EP0999057A3 - Procédé de formation d'une couche à film épais pour micro-dispositif d'injection - Google Patents

Procédé de formation d'une couche à film épais pour micro-dispositif d'injection Download PDF

Info

Publication number
EP0999057A3
EP0999057A3 EP99308721A EP99308721A EP0999057A3 EP 0999057 A3 EP0999057 A3 EP 0999057A3 EP 99308721 A EP99308721 A EP 99308721A EP 99308721 A EP99308721 A EP 99308721A EP 0999057 A3 EP0999057 A3 EP 0999057A3
Authority
EP
European Patent Office
Prior art keywords
film layer
thick film
injecting device
micro injecting
forming thick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99308721A
Other languages
German (de)
English (en)
Other versions
EP0999057A2 (fr
Inventor
Boris Nikolaevich Dunaev
Byung-Sun Ahn
Andrey Aleksandrovich Zukov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of EP0999057A2 publication Critical patent/EP0999057A2/fr
Publication of EP0999057A3 publication Critical patent/EP0999057A3/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Formation Of Insulating Films (AREA)
EP99308721A 1998-11-03 1999-11-03 Procédé de formation d'une couche à film épais pour micro-dispositif d'injection Withdrawn EP0999057A3 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
RU98119888 1998-11-03
RU98119888A RU2144472C1 (ru) 1998-11-03 1998-11-03 Способ образования толстопленочного слоя в микроинжекционном устройстве

Publications (2)

Publication Number Publication Date
EP0999057A2 EP0999057A2 (fr) 2000-05-10
EP0999057A3 true EP0999057A3 (fr) 2000-11-29

Family

ID=20211920

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99308721A Withdrawn EP0999057A3 (fr) 1998-11-03 1999-11-03 Procédé de formation d'une couche à film épais pour micro-dispositif d'injection

Country Status (5)

Country Link
EP (1) EP0999057A3 (fr)
JP (1) JP2000141670A (fr)
KR (1) KR20000034821A (fr)
CN (1) CN1253042A (fr)
RU (1) RU2144472C1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009283593A (ja) * 2008-05-21 2009-12-03 Seiko Epson Corp 半導体装置の製造方法
JP6964975B2 (ja) * 2016-01-08 2021-11-10 キヤノン株式会社 液体吐出ヘッドおよび液体吐出装置
RU2692373C1 (ru) * 2018-08-03 2019-06-24 Акционерное общество "Российская корпорация ракетно-космического приборостроения и информационных систем" (АО "Российские космические системы") Способ получения диэлектрического слоя на основе полимерного покрытия в изделиях микроэлектроники

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4267212A (en) * 1978-09-20 1981-05-12 Fuji Photo Film Co., Ltd. Spin coating process
US5450108A (en) * 1993-09-27 1995-09-12 Xerox Corporation Ink jet printhead which avoids effects of unwanted formations developed during fabrication
US5682187A (en) * 1988-10-31 1997-10-28 Canon Kabushiki Kaisha Method for manufacturing an ink jet head having a treated surface, ink jet head made thereby, and ink jet apparatus having such head

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4490728A (en) 1981-08-14 1984-12-25 Hewlett-Packard Company Thermal ink jet printer
US4809428A (en) 1987-12-10 1989-03-07 Hewlett-Packard Company Thin film device for an ink jet printhead and process for the manufacturing same
US5140345A (en) 1989-03-01 1992-08-18 Canon Kabushiki Kaisha Method of manufacturing a substrate for a liquid jet recording head and substrate manufactured by the method
US5420627A (en) 1992-04-02 1995-05-30 Hewlett-Packard Company Inkjet printhead
US5274400A (en) 1992-04-28 1993-12-28 Hewlett-Packard Company Ink path geometry for high temperature operation of ink-jet printheads

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4267212A (en) * 1978-09-20 1981-05-12 Fuji Photo Film Co., Ltd. Spin coating process
US5682187A (en) * 1988-10-31 1997-10-28 Canon Kabushiki Kaisha Method for manufacturing an ink jet head having a treated surface, ink jet head made thereby, and ink jet apparatus having such head
US5450108A (en) * 1993-09-27 1995-09-12 Xerox Corporation Ink jet printhead which avoids effects of unwanted formations developed during fabrication

Also Published As

Publication number Publication date
CN1253042A (zh) 2000-05-17
RU2144472C1 (ru) 2000-01-20
JP2000141670A (ja) 2000-05-23
KR20000034821A (ko) 2000-06-26
EP0999057A2 (fr) 2000-05-10

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