RU2008146811A - ROTORS OR STATORS OF TURBOMOLECULAR PUMP - Google Patents

ROTORS OR STATORS OF TURBOMOLECULAR PUMP Download PDF

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Publication number
RU2008146811A
RU2008146811A RU2008146811/06A RU2008146811A RU2008146811A RU 2008146811 A RU2008146811 A RU 2008146811A RU 2008146811/06 A RU2008146811/06 A RU 2008146811/06A RU 2008146811 A RU2008146811 A RU 2008146811A RU 2008146811 A RU2008146811 A RU 2008146811A
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RU
Russia
Prior art keywords
alloy
rotors
stators
turbomolecular pump
elements
Prior art date
Application number
RU2008146811/06A
Other languages
Russian (ru)
Other versions
RU2455529C2 (en
Inventor
Райнер ХЁЛЬЦЕР (DE)
Райнер ХЁЛЬЦЕР
Михаэль ФРОЙТЦХАЙМ (DE)
Михаэль ФРОЙТЦХАЙМ
Ларс ЭЧЕНБЕРГ (DE)
Ларс ЭЧЕНБЕРГ
Исхан РОТ (DE)
Исхан РОТ
Гернот ФИШЕР (DE)
Гернот ФИШЕР
Дитер ЗАУЕР (DE)
Дитер ЗАУЕР
Грегор ТЕРЛИНДЕ (DE)
Грегор ТЕРЛИНДЕ
Original Assignee
Ёрликон Лайбольд Вакуум Гмбх (De)
Ёрликон Лайбольд Вакуум Гмбх
Отто Фукс Кг (De)
Отто Фукс Кг
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ёрликон Лайбольд Вакуум Гмбх (De), Ёрликон Лайбольд Вакуум Гмбх, Отто Фукс Кг (De), Отто Фукс Кг filed Critical Ёрликон Лайбольд Вакуум Гмбх (De)
Publication of RU2008146811A publication Critical patent/RU2008146811A/en
Application granted granted Critical
Publication of RU2455529C2 publication Critical patent/RU2455529C2/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C21/00—Alloys based on aluminium
    • C22C21/12—Alloys based on aluminium with copper as the next major constituent
    • C22C21/14—Alloys based on aluminium with copper as the next major constituent with silicon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49316—Impeller making
    • Y10T29/4932—Turbomachine making
    • Y10T29/49325—Shaping integrally bladed rotor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

1. Роторы или статоры турбомолекулярного насоса с роторными лопастями из алюминиевого сплава, отличающиеся тем, что указанный сплав является деформируемым Al-Cu-Mg-Mn - сплавом. ! 2. Роторы или статоры по п.1, отличающиеся тем, что они изготовлены из деформируемого сплава следующего состава: ! от 0,3 до 0,7 вес.% кремния (Si), ! до 0,15 вес.% железа (Fe), ! от 3,5 до 4,5 вес.% меди (Сu), ! от 0,1 до 0,5 вес.% марганца (Мn), ! от 0,3 до 0,8 вес.% магния (Мg), ! от 0,05 до 0,15 вес.% титана (Ti), ! от 0,1 до 0,25 вес.% циркона (Zr), ! от 0,3 до 0,7 вес.% серебра (Аg), ! до 0,05 вес.% других элементов, по отдельности, ! до 0,15 вес.% других элементов, суммарно, ! остальное вес.% алюминия (Аl). 1. Rotors or stators of a turbomolecular pump with rotor blades made of aluminum alloy, characterized in that the said alloy is a deformable Al-Cu-Mg-Mn alloy. ! 2. Rotors or stators according to claim 1, characterized in that they are made of a wrought alloy of the following composition: ! from 0.3 to 0.7 wt.% silicon (Si), ! up to 0.15 wt.% iron (Fe), ! from 3.5 to 4.5 wt.% copper (Cu), ! from 0.1 to 0.5 wt.% manganese (Mn), ! from 0.3 to 0.8 wt.% magnesium (Mg), ! from 0.05 to 0.15 wt.% titanium (Ti), ! from 0.1 to 0.25 wt.% zircon (Zr), ! from 0.3 to 0.7 wt.% silver (Ag), ! up to 0.05 wt.% other elements, separately, ! up to 0.15 wt.% of other elements, in total, ! the rest is wt.% aluminum (Al).

Claims (2)

