RU2017122209A - Источник для нанесения покрытия - Google Patents

Источник для нанесения покрытия Download PDF

Info

Publication number
RU2017122209A
RU2017122209A RU2017122209A RU2017122209A RU2017122209A RU 2017122209 A RU2017122209 A RU 2017122209A RU 2017122209 A RU2017122209 A RU 2017122209A RU 2017122209 A RU2017122209 A RU 2017122209A RU 2017122209 A RU2017122209 A RU 2017122209A
Authority
RU
Russia
Prior art keywords
phase
layer
source
composite
metal
Prior art date
Application number
RU2017122209A
Other languages
English (en)
Other versions
RU2707375C2 (ru
RU2017122209A3 (ru
Inventor
Петер ПОЛЬЦИК
Забине ВЁРЛЕ
Original Assignee
Планзее Композит Материалс Гмбх
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Планзее Композит Материалс Гмбх filed Critical Планзее Композит Материалс Гмбх
Publication of RU2017122209A publication Critical patent/RU2017122209A/ru
Publication of RU2017122209A3 publication Critical patent/RU2017122209A3/ru
Application granted granted Critical
Publication of RU2707375C2 publication Critical patent/RU2707375C2/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/02—Compacting only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12—Both compacting and sintering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12—Both compacting and sintering
    • B22F3/14—Both compacting and sintering simultaneously
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12—Both compacting and sintering
    • B22F3/14—Both compacting and sintering simultaneously
    • B22F3/15—Hot isostatic pressing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
    • B22F3/12—Both compacting and sintering
    • B22F3/16—Both compacting and sintering in successive or repeated steps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/02—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
    • B22F7/06—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of composite workpieces or articles from parts, e.g. to form tipped tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/02—Layer formed of wires, e.g. mesh
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/05—Mixtures of metal powder with non-metallic powder
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C1/00—Making non-ferrous alloys
    • C22C1/04—Making non-ferrous alloys by powder metallurgy
    • C22C1/05—Mixtures of metal powder with non-metallic powder
    • C22C1/059—Making alloys comprising less than 5% by weight of dispersed reinforcing phases
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C32/00—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ
    • C22C32/0047—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents
    • C22C32/0078—Non-ferrous alloys containing at least 5% by weight but less than 50% by weight of oxides, carbides, borides, nitrides, silicides or other metal compounds, e.g. oxynitrides, sulfides, whether added as such or formed in situ with carbides, nitrides, borides or silicides as the main non-metallic constituents only silicides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32614—Consumable cathodes for arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3414—Targets
    • H01J37/3426—Material
    • H01J37/3429—Plural materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
    • H01J37/3491—Manufacturing of targets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2202/00—Treatment under specific physical conditions
    • B22F2202/06—Use of electric fields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2202/00—Treatment under specific physical conditions
    • B22F2202/07—Treatment under specific physical conditions by induction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2301/00—Metallic composition of the powder or its coating
    • B22F2301/20—Refractory metals
    • B22F2301/205—Titanium, zirconium or hafnium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2301/00—Metallic composition of the powder or its coating
    • B22F2301/40—Intermetallics other than rare earth-Co or -Ni or -Fe intermetallic alloys
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Composite Materials (AREA)
  • Dispersion Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Powder Metallurgy (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)

Claims (22)

