RU2004117399A - METHOD FOR CLEANING PRODUCTS FROM BERILIUM CERAMICS FROM CARBON IMPURITY - Google Patents

METHOD FOR CLEANING PRODUCTS FROM BERILIUM CERAMICS FROM CARBON IMPURITY Download PDF

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Publication number
RU2004117399A
RU2004117399A RU2004117399/09A RU2004117399A RU2004117399A RU 2004117399 A RU2004117399 A RU 2004117399A RU 2004117399/09 A RU2004117399/09 A RU 2004117399/09A RU 2004117399 A RU2004117399 A RU 2004117399A RU 2004117399 A RU2004117399 A RU 2004117399A
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RU
Russia
Prior art keywords
ceramics
berilium
cleaning products
carbon impurity
inert gas
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RU2004117399/09A
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Russian (ru)
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RU2258331C1 (en
Inventor
Виктор Степанович Кийко (RU)
Виктор Степанович Кийко
Юрий Николаевич Макурин (RU)
Юрий Николаевич Макурин
Виктор Петрович Корчагин (RU)
Виктор Петрович Корчагин
Original Assignee
Государственное образовательное учреждение высшего профессионального образовани "Уральский государственный технический университет-УПИ" (RU)
Государственное образовательное учреждение высшего профессионального образования "Уральский государственный технический университет-УПИ"
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Application filed by Государственное образовательное учреждение высшего профессионального образовани "Уральский государственный технический университет-УПИ" (RU), Государственное образовательное учреждение высшего профессионального образования "Уральский государственный технический университет-УПИ" filed Critical Государственное образовательное учреждение высшего профессионального образовани "Уральский государственный технический университет-УПИ" (RU)
Priority to RU2004117399/09A priority Critical patent/RU2258331C1/en
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Publication of RU2258331C1 publication Critical patent/RU2258331C1/en
Publication of RU2004117399A publication Critical patent/RU2004117399A/en

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  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
  • Cleaning In General (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Claims (1)

Способ очистки изделий из керамики BeO от примеси углерода, заключающийся в бомбардировке поверхности положительно заряженными ионами инертного газа, отличающийся тем, что бомбардировку положительно заряженными ионами инертного газа проводят при напряжениях U=0,5÷2,0 кВ, токе I=5,0÷40,0 мкА, времени τ=5-20 мин, после этой обработки изделие нагревают в вакууме 10-7-10-9 Па до температуры 450-500°С, выдерживают в течение 15-20 мин и затем обрабатывают поверхность высокочастотной водородной плазмой при давлении плазмы не более 10-5 Па, токе разряда не более I=10,0 мкА, энергии атомов водорода 5,0÷8,0 эВ.A method of cleaning carbon products from BeO ceramics by bombarding the surface with positively charged inert gas ions, characterized in that the bombardment with positively charged inert gas ions is carried out at voltages U = 0.5 ÷ 2.0 kV, current I = 5.0 ÷ 40.0 μA, time τ = 5-20 min, after this treatment the product is heated in a vacuum of 10 -7 -10 -9 Pa to a temperature of 450-500 ° C, kept for 15-20 minutes and then treated with a surface of high-frequency hydrogen plasma at a plasma pressure of not more than 10 -5 Pa, the discharge current is not more than I = 10, 0 μA, the energy of hydrogen atoms is 5.0 ÷ 8.0 eV.
RU2004117399/09A 2004-06-07 2004-06-07 Method for cleaning beryllium ceramic products from carbon admixtures RU2258331C1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
RU2004117399/09A RU2258331C1 (en) 2004-06-07 2004-06-07 Method for cleaning beryllium ceramic products from carbon admixtures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
RU2004117399/09A RU2258331C1 (en) 2004-06-07 2004-06-07 Method for cleaning beryllium ceramic products from carbon admixtures

Publications (2)

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RU2258331C1 RU2258331C1 (en) 2005-08-10
RU2004117399A true RU2004117399A (en) 2005-11-20

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RU2004117399/09A RU2258331C1 (en) 2004-06-07 2004-06-07 Method for cleaning beryllium ceramic products from carbon admixtures

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RU2258331C1 (en) 2005-08-10

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Effective date: 20060608