RU2018104696A - Материал, снабженный системой тонких слоев с термическими свойствами - Google Patents
Материал, снабженный системой тонких слоев с термическими свойствами Download PDFInfo
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- RU2018104696A RU2018104696A RU2018104696A RU2018104696A RU2018104696A RU 2018104696 A RU2018104696 A RU 2018104696A RU 2018104696 A RU2018104696 A RU 2018104696A RU 2018104696 A RU2018104696 A RU 2018104696A RU 2018104696 A RU2018104696 A RU 2018104696A
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- layer
- dielectric
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- 239000000463 material Substances 0.000 title claims 14
- 239000010410 layer Substances 0.000 claims 49
- 238000000576 coating method Methods 0.000 claims 22
- 239000011248 coating agent Substances 0.000 claims 17
- 229910052751 metal Inorganic materials 0.000 claims 11
- 239000002184 metal Substances 0.000 claims 11
- 230000003287 optical effect Effects 0.000 claims 8
- 230000000903 blocking effect Effects 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 7
- 239000002346 layers by function Substances 0.000 claims 6
- 230000000087 stabilizing effect Effects 0.000 claims 5
- 230000004888 barrier function Effects 0.000 claims 4
- 239000011521 glass Substances 0.000 claims 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 2
- 239000011651 chromium Substances 0.000 claims 2
- 238000009499 grossing Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000010955 niobium Substances 0.000 claims 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 2
- 239000010936 titanium Substances 0.000 claims 2
- 229910052726 zirconium Inorganic materials 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims 1
- 229910044991 metal oxide Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical class 0.000 claims 1
- 229910001120 nichrome Inorganic materials 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 239000011241 protective layer Substances 0.000 claims 1
- 229910052709 silver Inorganic materials 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 230000006641 stabilisation Effects 0.000 claims 1
- 238000011105 stabilization Methods 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
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- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
- B32B7/023—Optical properties
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/225—Nitrides
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- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
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- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
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- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3642—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating containing a metal layer
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
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- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3668—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having electrical properties
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3681—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating being used in glazing, e.g. windows or windscreens
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- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3689—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one oxide layer being obtained by oxidation of a metallic layer
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C03C2217/00—Coatings on glass
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- C03C2217/216—ZnO
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- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
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- G—PHYSICS
- G02—OPTICS
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- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
- G02B5/282—Interference filters designed for the infrared light reflecting for infrared and transparent for visible light, e.g. heat reflectors, laser protection
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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Claims (46)
1. Материал, содержащий прозрачную подложку, покрытую системой тонких слоев, содержащей последовательно, начиная от подложки, чередование трех функциональных металлических слоев на основе серебра, обозначенных, считая от подложки, как первый, второй и третий функциональные слои, причем толщина функциональных металлических слоев, начиная от подложки, увеличивается в зависимости от удаленности от подложки, и чередование четырех диэлектрических покрытий, обозначенных, считая от подложки, как M1, M2, M3 и M4, причем каждое диэлектрическое покрытие содержит по меньшей мере один диэлектрический слой, так что каждый функциональный металлический слой находится между двумя диэлектрическими покрытиями, отличающийся тем, что:
диэлектрические покрытия M1, M2, M3 и M4 имеют оптическую толщину Eo1, Eo2, Eo3 и Eo4, соответственно,
каждое диэлектрическое покрытие содержит по меньшей мере один диэлектрический слой с высоким показателем преломления, показатель преломления которого составляет по меньшей мере 2,15, и оптическая толщина которого больше 20 нм,
сумма оптических толщин всех диэлектрических слоев с высоким показателем преломления в одном и том же диэлектрическом покрытии обозначена, в соответствии с конкретным диэлектрическим покрытием, как Eohi1, Eohi2, Eohi3 или Eohi4,
и каждое диэлектрическое покрытие удовлетворяет следующему соотношению:
Eohi1/Eo1 > 0,30,
Eohi2/Eo2 > 0,30,
Eohi3/Eo3 > 0,30,
Eohi4/Eo4 > 0,30.
2. Материал по п. 1, отличающийся тем, что три функциональных металлических слоя удовлетворяют следующим условиям:
отношение толщины второго металлического слоя к толщине первого функционального металлического слоя составляет от 1,10 до 2,00, включая граничные значения, и/или
отношение толщины третьего металлического слоя к толщине второго функционального металлического слоя составляет от 1,10 до 1,80, включая граничные значения.
3. Материал по одному из предыдущих пунктов, отличающийся тем, что система дополнительно содержит по меньшей мере один блокирующий слой, находящийся в контакте с функциональным слоем, выбранный из металлических слоев, металлонитридных слоев, металлоксидных слоев и металло-оксинитридных слоев с одним или несколькими элементами, выбранными из титана, никеля, хрома и ниобия, такой как слой Ti, TiN, TiO2 Nb, NbN, Ni, NiN, Cr, CrN, NiCr, NiCrN.
4. Материал по любому из предыдущих пунктов, отличающийся тем, что диэлектрические покрытия M1, M2, M3 и M4 имеют оптические толщины Eo1, Eo2, Eo3 и Eo4, соответственно, которые удовлетворяют следующему соотношению: Eo4 < Eo1 < Eo2 < Eo3.