1. Способ получения источника (1) для нанесения покрытия посредством физического осаждения из паровой фазы, в котором источник (1) для нанесения покрытия включает, по меньшей мере,
слой (2) мишени, состоящий из по меньшей мере двухфазного композита, который содержит металлическую фазу (М) и по меньшей мере одну дополнительную фазу (Р),
стабилизирующий механические свойства слой (3), который соединяют со слоем (2) мишени с одной стороны слоя (2) мишени,
отличающийся тем, что первую порошковую смесь (6), которая соответствует в показателях ее состава по меньшей мере двухфазному композиту, и вторую порошковую смесь (7), которая соответствует в показателях ее состава стабилизирующему механические свойства слою (3), уплотняют в горячем состоянии в виде наложенных друг на друга слоев.
2. Способ по п. 1, в котором наложенные друг на друга слои подвергают горячему прессованию.
3. Способ по п. 1 или 2, в котором в процессе уплотнения к наложенным друг на друга слоям прикладывают электрический ток и/или подвергают их индукционному нагреву.
4. Способ по любому из предшествующих пунктов, в котором первую и/или вторую порошковую смесь (6, 7) используют в форме только промежуточной предварительно уплотненной прессованной заготовки, а окончательное уплотнение и соединение осуществляют посредством уплотнения в горячем состоянии.
5. Способ по любому из предшествующих пунктов, в котором в качестве металлической фазы (М) по меньшей мере двухфазного композита используют титан или титановый сплав.
6. Способ по любому из предшествующих пунктов, в котором материал для металлической фазы (М) по меньшей мере двухфазного композита и материал стабилизирующего механические свойства слоя состоят по меньшей мере на 80 ат. % из одинакового металла.
7. Способ по любому из предшествующих пунктов, в котором дополнительную фазу (Р) используют в количестве более 25 об. %, исходя из по меньшей мере двухфазного композита.
8. Способ по любому из предшествующих пунктов, в котором в качестве дополнительной фазы (Р) используют элемент, отличный от титана и/или соединения титана.
9. Способ по любому из предшествующих пунктов, в котором первую и вторую порошковые смеси (6, 7) располагают одну над другой так, что они прилегают друг другу по своей полной площади.
10. Источник (1) для нанесения покрытия посредством физического осаждения из паровой фазы, включающий
слой (2) мишени, состоящий по меньшей мере из двухфазного композита, который содержит металлическую фазу (М) и по меньшей мере дополнительную фазу (Р), где металлическая фаза (М) и все дополнительные присутствующие фазы имеют температуру плавления более 1000°С,
стабилизирующий механические свойства слой (3), который соединен со слоем (2) мишени с одной стороны слоя (2) мишени,
отличающийся тем, что слой (2) мишени и стабилизирующий механические свойства слой (3) соединены посредством соединительной зоны (4), которая имеет повышающуюся концентрацию частиц дополнительной фазы (Р) по меньшей мере двухфазного композита в направлении от стабилизирующего механические свойства слоя (3) к слою (2) мишени, без образования границы раздела.
11. Источник (1) для нанесения покрытия по п. 10, в котором металлическая фаза (М) по меньшей мере двухфазного композита включает титан или сплав титана.
12. Источник (1) для нанесения покрытия по п. 10 или п. 11, в котором материал металлической фазы (М) по меньшей мере двухфазного композита и материал стабилизирующего механические свойства слоя (3) состоят по меньшей мере на 80 ат. % из одинакового металла.
13. Источник (1) для нанесения покрытия по пп. 10-12, в котором дополнительная фаза (Р) присутствует в количестве более 25 об. %, исходя из по меньшей мере двухфазного композита.
14. Источник (1) для нанесения покрытия по пп. 10-13, в котором дополнительная фаза (Р) состоит из элемента, отличного от титана и/или соединения титана.
15. Источник (1) для нанесения покрытия по пп. 10-14, в котором стабилизирующий механические свойства слой (3) состоит из того же металлического материала, который образует металлическую фазу (М) слоя (2) мишени, и по меньшей мере по существу не содержит частиц дополнительной фазы (Р) по меньшей мере двухфазного композита.
16. Источник (1) для нанесения покрытия по пп. 10-14, в котором стабилизирующий механические свойства слой (3) сам по себе состоит по меньшей мере из двухфазного композита.
RU2017122209A 2015-01-26 2016-01-20 Источник для нанесения покрытия RU2707375C2 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ATGM17/2015U AT14497U1 (de) 2015-01-26 2015-01-26 Beschichtungsquelle
ATGM17/2015 2015-01-26
PCT/EP2016/000092 WO2016120002A1 (de) 2015-01-26 2016-01-20 Beschichtungsquelle

