RU2020125067A - Солнцезащитные покрытия и способы формирования солнцезащитных покрытий - Google Patents
Солнцезащитные покрытия и способы формирования солнцезащитных покрытий Download PDFInfo
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- RU2020125067A RU2020125067A RU2020125067A RU2020125067A RU2020125067A RU 2020125067 A RU2020125067 A RU 2020125067A RU 2020125067 A RU2020125067 A RU 2020125067A RU 2020125067 A RU2020125067 A RU 2020125067A RU 2020125067 A RU2020125067 A RU 2020125067A
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- Prior art keywords
- formed over
- metal layer
- layer formed
- nitride film
- silicon nitride
- Prior art date
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- 239000011253 protective coating Substances 0.000 title 2
- 229910052751 metal Inorganic materials 0.000 claims 33
- 239000002184 metal Substances 0.000 claims 33
- 229910052581 Si3N4 Inorganic materials 0.000 claims 13
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 13
- 239000011248 coating agent Substances 0.000 claims 10
- 238000000576 coating method Methods 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- 229910052782 aluminium Inorganic materials 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 4
- 229910045601 alloy Inorganic materials 0.000 claims 3
- 239000000956 alloy Substances 0.000 claims 3
- 239000000788 chromium alloy Substances 0.000 claims 3
- 239000000203 mixture Substances 0.000 claims 3
- 229910000623 nickel–chromium alloy Inorganic materials 0.000 claims 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- 229910000676 Si alloy Inorganic materials 0.000 claims 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 2
- 239000011651 chromium Substances 0.000 claims 2
- 238000005253 cladding Methods 0.000 claims 2
- 239000010941 cobalt Substances 0.000 claims 2
- 229910017052 cobalt Inorganic materials 0.000 claims 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 239000010703 silicon Substances 0.000 claims 2
- 239000000377 silicon dioxide Substances 0.000 claims 2
- 235000012239 silicon dioxide Nutrition 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- 229910052726 zirconium Inorganic materials 0.000 claims 2
- 229910000684 Cobalt-chrome Inorganic materials 0.000 claims 1
- WAIPAZQMEIHHTJ-UHFFFAOYSA-N [Cr].[Co] Chemical compound [Cr].[Co] WAIPAZQMEIHHTJ-UHFFFAOYSA-N 0.000 claims 1
- 239000010952 cobalt-chrome Substances 0.000 claims 1
- 230000005670 electromagnetic radiation Effects 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 229940100890 silver compound Drugs 0.000 claims 1
- 150000003379 silver compounds Chemical class 0.000 claims 1
Classifications
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
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- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
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- G02B5/003—Light absorbing elements
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- C—CHEMISTRY; METALLURGY
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
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- C—CHEMISTRY; METALLURGY
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C—CHEMISTRY; METALLURGY
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
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- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
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- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
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- C—CHEMISTRY; METALLURGY
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
- G02B5/282—Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
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- Physical Vapour Deposition (AREA)
Claims (13)
1. Изделие с нанесенным покрытием, включающее: подложку и покрытие, нанесенное поверх по меньшей мере части подложки, при этом покрытие включает первый диэлектрический слой, сформированный поверх по меньшей мере части подложки; первый металлический слой, сформированный поверх по меньшей мере части первого диэлектрического слоя; второй диэлектрический слой, сформированный поверх по меньшей мере части первого металлического слоя; второй металлический слой, сформированный поверх по меньшей мере части второго диэлектрического слоя; и третий диэлектрический слой, сформированный поверх по меньшей мере части второго металлического слоя, причем по меньшей мере один из металлических слоев сформирован из материала, содержащего одно или несколько соединений серебра, легированных по меньшей мере железом, причем по меньшей мере один из металлических слоев является прерывистым металлическим слоем.
2. Изделие с нанесенным покрытием по п. 1, в котором по меньшей мере один из металлических слоев является непрерывным металлическим слоем.
3. Изделие с нанесенным покрытием по п. 1 или 2, дополнительно включающее третий металлический слой, сформированный поверх по меньшей мере части третьего диэлектрического слоя, и четвертый диэлектрический слой, сформированный поверх по меньшей мере части третьего металлического слоя.
4. Изделие с нанесенным покрытием по любому из пп. 1 – 3, дополнительно включающее по меньшей мере один грунтовочный слой, сформированный поверх по меньшей мере одного из металлических слоев.
5. Изделие с нанесенным покрытием по любому из пп. 1 – 4, в котором подложка представляет собой стекло.
6. Изделие с нанесенным покрытием, включающее: подложку и покрытие, нанесенное поверх по меньшей мере части подложки, при этом покрытие включает один или несколько металлических слоев и один или несколько диэлектрических слоев, причем по меньшей мере один из диэлектрических слоев включает оболочку, содержащую первую пленку из нитрида кремния, металлический слой, сформированный поверх по меньшей мере части первой пленки из нитрида кремния, и вторую пленку из нитрида кремния, сформированную поверх по меньшей мере части металлического слоя, причем по меньшей мере один из металлических слоев является прерывистым металлическим слоем.