5. Материал по одному из предыдущих пунктов, отличающийся тем, что слои с высоким показателем преломления имеют показатель преломления меньше или равный 2,35.
6. Материал по одному из предыдущих пунктов, отличающийся тем, что каждое диэлектрическое покрытие удовлетворяет следующему соотношению:
Eohi1/Eo1 > 0,80,
Eohi2/Eo2 > 0,80,
Eohi3/Eo3 > 0,80,
Eohi4/Eo4 > 0,80.
7. Материал по любому из предыдущих пунктов, отличающийся тем, что по меньшей мере два диэлектрических покрытия содержат диэлектрический слой с высоким показателем преломления на основе нитрида кремния и циркония.
8. Материал по любому из предыдущих пунктов, отличающийся тем, что каждое диэлектрическое покрытие содержит диэлектрический слой с высоким показателем преломления на основе нитрида кремния и циркония.
9. Материал по любому из предыдущих пунктов, отличающийся тем, что диэлектрические покрытия имеют следующие характеристики:
оптическая толщина первого диэлектрического покрытие M1 составляет от 60 до 140 нм,
оптическая толщина второго диэлектрического покрытия M2 составляет от 120 до 180 нм,
оптическая толщина третьего диэлектрического покрытия M3 составляет от 140 до 200 нм,
оптическая толщина четвертого диэлектрического покрытия M4 составляет от 50 до 120 нм.
10. Материал по любому из предыдущих пунктов, отличающийся тем, что каждое диэлектрическое покрытие дополнительно содержит по меньшей мере один диэлектрический слой, показатель преломления которого ниже 2,15.
11. Материал по любому из предыдущих пунктов, отличающийся тем, что он содержит систему тонких слоев слоев, содержащую, начиная от прозрачной подложки:
первое диэлектрическое покрытие, содержащее по меньшей мере один слой с высоким показателем преломления, необязательно слой с функцией барьера, диэлектрический слой с функцией стабилизации,
необязательно, блокирующий слой,
первый функциональный слой,
необязательно, блокирующий слой,
второе диэлектрическое покрытие, содержащее по меньшей мере один нижний диэлектрический слой со стабилизирующей функцией, необязательно слой с функцией барьера, диэлектрический слой с высоким показателем преломления, необязательно слой со сглаживающей функцией, верхний диэлектрический слой со стабилизирующей функцией,
необязательно, блокирующий слой,
второй функциональный слой,
необязательно, блокирующий слой,
третье диэлектрическое покрытие, содержащее по меньшей мере один нижний диэлектрический слой со стабилизирующей функцией, необязательно слой с функцией барьера, диэлектрический слой с высоким показателем преломления, необязательно слой со сглаживающей функцией, верхний диэлектрический слой со стабилизирующей функцией,
необязательно, блокирующий слой,
третий функциональный слой,
необязательно, блокирующий слой,
четвертое диэлектрическое покрытие, содержащее по меньшей мере один диэлектрический слой со стабилизирующей функцией, необязательно слой с функцией барьера, диэлектрический слой с высоким показателем преломления и, необязательно, защитный слой.
12. Способ получения материала по одному из предыдущих пунктов, в соответствии с которым слои системы тонких слоев осаждают методом магнетронного катодного распыления.
13. Стекло, содержащее по меньшей мере один материал по любому из пп.1-11.
14. Стекло по предыдущему пункту, отличающееся тем, что система слоев расположена в стекле так, что падающий снаружи свет проходит сначала через первое диэлектрическое покрытие, прежде чем пройти через первый функциональный металлический слой.
15. Стекло по любому из предыдущих пунктов, отличающееся тем, что оно имеет вид стеклопакета, в частности, однокамерного или двухкамерного стеклопакета.
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FR3054892A1 (fr) * | 2016-08-02 | 2018-02-09 | Saint Gobain | Substrat muni d'un empilement a proprietes thermiques comportant au moins une couche comprenant du nitrure de silicium-zirconium enrichi en zirconium, son utilisation et sa fabrication. |
US10138159B2 (en) | 2017-03-09 | 2018-11-27 | Guardian Glass, LLC | Coated article having low-E coating with IR reflecting layer(s) and high index nitrided dielectric film having multiple layers |
FR3069241B1 (fr) | 2017-07-21 | 2022-02-04 | Saint Gobain | Materiau comprenant un empilement a proprietes thermiques |
JP6972317B2 (ja) * | 2017-09-08 | 2021-11-24 | エルエックス・ハウシス・リミテッドLx Hausys, Ltd. | 窓戸用機能性建材 |
FR3072957B1 (fr) * | 2017-10-30 | 2019-10-18 | Saint-Gobain Glass France | Substrat muni d'un empilement a proprietes thermiques |
FR3078653B1 (fr) * | 2018-03-08 | 2023-10-27 | Saint Gobain | Materiau muni d'un empilement a proprietes thermiques |
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FR3092107B1 (fr) * | 2019-01-30 | 2022-08-12 | Saint Gobain | Substrat muni d’un empilement a proprietes thermiques et a couche absorbante |
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CN111517669A (zh) * | 2020-06-09 | 2020-08-11 | 吴江南玻华东工程玻璃有限公司 | 一种高透低反可钢三银低辐射玻璃及其制备方法 |
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