Publications (3)

Publication Number Publication Date
RU2017122209A true RU2017122209A (ru) 2019-03-01
RU2017122209A3 RU2017122209A3 (ru) 2019-05-17
RU2707375C2 RU2707375C2 (ru) 2019-11-26

Family

ID=54782339

Family Applications (1)

Application Number Title Priority Date Filing Date
RU2017122209A RU2707375C2 (ru) 2015-01-26 2016-01-20 Источник для нанесения покрытия

Country Status (9)

Country Link
US (1) US10787735B2 (ru)
EP (1) EP3251145B1 (ru)
JP (2) JP7087229B2 (ru)
KR (1) KR102526957B1 (ru)
CN (1) CN107208257B (ru)
AT (1) AT14497U1 (ru)
RU (1) RU2707375C2 (ru)
TW (1) TWI658885B (ru)
WO (1) WO2016120002A1 (ru)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107607577B (zh) * 2017-09-28 2020-04-10 中国煤炭地质总局水文地质局 一种地层换热能力的热物性测试装置
CN112620633A (zh) * 2020-12-02 2021-04-09 东莞仁海科技股份有限公司 一种粉末冶金件表面处理工艺
RU2761060C1 (ru) * 2020-12-23 2021-12-02 Федеральное государственное бюджетное образовательное учреждение высшего образования "Кубанский государственный технологический университет" (ФГБОУ ВО "КубГТУ") Устройство для формирования функциональных покрытий из порошкового материала на торцевой поверхности металлической детали двухсторонним прессованием

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1731440A1 (ru) * 1990-07-12 1992-05-07 Киевский государственный педагогический институт им.А.М.Горького Способ получени деталей из дисилицида титана
US5234487A (en) * 1991-04-15 1993-08-10 Tosoh Smd, Inc. Method of producing tungsten-titanium sputter targets and targets produced thereby
US5282943A (en) 1992-06-10 1994-02-01 Tosoh Smd, Inc. Method of bonding a titanium containing sputter target to a backing plate and bonded target/backing plate assemblies produced thereby
US5397050A (en) * 1993-10-27 1995-03-14 Tosoh Smd, Inc. Method of bonding tungsten titanium sputter targets to titanium plates and target assemblies produced thereby
US6073830A (en) 1995-04-21 2000-06-13 Praxair S.T. Technology, Inc. Sputter target/backing plate assembly and method of making same
US5836506A (en) * 1995-04-21 1998-11-17 Sony Corporation Sputter target/backing plate assembly and method of making same
US6183686B1 (en) * 1998-08-04 2001-02-06 Tosoh Smd, Inc. Sputter target assembly having a metal-matrix-composite backing plate and methods of making same
US6071389A (en) * 1998-08-21 2000-06-06 Tosoh Smd, Inc. Diffusion bonded sputter target assembly and method of making
AT4240U1 (de) * 2000-11-20 2001-04-25 Plansee Ag Verfahren zur herstellung einer verdampfungsquelle
JP3834720B2 (ja) 2002-06-04 2006-10-18 株式会社ニューエラー ロータリアクチュエータ
WO2004011690A1 (ja) 2002-07-30 2004-02-05 Bridgestone Corporation スパッタリングターゲット
JP2005139539A (ja) 2003-11-10 2005-06-02 Toudai Tlo Ltd マグネシウム化合物被膜を有する金属材料、スパッタリング用ターゲット部材、スパッタリング用ターゲット部材の製造方法およびマグネシウム化合物被膜の形成方法
GB0327043D0 (en) * 2003-11-18 2004-04-07 Rolls Royce Plc A method of manufacturing an article by applying heat and pressure, a method of connecting a pipe to a sealed assembly and a connector for use therein
US8206646B2 (en) 2006-12-22 2012-06-26 Praxair Tecnology, Inc. Method for consolidating and diffusion-bonding powder metallurgy sputtering target
CN101524754B (zh) * 2009-04-17 2010-10-13 中南大学 一种钛铝合金靶材快速热压烧结成型工艺
KR20170016024A (ko) * 2011-05-10 2017-02-10 에이치. 씨. 스타아크 아이앤씨 멀티-블록 스퍼터링 타겟 및 이에 관한 제조방법 및 물품
CN202193837U (zh) * 2011-09-02 2012-04-18 余鹏 一种多弧离子镀用双层复合结构钛铝靶材
AT14346U1 (de) 2014-07-08 2015-09-15 Plansee Se Target und Verfahren zur Herstellung eines Targets
SG11201703125WA (en) * 2014-10-23 2017-05-30 Agency Science Tech & Res Method of bonding a first substrate and a second substrate
JP6507674B2 (ja) 2015-01-28 2019-05-08 株式会社デンソー 有機半導体装置およびその製造方法

