WO2017113382A1 - Carburising treatment process for thorium-tungsten electrode - Google Patents

Carburising treatment process for thorium-tungsten electrode Download PDF

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WO2017113382A1
WO2017113382A1 PCT/CN2015/100300 CN2015100300W WO2017113382A1 WO 2017113382 A1 WO2017113382 A1 WO 2017113382A1 CN 2015100300 W CN2015100300 W CN 2015100300W WO 2017113382 A1 WO2017113382 A1 WO 2017113382A1
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electrode
temperature
carbon
coated
presser
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PCT/CN2015/100300
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French (fr)
Chinese (zh)
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蔡志国
谭翠丽
张米好
杨洋
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深圳凯世光研股份有限公司
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Priority to PCT/CN2015/100300 priority Critical patent/WO2017113382A1/en
Publication of WO2017113382A1 publication Critical patent/WO2017113382A1/en

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/60Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes
    • C23C8/62Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using solids, e.g. powders, pastes only one element being applied
    • C23C8/64Carburising

Definitions

  • the invention relates to a carburizing treatment process of tantalum tungsten electrode
  • the present invention relates to a carburizing treatment method for the manufacture of ultra high pressure short arc lamps, and more particularly to a tantalum tungsten electrode carburizing treatment process.
  • the cathodes of short-arc mercury lamps and xenon lamps are made of tantalum-tungsten material, which emits electrons after being energized to produce light, which is a core component of power products.
  • the cathode without surface carbonization is unstable, which is easy to cause stroboscopic and arcing.
  • Chinese Patent No. CN102828143A discloses a high temperature carburizing process for a workpiece in which high temperature carburizing is divided into two stages, a temperature of 980 ° C in the first half and a temperature of 1010 ° C in the second half.
  • an object of the present invention is to provide a carburizing treatment process for a tantalum tungsten electrode, which aims to solve the problem of limited carburization of the tantalum tungsten electrode, so that the carbon powder penetrates deeper in the surface layer of the tantalum tungsten electrode, and the electrode is increased. Service life.
  • a method for carburizing a tantalum tungsten electrode adopts the following steps:
  • Step (1) pre-treating, cleaning the electrode and the presser, and then drying;
  • Step (2) burning hydrogen, the pretreated electrode is subjected to high temperature hydrogen burning at a temperature of 950 to 1200 ° C, After cooling to normal temperature;
  • Step (3) coating carbon, coating carbon powder on the surface of the electrode and the inner surface of the presser, coating a total thickness of 0.6 mm - 1.2 mm, and then drying;
  • Step (4) high-frequency treatment, placing the electrode coated with carbon powder in a presser coated with carbon powder, the electrode is placed in the middle portion of the high-frequency coil, and the high-frequency coil used for high-frequency processing The current gradually increases and stays at the maximum current for 10 to 15 minutes, then anneals in the high frequency coil, and cools the electrode to 550 ⁇ 600.
  • Step (5) secondary carbon coating, coating the surface of the high frequency treated electrode and the inner surface of the presser with carbon powder
  • the total thickness of the coating is about 0.6mm ⁇ 1.2mm, and then dried;
  • Step (6) high-temperature vacuum treatment, re-coating the high-frequency treated electrode with carbon powder, performing high-temperature vacuum treatment, increasing the temperature, staying at the highest temperature for 2 ⁇ 3h, then annealing and then cooling, A carburized layer is formed on the surface of the electrode.
  • the cleaning process is: sequentially cleaning the electrode and the pressure tool with an alkali solution, an acid solution, a hydrogen peroxide solution, a formic acid solution, and the cleaning process is: placing the electrode in the alkali solution In the middle, the ultrasonic wave is shaken, taken out, and then washed in 99.999% pure water.
  • the electrode cleaned with pure water is placed in the acid solution, ultrasonically shaken, taken out, washed in pure water, taken out, and then Put in a solution of H 2 0 2 : CH 2 0 2 : H 2 0 in a volume ratio of 1: 1: 1, ultrasonically shake, then rinse with pure water, then add 99.999% hot pure water for ultrasonic cleaning, and finally use Alcohol is dehydrated and dried.
  • the surface of the electrode and the inner surface of the presser are coated with at least 2 layers of carbon, and each layer is coated with a thickness of 0.2 mm to 0.5 mm ; in step (5), the electrode The surface of the surface and the inner surface of the presser is coated with at least 2 layers of carbon, and each layer is coated with a carbon thickness of 0.2 mm to 0.5 mm.
