corporation High purity niobium and products containing the same, and methods of making the same
CN1257998C (zh) 2001-01-11 2006-05-31 卡伯特公司 钽和铌的坯料及其制造方法
ATE339532T1 (de) 2001-02-20 2006-10-15 Starck H C Inc Platten aus refraktärem metall mit einheitlicher textur und verfahren zu ihrer herstellung
US20030019106A1 (en) 2001-04-22 2003-01-30 Diamicron, Inc. Methods for making bearings, races and components thereof having diamond and other superhard surfaces
JP4928706B2 (ja) * 2002-12-03 2012-05-09 株式会社東芝 光学薄膜形成用Nbスパッタリングターゲットの製造方法
US7666243B2 (en) 2004-10-27 2010-02-23 H.C. Starck Inc. Fine grain niobium sheet via ingot metallurgy
US20070044873A1 (en) 2005-08-31 2007-03-01 H. C. Starck Inc. Fine grain niobium sheet via ingot metallurgy

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB759859A (en) * 1953-10-08 1956-10-24 Aluminium Lab Ltd Process for deep-drawing blanks
US3933474A (en) * 1974-03-27 1976-01-20 Norton Company Leech alloying
RU2100467C1 (ru) * 1990-06-06 1997-12-27 Кабот Корпорейшн Изделие из сплава на основе тугоплавкого металла и проволока из сплава на основе тантала
US5846287A (en) * 1993-08-05 1998-12-08 Cabot Corporation Consumable electrode method for forming micro-alloyed products
RU2228382C2 (ru) * 1998-05-22 2004-05-10 Кабот Корпорейшн Тантал-кремниевый сплав, изделия, содержащие их, и способ получения сплавов
WO2004074530A2 (en) * 2003-02-13 2004-09-02 Cabot Corporation Method of forming metal blanks for sputtering targets

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2595084C1 (ru) * 2015-03-11 2016-08-20 Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт авиационных материалов" (ФГУП "ВИАМ") Способ получения жаропрочного сплава на основе ниобиевой матрицы с интерметаллидным упрочнением
RU2618038C2 (ru) * 2015-10-13 2017-05-02 Федеральное государственное унитарное предприятие "Всероссийский научно-исследовательский институт авиационных материалов" (ФГУП "ВИАМ") Способ получения жаропрочного сплава на основе ниобия
RU2680321C1 (ru) * 2018-01-31 2019-02-19 Акционерное Общество "Форт" Способ получения полуфабриката из сплава на основе ниобия

Also Published As

Publication number Publication date
EP1652945B1 (en) 2008-01-30
JP5382977B2 (ja) 2014-01-08
US7666243B2 (en) 2010-02-23
RU2005132957A (ru) 2007-05-10
CA2524430A1 (en) 2006-04-27
ATE385261T1 (de) 2008-02-15
MXPA05011491A (es) 2006-07-10
NO20054942L (no) 2006-04-28
EP1652945A1 (en) 2006-05-03
CN1766143A (zh) 2006-05-03
JP2006124836A (ja) 2006-05-18
DE602005004584T2 (de) 2009-07-23
US20060086438A1 (en) 2006-04-27
ZA200508600B (en) 2006-12-27
NO20054942D0 (no) 2005-10-25
DE602005004584D1 (de) 2008-03-20
BRPI0505475A (pt) 2007-08-07

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MM4A The patent is invalid due to non-payment of fees

Effective date: 20111027