7. Изделие с нанесенным покрытием по п. 6, в котором металлический слой, сформированный поверх по меньшей мере части первой пленки из нитрида кремния, содержит материал, который поглощает по меньшей мере часть электромагнитного излучения, проходящего через покрытие.
8. Изделие с нанесенным покрытием по п. 6 или 7, в котором металлический слой, сформированный поверх по меньшей мере части первой пленки из нитрида кремния, содержит титан, кремний, диоксид кремния, никель-хромовые сплавы, цирконий, алюминий, сплавы кремния и алюминия, сплавы, содержащие кобальт и хром, или их смеси.
9. Изделие с нанесенным покрытием по п. 6 или 7, в котором металлический слой, сформированный поверх по меньшей мере части первой пленки из нитрида кремния, содержит никель-хромовые сплавы, сплавы, содержащие кобальт и хром, или их смеси.
10. Изделие с нанесенным покрытием по любому из пп. 6 – 9, дополнительно включающее облицовочное покрытие, причем указанное облицовочное покрытие сформировано из оболочки, содержащей первую пленку из нитрида кремния, металлический слой, сформированный поверх по меньшей мере части первой пленки из нитрида кремния, и вторую пленку из нитрида кремния, сформированную поверх по меньшей мере части металлического слоя.
11. Изделие с нанесенным покрытием, включающее: подложку и покрытие, нанесенное поверх по меньшей мере части подложки, при этом покрытие включает: первый диэлектрический слой, сформированный поверх по меньшей мере части подложки; первый металлический слой, сформированный поверх по меньшей мере части первого диэлектрического слоя; второй диэлектрический слой, сформированный поверх по меньшей мере части первого металлического слоя; второй металлический слой, сформированный поверх по меньшей мере части второго диэлектрического слоя; третий диэлектрический слой, сформированный поверх по меньшей мере части второго металлического слоя, и облицовочное покрытие, сформированное поверх по меньшей мере части третьего диэлектрического слоя, причем по меньшей мере один представитель, выбранный из диэлектрических слоев и/или облицовочного покрытия, включает оболочку, содержащую первую пленку из нитрида кремния, металлический слой, сформированный поверх по меньшей мере части первой пленки из нитрида кремния, и вторую пленку из нитрида кремния, сформированную поверх по меньшей мере части металлического слоя, причем по меньшей мере один из металлических слоев является прерывистым металлическим слоем.
12. Изделие с нанесенным покрытием по п. 11, дополнительно включающее третий металлический слой, сформированный поверх по меньшей мере части третьего диэлектрического слоя, и четвертый диэлектрический слой, сформированный поверх по меньшей мере части третьего металлического слоя, при этом облицовочное покрытие сформировано поверх по меньшей мере части четвертого диэлектрического слоя.
13. Изделие с нанесенным покрытием по п. 11 или 12, в котором металлический слой, сформированный поверх по меньшей мере части первой пленки из нитрида кремния, содержит титан, кремний, диоксид кремния, никель-хромовые сплавы, цирконий, алюминий, сплавы кремния и алюминия, сплавы, содержащие кобальт и хром, или их смеси.
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| US16/232,446 | 2018-12-26 | ||
| PCT/US2018/067605 WO2019133663A1 (en) | 2017-12-29 | 2018-12-27 | Solar control coatings and methods of forming solar control coatings |
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| CN110499494A (zh) * | 2019-09-05 | 2019-11-26 | 西安交通大学 | 一种以Zr为基底的Cr/Al单层膜及其制备方法 |
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-
2018
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- 2018-12-27 CN CN202310773499.9A patent/CN116988062A/zh active Pending
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- 2018-12-27 JP JP2020535954A patent/JP7369696B2/ja active Active
- 2018-12-27 RU RU2020125067A patent/RU2768915C2/ru active
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- 2018-12-27 CA CA3087185A patent/CA3087185A1/en active Pending
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| MY195020A (en) | 2023-01-03 |
| AU2018395244B2 (en) | 2023-10-19 |
| RU2020125067A3 (ru) | 2022-01-31 |
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| US20190204480A1 (en) | 2019-07-04 |
| CA3087185A1 (en) | 2019-07-04 |
| AU2018395244A1 (en) | 2020-07-23 |
| WO2019133663A1 (en) | 2019-07-04 |
| US20210141127A1 (en) | 2021-05-13 |
| JP7369696B2 (ja) | 2023-10-26 |
| RU2768915C2 (ru) | 2022-03-25 |
| US10921495B2 (en) | 2021-02-16 |
| JP2021508616A (ja) | 2021-03-11 |
| AU2024200132A1 (en) | 2024-01-25 |
| SG11202006209PA (en) | 2020-07-29 |
| CO2020009055A2 (es) | 2020-10-30 |
| CN112041282B (zh) | 2023-07-18 |
| MX2020006894A (es) | 2020-11-12 |
| CN116988062A (zh) | 2023-11-03 |
| EP3732142A1 (en) | 2020-11-04 |
| PH12020500571A1 (en) | 2021-05-17 |
| CN112041282A (zh) | 2020-12-04 |
| BR112020013256A2 (pt) | 2020-12-01 |
| KR102632235B1 (ko) | 2024-02-01 |
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