  • step (3) the surface of the electrode and the inner surface of the press are coated with 3 layers of carbon, and each layer is coated with a thickness of 0.2 mm; in step (5), the surface of the electrode and the presser The inner surface is coated with 3 layers of carbon, and each layer is coated with a carbon thickness of 0.2 mm.
  • the dispersant and the carbon powder used in the step (3) and the step (5) have the same concentration, and the carbon powder is coated by dispersing the carbon powder in a mixed solvent of butyl acetate and nitrocellulose, and dispersing The concentration is 20% ⁇ 25 ⁇ 3 ⁇ 4, and the above solution with carbon powder is coated on the surface of the electrode and the inner surface of the press, and then dried.
  • the surface of the electrode and the inner surface of the presser are coated with carbon from one-time carbon coating to multiple carbon coating, in order to coat the carbon layer more uniformly, high-frequency carburizing and high In vacuum carburizing, carburization is more uniform, prolonging the life of the electrode.
  • step (4) the current of the high frequency processing is stepped up, and the maximum current of the high frequency processing is 45 ⁇ 50A.
  • step (4) after high frequency processing, the electrode temperature is gradually increased, and the maximum temperature range is 150 0 to 1800. C.
  • the temperature is gradually increased from 0 ° C to 1000 ° C, then stay for 10 minutes, continue to heat up, the maximum temperature is 1750 ⁇ 2100 ° C, and then stay at the highest temperature 2 2 ⁇ 3h, then annealed to 60 0 ⁇ 700 °C, then naturally cooled.
  • the electrode is protected by a presser to avoid carbon loss or evaporation.
  • high temperature hydrogen burning can remove impurities, ensure the purity of the electrode material, and prevent the bulb from being blackened. , to avoid problems such as weakened light intensity.
  • the step (4) electrode material phase change the carbon atom easily penetrates into the metal interior, and the electrode is twice coated with carbon, as in steps (3) and (5), The same is to enable the electrode material to be combined with carbon to a maximum extent to form a thick carburized layer, which can increase the electrode life.
  • FIG. 1 High-frequency processing current variation curve of Embodiment 1
  • the step of carburizing the tungsten electrode is as follows:
  • Electrode pretreatment The electrode is first placed in a 0.06 g/mL NaOH solution, and ultrasonically shaken for 15 min.
  • the temperature continues to rise to 1750 ° C, stay at 1750 ° C for 2.5 h, then annealed to 600 ° C, and then naturally cooled to room temperature, forming a uniform W 2 C carburized layer on the surface of the electrode, the internal grain boundary is Granular texture, grainy grain of the grain can stabilize the light of the electrode and slow down the consumption of the electrode.
  • the thickness of the carburized layer was measured by a metallographic microscope to be 100 ⁇ m.
  • the step of carburizing the tungsten electrode is as follows:
  • Electrode pretreatment First, the electrode is placed in a 0.06 g/mL NaOH solution, and the ultrasonic vibration is lOmin.
  • the electrode coated with carbon powder is placed in a presser coated with carbon powder, and the electrode is placed in the middle portion of the high-frequency coil for high-frequency treatment, and the treatment method is Passing the current of 18A for 2 minutes, preheating the electrode and presser, then increasing the current to 25A, heating for 5 minutes, then increasing the current to 5 OA, and staying, the temperature of the electrode is gradually increased, the highest temperature After reaching 1800 ° C, the current of 50 A was left to stand for 15 minutes, and then the electrode was cooled to 600 ° C, and then taken out and naturally cooled to normal temperature.
  • the thickness of the carburized layer was measured by a metallographic microscope to be 80 ⁇ m.
  • the step of carburizing the tungsten electrode is as follows:
  • Pretreatment of the electrode First, the electrode is placed in a 0.06 g/mL NaOH solution, ultrasonically shaken, then washed with distilled water, and then placed in a 1:1 HCl solution, ultrasonically shaken, and then used. Rinse with distilled water and place the electrode in 11 2 0 2:. 8 2 0 2: H 2 0 is 1: 1: 1 solution, ultrasonically shaken, then washed with distilled water, and then placed in hot pure water for ultrasonic cleaning, then dehydrated with alcohol, and then dried with a hot air blower.