Also Published As

Publication number Publication date
JP7087229B2 (ja) 2022-06-21
US20180340254A1 (en) 2018-11-29
EP3251145B1 (de) 2022-06-29
CN107208257B (zh) 2020-02-07
TWI658885B (zh) 2019-05-11
JP2018505313A (ja) 2018-02-22
KR102526957B1 (ko) 2023-04-27
CN107208257A (zh) 2017-09-26
JP2021046610A (ja) 2021-03-25
JP7116131B2 (ja) 2022-08-09
US10787735B2 (en) 2020-09-29
AT14497U1 (de) 2015-12-15
RU2707375C2 (ru) 2019-11-26
KR20170107442A (ko) 2017-09-25
WO2016120002A1 (de) 2016-08-04
EP3251145A1 (de) 2017-12-06
RU2017122209A3 (ru) 2019-05-17
TW201637753A (zh) 2016-11-01

Similar Documents

Publication Publication Date Title
RU2017122209A (ru) Источник для нанесения покрытия
WO2017053469A3 (en) Cd3 binding polypeptides
MY198562A (en) Antibodies specifically binding pd-1 and their uses
WO2017087678A3 (en) Antibodies against glucocorticoid-induced tumor necrosis factor receptor (gitr) and uses thereof
WO2016130898A3 (en) Antibody therapeutics that bind ctla4
EP3072612A3 (en) Component and method for fabricating a component
FR3034771B1 (fr) Materiaux conducteurs thermiques et/ou electriques et leur procede de preparation
MX2019008646A (es) Un proceso para preparar material de aleacion de tpu a traves de compatibilizacion in situ.
PT2265744E (pt) Processo para a produção de camadas de revestimento de óxido metálico de estrutura pré-determinada por meio de vaporização controlada com arco eléctrico
TR201908123T4 (tr) W-ni püskürtme hedefi.
WO2012051176A3 (en) Ceramic capacitor and methods of manufacture
MX2018003183A (es) Proteinas de enlace de antigeno biespecifico y tetraespecifico tetravalentes y usos de las mismas.
RU2016140331A (ru) Составной валок
WO2004074535A3 (de) Verbundwerkstoff aus intermetallischen phasen und keramik und herstellungsverfahren
EP1600987A3 (en) Soft magnetic material, powder metallurgy soft magnetic material and manufacturing methods therefor
GB2564331A (en) Method for forming a joint in a binary system and joint thereof
FI20165637A (fi) Komposiittirakenne ja menetelmä sen valmistamiseksi
WO2007020634A3 (en) Resistant ceramic material and method for making same
WO2015160858A3 (en) Antigen binding proteins that bind wisp1
JP2018505313A5 (ru)
WO2009053156A3 (de) Metallpulvermischung und deren verwendung
WO2016144876A3 (en) Antibody therapeutics that bind jag1
JP2016539066A5 (ru)
GB2551068A (en) Segregated multi-material metal-matrix composite tools
RU2016147588A (ru) Способ изготовления проволоки для обработки металлургических расплавов и проволока для обработки металлургических расплавов