RU2144472C1 - Способ образования толстопленочного слоя в микроинжекционном устройстве - Google Patents
Способ образования толстопленочного слоя в микроинжекционном устройстве Download PDFInfo
- Publication number
- RU2144472C1 RU2144472C1 RU98119888A RU98119888A RU2144472C1 RU 2144472 C1 RU2144472 C1 RU 2144472C1 RU 98119888 A RU98119888 A RU 98119888A RU 98119888 A RU98119888 A RU 98119888A RU 2144472 C1 RU2144472 C1 RU 2144472C1
- Authority
- RU
- Russia
- Prior art keywords
- organic matter
- film layer
- liquid organic
- layer
- substrate
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 35
- 238000000520 microinjection Methods 0.000 title claims description 16
- 239000010408 film Substances 0.000 claims abstract description 83
- 239000010409 thin film Substances 0.000 claims abstract description 29
- 239000000126 substance Substances 0.000 claims abstract description 17
- 239000007788 liquid Substances 0.000 claims description 65
- 239000005416 organic matter Substances 0.000 claims description 55
- 239000000758 substrate Substances 0.000 claims description 38
- 238000010438 heat treatment Methods 0.000 claims description 16
- 230000001681 protective effect Effects 0.000 claims description 11
- 239000004642 Polyimide Substances 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 7
- 229920001721 polyimide Polymers 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims 1
- 238000007639 printing Methods 0.000 abstract description 8
- 239000011248 coating agent Substances 0.000 abstract description 7
- 230000015572 biosynthetic process Effects 0.000 abstract description 5
- 238000000576 coating method Methods 0.000 abstract description 5
- 238000007669 thermal treatment Methods 0.000 abstract 3
- 239000010410 layer Substances 0.000 description 105
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000003973 paint Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000007641 inkjet printing Methods 0.000 description 4
- 239000011368 organic material Substances 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 230000003203 everyday effect Effects 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU98119888A RU2144472C1 (ru) | 1998-11-03 | 1998-11-03 | Способ образования толстопленочного слоя в микроинжекционном устройстве |
| KR1019990007326A KR20000034821A (ko) | 1998-11-03 | 1999-03-05 | 마이크로 인젝팅 디바이스의 후막층 형성방법 |
| CN99126009A CN1253042A (zh) | 1998-11-03 | 1999-11-03 | 用于形成微型喷射装置的厚薄膜层的方法 |
| EP99308721A EP0999057A3 (fr) | 1998-11-03 | 1999-11-03 | Procédé de formation d'une couche à film épais pour micro-dispositif d'injection |
| JP11314410A JP2000141670A (ja) | 1998-11-03 | 1999-11-04 | マイクロインジェクティングデバイスの厚膜層形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| RU98119888A RU2144472C1 (ru) | 1998-11-03 | 1998-11-03 | Способ образования толстопленочного слоя в микроинжекционном устройстве |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| RU2144472C1 true RU2144472C1 (ru) | 2000-01-20 |
Family
ID=20211920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU98119888A RU2144472C1 (ru) | 1998-11-03 | 1998-11-03 | Способ образования толстопленочного слоя в микроинжекционном устройстве |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0999057A3 (fr) |
| JP (1) | JP2000141670A (fr) |
| KR (1) | KR20000034821A (fr) |
| CN (1) | CN1253042A (fr) |
| RU (1) | RU2144472C1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2692373C1 (ru) * | 2018-08-03 | 2019-06-24 | Акционерное общество "Российская корпорация ракетно-космического приборостроения и информационных систем" (АО "Российские космические системы") | Способ получения диэлектрического слоя на основе полимерного покрытия в изделиях микроэлектроники |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009283593A (ja) * | 2008-05-21 | 2009-12-03 | Seiko Epson Corp | 半導体装置の製造方法 |
| JP6964975B2 (ja) * | 2016-01-08 | 2021-11-10 | キヤノン株式会社 | 液体吐出ヘッドおよび液体吐出装置 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6053675B2 (ja) * | 1978-09-20 | 1985-11-27 | 富士写真フイルム株式会社 | スピンコ−テイング方法 |
| US4490728A (en) | 1981-08-14 | 1984-12-25 | Hewlett-Packard Company | Thermal ink jet printer |
| US4809428A (en) | 1987-12-10 | 1989-03-07 | Hewlett-Packard Company | Thin film device for an ink jet printhead and process for the manufacturing same |
| US5682187A (en) * | 1988-10-31 | 1997-10-28 | Canon Kabushiki Kaisha | Method for manufacturing an ink jet head having a treated surface, ink jet head made thereby, and ink jet apparatus having such head |
| US5140345A (en) | 1989-03-01 | 1992-08-18 | Canon Kabushiki Kaisha | Method of manufacturing a substrate for a liquid jet recording head and substrate manufactured by the method |
| US5420627A (en) | 1992-04-02 | 1995-05-30 | Hewlett-Packard Company | Inkjet printhead |
| US5274400A (en) | 1992-04-28 | 1993-12-28 | Hewlett-Packard Company | Ink path geometry for high temperature operation of ink-jet printheads |
| US5450108A (en) * | 1993-09-27 | 1995-09-12 | Xerox Corporation | Ink jet printhead which avoids effects of unwanted formations developed during fabrication |
-
1998
- 1998-11-03 RU RU98119888A patent/RU2144472C1/ru active
-
1999
- 1999-03-05 KR KR1019990007326A patent/KR20000034821A/ko not_active Application Discontinuation
- 1999-11-03 CN CN99126009A patent/CN1253042A/zh active Pending
- 1999-11-03 EP EP99308721A patent/EP0999057A3/fr not_active Withdrawn
- 1999-11-04 JP JP11314410A patent/JP2000141670A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2692373C1 (ru) * | 2018-08-03 | 2019-06-24 | Акционерное общество "Российская корпорация ракетно-космического приборостроения и информационных систем" (АО "Российские космические системы") | Способ получения диэлектрического слоя на основе полимерного покрытия в изделиях микроэлектроники |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1253042A (zh) | 2000-05-17 |
| JP2000141670A (ja) | 2000-05-23 |
| KR20000034821A (ko) | 2000-06-26 |
| EP0999057A3 (fr) | 2000-11-29 |
| EP0999057A2 (fr) | 2000-05-10 |
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