  • Carbon coating An organic solution containing a carbon powder concentration of 23% was applied to the surface of the electrode and the inner surface of the presser three times, and the total thickness of the carbon powder after drying was 0.8 mm.
  • the processing method is: the current of 17A will be passed for 2 minutes, the electrode and the presser are preheated, then the current is increased to 25A, heated for 5 minutes, then the current is increased to 45A, and the temperature is maintained. Continued to rise, the maximum temperature reached 1 750 ° C, the current of 45 A stayed for 6 minutes and then annealed, the electrode was cooled to 550 ° C, and then naturally cooled to room temperature.
  • the thickness of the carburized layer measured by a metallographic microscope was 80 ⁇ m.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Powder Metallurgy (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

A carburising treatment process for a thorium-tungsten electrode, the electrode being subjected to pre-treatment, hydrogen burning, carbon coating, high frequency treatment, secondary carbon coating, and high-temperature vacuum treatment. For the high frequency processing of the electrode, concentrated heating of a high frequency coil can cause a phase change of the electrode material, the carbon atoms extending deeply into the metal, and the carbon material permeating deeper into the electrode surface.

Description

说明书 发明名称:一种钍钨电极渗碳处理工艺 技术领域  Description: The invention relates to a carburizing treatment process of tantalum tungsten electrode
[0001] 本发明涉及一种超高压短弧灯制造领域用的渗碳处理方法, 尤其是一种钍钨电 极渗碳处理工艺。  [0001] The present invention relates to a carburizing treatment method for the manufacture of ultra high pressure short arc lamps, and more particularly to a tantalum tungsten electrode carburizing treatment process.
背景技术  Background technique
[0002] 短弧汞灯和氙灯的阴极由钍钨材料制成, 在通电后发射电子产生光亮, 是电源 产品的核心组件。 表层未经碳化处理的阴极工作不稳定, 容易引发频闪、 飘弧 [0002] The cathodes of short-arc mercury lamps and xenon lamps are made of tantalum-tungsten material, which emits electrons after being energized to produce light, which is a core component of power products. The cathode without surface carbonization is unstable, which is easy to cause stroboscopic and arcing.
、 光衰大等问题, 严重制约了产品的使用效果和寿命。 Problems such as large light decay have severely restricted the use effect and longevity of the product.
[0003] 中国专利 CN101967654A"采用钛基材渗碳改性的含钌氧化物电极材料及制备方 法"中对电极材料进行了渗碳处理, 是将钛基材加热酸洗、 水洗, 并烘干之后进 行了高温渗碳。 [0003] Chinese patent CN101967654A "Using a titanium substrate to carburize modified cerium-containing oxide electrode material and preparation method" in the electrode material is carburized, the titanium substrate is heated pickling, water washing, and drying High temperature carburization was then carried out.
[0004] 中国专利 CN102828143A公幵了一种工件高温渗碳工艺, 该工艺中, 将高温渗 碳分为两个阶段, 前半段温度为 980°C, 后半段温度为 1010°C。  [0004] Chinese Patent No. CN102828143A discloses a high temperature carburizing process for a workpiece in which high temperature carburizing is divided into two stages, a temperature of 980 ° C in the first half and a temperature of 1010 ° C in the second half.
[0005] 在以上渗碳工艺中, 单纯的将材料进行高温渗碳改性, 提高了材料的机械稳定 性, 与本发明渗碳工艺改善电子发射性能的机理不同, 而且碳料渗入材料表面 程度较浅, 而且影响材料的使用寿命。 [0005] In the above carburizing process, simply modifying the material by high-temperature carburizing improves the mechanical stability of the material, and the mechanism of improving the electron-emitting performance of the carburizing process of the present invention is different, and the carbon material penetrates into the surface of the material. It is shallow and affects the life of the material.
技术问题  technical problem
[0006] 为了解决以上问题, 本发明目的在于提供一种钍钨电极渗碳处理工艺, 旨在解 决钍钨电极渗碳程度有限的问题, 以使得碳粉在钍钨电极表层渗入更深, 增加 电极使用寿命。  In order to solve the above problems, an object of the present invention is to provide a carburizing treatment process for a tantalum tungsten electrode, which aims to solve the problem of limited carburization of the tantalum tungsten electrode, so that the carbon powder penetrates deeper in the surface layer of the tantalum tungsten electrode, and the electrode is increased. Service life.