1. Роторы или статоры турбомолекулярного насоса с роторными лопастями из алюминиевого сплава, отличающиеся тем, что указанный сплав является деформируемым Al-Cu-Mg-Mn - сплавом.1. Rotors or stators of a turbomolecular pump with rotor blades made of aluminum alloy, characterized in that said alloy is a deformable Al-Cu-Mg-Mn alloy. 2. Роторы или статоры по п.1, отличающиеся тем, что они изготовлены из деформируемого сплава следующего состава:2. Rotors or stators according to claim 1, characterized in that they are made of a deformable alloy of the following composition: от 0,3 до 0,7 вес.% кремния (Si),from 0.3 to 0.7 wt.% silicon (Si), до 0,15 вес.% железа (Fe),up to 0.15 wt.% iron (Fe), от 3,5 до 4,5 вес.% меди (Сu),from 3.5 to 4.5 wt.% copper (Cu), от 0,1 до 0,5 вес.% марганца (Мn),from 0.1 to 0.5 wt.% manganese (Mn), от 0,3 до 0,8 вес.% магния (Мg),from 0.3 to 0.8 wt.% magnesium (Mg), от 0,05 до 0,15 вес.% титана (Ti),from 0.05 to 0.15 wt.% titanium (Ti), от 0,1 до 0,25 вес.% циркона (Zr),from 0.1 to 0.25 wt.% zircon (Zr), от 0,3 до 0,7 вес.% серебра (Аg),from 0.3 to 0.7 wt.% silver (Ag), до 0,05 вес.% других элементов, по отдельности,up to 0.05 wt.% other elements, individually, до 0,15 вес.% других элементов, суммарно,up to 0.15 wt.% of other elements, in total, остальное вес.% алюминия (Аl). the rest is wt.% aluminum (Al).
RU2008146811/06A 2006-04-29 2007-04-27 Rotor or stator of turbomolecular pump RU2455529C2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006020100.0 2006-04-29
DE102006020100 2006-04-29

Publications (2)

Publication Number Publication Date
RU2008146811A true RU2008146811A (en) 2010-06-10
RU2455529C2 RU2455529C2 (en) 2012-07-10

Family

ID=38221387

Family Applications (2)

Application Number Title Priority Date Filing Date
RU2008146811/06A RU2455529C2 (en) 2006-04-29 2007-04-27 Rotor or stator of turbomolecular pump
RU2008146813/06A RU2435076C2 (en) 2006-04-29 2007-04-27 Manufacturing method of rotors and stators of turbomolecular pump

Family Applications After (1)

Application Number Title Priority Date Filing Date
RU2008146813/06A RU2435076C2 (en) 2006-04-29 2007-04-27 Manufacturing method of rotors and stators of turbomolecular pump

Country Status (7)

Country Link
US (2) US20100199495A1 (en)
EP (2) EP2013483B1 (en)
JP (2) JP5274446B2 (en)
CN (2) CN101438063A (en)
DE (1) DE502007003011D1 (en)
RU (2) RU2455529C2 (en)
WO (2) WO2007125104A1 (en)

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DE102009015652A1 (en) * 2009-03-31 2010-10-07 Light Style Gmbh Method for manufacturing usage product made of aluminum, method involves manufacturing usage product by material-machining, particularly removing processing
CN102465890A (en) * 2010-11-04 2012-05-23 致扬科技股份有限公司 Improved stator structure of turbo molecular pump and manufacture method thereof
JP5879181B2 (en) 2011-06-10 2016-03-08 株式会社神戸製鋼所 Aluminum alloy with excellent high temperature characteristics
US20130084190A1 (en) * 2011-09-30 2013-04-04 General Electric Company Titanium aluminide articles with improved surface finish and methods for their manufacture
US9011205B2 (en) * 2012-02-15 2015-04-21 General Electric Company Titanium aluminide article with improved surface finish
DE102012222230A1 (en) 2012-12-04 2014-06-05 Pfeiffer Vacuum Gmbh vacuum pump
EP3072984B2 (en) 2015-03-27 2020-05-06 Otto Fuchs KG Al-cu-mg-li alloy and alloy product produced from same
CN104847684A (en) * 2015-04-24 2015-08-19 张金荣 Corrosion-resisting water pump for vehicle
CN105958671A (en) * 2016-06-23 2016-09-21 无锡新大力电机有限公司 Novel motor stator
GB2552793A (en) * 2016-08-08 2018-02-14 Edwards Ltd Vacuum pump
JP6906941B2 (en) * 2016-12-16 2021-07-21 エドワーズ株式会社 Vacuum pump and stator column used for it and its manufacturing method

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DE2923632A1 (en) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg METHOD FOR PRODUCING A VAN RING FOR THE ROTOR OF A TUBOMOLECULAR PUMP AND A ROTOR EQUIPPED WITH VAN RINGS OF THIS TYPE
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Also Published As

Publication number Publication date
RU2455529C2 (en) 2012-07-10
EP2013482A1 (en) 2009-01-14
EP2013482B1 (en) 2014-11-05
JP2009535551A (en) 2009-10-01
RU2435076C2 (en) 2011-11-27
EP2013483A2 (en) 2009-01-14
RU2008146813A (en) 2010-06-10
EP2013483B1 (en) 2010-03-03
JP2009535550A (en) 2009-10-01
JP5274447B2 (en) 2013-08-28
WO2007125104A1 (en) 2007-11-08
WO2007125106A2 (en) 2007-11-08
US20090180890A1 (en) 2009-07-16
JP5274446B2 (en) 2013-08-28
CN101432525A (en) 2009-05-13
WO2007125106A3 (en) 2008-01-31
CN101438063A (en) 2009-05-20
US20100199495A1 (en) 2010-08-12
DE502007003011D1 (en) 2010-04-15

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Effective date: 20160428