问题的解决方案  Problem solution
技术解决方案  Technical solution
[0007] 本发明为解决以上技术问题所采用的技术方案是: [0007] The technical solution adopted by the present invention to solve the above technical problems is:
[0008] 一种钍钨电极渗碳处理方法, 采用如下步骤: [0008] A method for carburizing a tantalum tungsten electrode adopts the following steps:
[0009] 步骤 (一) : 预处理, 将电极和压具进行清洗, 之后干燥; [0009] Step (1): pre-treating, cleaning the electrode and the presser, and then drying;
[0010] 步骤 (二) : 烧氢, 对预处理过的电极进行高温烧氢, 温度在 950~1200°C, 然 后冷却至常温; [0010] Step (2): burning hydrogen, the pretreated electrode is subjected to high temperature hydrogen burning at a temperature of 950 to 1200 ° C, After cooling to normal temperature;
[0011] 步骤 (三) : 涂碳, 在电极的表面和压具的内表面涂覆碳粉, 涂覆总厚度为 0.6 mm- 1.2mm, 然后进行干燥处理;  [0011] Step (3): coating carbon, coating carbon powder on the surface of the electrode and the inner surface of the presser, coating a total thickness of 0.6 mm - 1.2 mm, and then drying;
[0012] 步骤 (四) : 高频处理, 将涂覆有碳粉的电极放于涂覆有碳粉的压具内, 电极 放置于高频线圈的中间区域, 高频处理所用的高频线圈的电流逐渐增大, 并且 在最大电流吋停留 10~15分钟, 然后在高频线圈内退火, 将电极冷却至 550~ 600[0012] Step (4): high-frequency treatment, placing the electrode coated with carbon powder in a presser coated with carbon powder, the electrode is placed in the middle portion of the high-frequency coil, and the high-frequency coil used for high-frequency processing The current gradually increases and stays at the maximum current for 10 to 15 minutes, then anneals in the high frequency coil, and cools the electrode to 550~600.
°C, 再取出自然冷却至常温; °C, then take out and naturally cool to normal temperature;
[0013] 步骤 (五) : 二次涂碳, 在高频处理过的电极的表面和压具的内表面涂覆碳粉[0013] Step (5): secondary carbon coating, coating the surface of the high frequency treated electrode and the inner surface of the presser with carbon powder
, 涂覆总厚度约为 0.6mm~1.2mm, 然后进行干燥处理; , the total thickness of the coating is about 0.6mm~1.2mm, and then dried;
[0014] 步骤 (六) : 高温真空处理, 将高频处理后的电极重新涂覆碳粉, 进行高温真 空处理, 温度升高, 在最高温度吋停留 2~3h, 然后退火后再冷却, 在电极表面 形成渗碳层。 [0014] Step (6): high-temperature vacuum treatment, re-coating the high-frequency treated electrode with carbon powder, performing high-temperature vacuum treatment, increasing the temperature, staying at the highest temperature for 2~3h, then annealing and then cooling, A carburized layer is formed on the surface of the electrode.
[0015] 优选的, 在步骤 (一) 中, 清洗过程为, 将电极和压具分别依次用碱液、 酸液 、 过氧化氢溶液、 甲酸溶液清洗, 清洗过程为, 将电极放入碱液中, 超声震荡 , 取出, 再放入 99.999%纯水中清洗, 然后将用纯水清洗过的电极再放入酸液中 , 超声震荡, 取出, 再放入纯水中清洗, 取出, 然后再放入 H 20 2: CH 20 2: H 2 0体积比为 1 : 1: 1的溶液中, 超声震荡, 然后用纯水清洗, 然后再放入 99.999% 热纯水超声清洗, 最后用酒精脱水并干燥。 [0015] Preferably, in the step (1), the cleaning process is: sequentially cleaning the electrode and the pressure tool with an alkali solution, an acid solution, a hydrogen peroxide solution, a formic acid solution, and the cleaning process is: placing the electrode in the alkali solution In the middle, the ultrasonic wave is shaken, taken out, and then washed in 99.999% pure water. Then the electrode cleaned with pure water is placed in the acid solution, ultrasonically shaken, taken out, washed in pure water, taken out, and then Put in a solution of H 2 0 2 : CH 2 0 2 : H 2 0 in a volume ratio of 1: 1: 1, ultrasonically shake, then rinse with pure water, then add 99.999% hot pure water for ultrasonic cleaning, and finally use Alcohol is dehydrated and dried.
[0016] 优选地, 在步骤 (三) 中, 电极的表面和压具的内表面涂碳层数为至少 2层, 每层涂碳厚度为 0.2mm~0.5mm; 步骤 (五) 中, 电极的表面和压具的内表面涂 碳层数为至少 2层, 每层涂碳厚度为 0.2mm~0.5mm。 [0016] Preferably, in the step (3), the surface of the electrode and the inner surface of the presser are coated with at least 2 layers of carbon, and each layer is coated with a thickness of 0.2 mm to 0.5 mm ; in step (5), the electrode The surface of the surface and the inner surface of the presser is coated with at least 2 layers of carbon, and each layer is coated with a carbon thickness of 0.2 mm to 0.5 mm.
[0017] 优选地, 步骤 (三) 中, 电极的表面和压机的内表面涂碳层数为 3层, 每层涂 碳厚度为 0.2mm; 步骤 (五) 中, 电极的表面和压具的内表面涂碳层数为 3层, 每层涂碳厚度为 0.2mm。  [0017] Preferably, in step (3), the surface of the electrode and the inner surface of the press are coated with 3 layers of carbon, and each layer is coated with a thickness of 0.2 mm; in step (5), the surface of the electrode and the presser The inner surface is coated with 3 layers of carbon, and each layer is coated with a carbon thickness of 0.2 mm.
[0018] 优选地, 在步骤 (三)和步骤 (五)中所用的分散剂以及碳粉浓度一致, 涂覆碳粉 的过程为, 将碳粉分散在乙酸丁酯和硝化棉混合溶剂, 分散浓度为 20%~25<¾ , 在电极的表面和压具的内表面涂覆分散有碳粉的上述溶液, 然后进行干燥处理 [0019] 在涂碳过程中, 对电极的表面和压具的内表面涂碳的方式由一次性涂碳改成多 次涂碳, 是为了涂碳层更均匀, 在高频渗碳与高真空渗碳中, 渗碳更均匀, 延 长电极的寿命。 [0018] Preferably, the dispersant and the carbon powder used in the step (3) and the step (5) have the same concentration, and the carbon powder is coated by dispersing the carbon powder in a mixed solvent of butyl acetate and nitrocellulose, and dispersing The concentration is 20%~25<3⁄4, and the above solution with carbon powder is coated on the surface of the electrode and the inner surface of the press, and then dried. [0019] In the carbon coating process, the surface of the electrode and the inner surface of the presser are coated with carbon from one-time carbon coating to multiple carbon coating, in order to coat the carbon layer more uniformly, high-frequency carburizing and high In vacuum carburizing, carburization is more uniform, prolonging the life of the electrode.
[0020] 优选地, 步骤 (四) 中, 高频处理的电流呈阶梯式升高, 高频处理的最大电流 为 45~50A。  [0020] Preferably, in step (4), the current of the high frequency processing is stepped up, and the maximum current of the high frequency processing is 45~50A.
[0021] 优选地, 在步骤 (四)中, 高频处理吋, 电极温度逐渐升高, 最高温度范围为 150 0~1800。C。  [0021] Preferably, in step (4), after high frequency processing, the electrode temperature is gradually increased, and the maximum temperature range is 150 0 to 1800. C.
[0022] 优选地, 在步骤 (六) 中, 温度从 0°C逐渐升至 1000°C, 然后停留 10分钟, 继 续升温, 最高温度为 1750~2100°C, 然后在最高温度吋停留 2~3h, 然后退火至 60 0~700°C, 之后自然冷却。  [0022] Preferably, in step (6), the temperature is gradually increased from 0 ° C to 1000 ° C, then stay for 10 minutes, continue to heat up, the maximum temperature is 1750 ~ 2100 ° C, and then stay at the highest temperature 2 2 ~ 3h, then annealed to 60 0~700 °C, then naturally cooled.
[0023] 一种利用上述工艺所制成的钍钨电极, 钍钨电极的渗碳层, 厚度为 80μηι~110μ m。  [0023] A tantalum tungsten electrode produced by the above process, the carburized layer of the tantalum tungsten electrode, having a thickness of 80 μηι to 110 μm.
发明的有益效果  Advantageous effects of the invention
有益效果  Beneficial effect
[0024] 在本发明中, 采用压具对电极进行保护, 避免碳料流失或蒸发, 在步骤 (二)中 , 高温烧氢可以去除杂质, 保证电极材料的纯度, 防止灯管玻壳黑化, 避免灯 光强度变弱等问题。 由于电极渗碳过程中, 对电极进行高频处理, 即步骤 (四 ) 电极材料发生相变, 碳原子容易深入金属内部, 对电极两次涂碳, 如步骤 ( 三) 和步骤 (五) , 同样是为了能使电极材料能最大限度的与碳结合, 形成较 厚的渗碳层, 同吋可增加电极寿命。  [0024] In the present invention, the electrode is protected by a presser to avoid carbon loss or evaporation. In the step (2), high temperature hydrogen burning can remove impurities, ensure the purity of the electrode material, and prevent the bulb from being blackened. , to avoid problems such as weakened light intensity. Due to the high frequency treatment of the electrode during the carburizing process, the step (4) electrode material phase change, the carbon atom easily penetrates into the metal interior, and the electrode is twice coated with carbon, as in steps (3) and (5), The same is to enable the electrode material to be combined with carbon to a maximum extent to form a thick carburized layer, which can increase the electrode life.
对附图的简要说明  Brief description of the drawing
附图说明  DRAWINGS
[0025] 图 1 : 实施例 1的高频处理电流变化曲线图  [0025] FIG. 1 : High-frequency processing current variation curve of Embodiment 1
[0026] 图 2: 实施例 1的高真空处理温度变化曲线图 2: High vacuum processing temperature change curve of Example 1
实施该发明的最佳实施例  BEST MODE FOR CARRYING OUT THE INVENTION
本发明的最佳实施方式  BEST MODE FOR CARRYING OUT THE INVENTION
[0027] 在此处键入本发明的最佳实施方式描述段落。 本发明的实施方式 [0027] The paragraphs describing the best mode of the invention are entered here. Embodiments of the invention
[0028] 为了使本发明的目的、 技术方案及优点更加清楚明白, 以下结合附图及实施例 , 对本发明进行进一步详细说明。 应当理解, 此处所描述的具体实施例仅仅用 以解释本发明, 并不用于限定本发明。  The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
[0029] 实施例 1、  [0029] Embodiment 1,
[0030] 钍钨电极渗碳处理工艺步骤如下:  [0030] The step of carburizing the tungsten electrode is as follows:
[0031] (1) 电极的预处理: 先将电极放入 0.06g/mL的 NaOH溶液中, 超声震荡 15min [0031] (1) Electrode pretreatment: The electrode is first placed in a 0.06 g/mL NaOH solution, and ultrasonically shaken for 15 min.
, 然后用蒸馏水清洗, 然后再置入 HC1:H 2 , then rinse with distilled water and then place HC1:H 2
0体积比 1 : 1的溶液中, 超声震荡 10min, 然后用蒸馏水清洗, 然后将电极放入 H 20 2: CH 20 2: H 20为 1 : 1: 1的溶液中, 超声震荡 10min, 然后用蒸馏水清洗 , 并放入热纯水超声清洗, 再用酒精脱水, 完了用热风机吹干。 0 in a volume ratio of 1: 1 solution, ultrasonically shake for 10 min, then rinse with distilled water, then place the electrode in a solution of H 2 0 2 : CH 2 0 2 : H 2 0 of 1: 1:1, ultrasonically oscillate for 10 min. Then, it is washed with distilled water, ultrasonically cleaned in hot pure water, dehydrated with alcohol, and dried with a hot air blower.
[0032] 压具的处理方法同上。 [0032] The processing method of the presser is the same as above.
[0033] (2) 烧氢: 将电极和压具分别置于 1000°C的条件下烧氢还原, 将电极材料中 的杂质除去, 然后冷却至常温。  (2) Hydrogen burning: The electrode and the presser were respectively subjected to hydrogen reduction under conditions of 1000 ° C to remove impurities in the electrode material, and then cooled to normal temperature.
[0034] (3) 涂碳: 在电极表面和压具的内表面涂覆碳粉浓度为 20%的有机乙酸丁酯- 硝化棉溶液, 放进 50°C恒温干燥烤箱中进行干燥, 碳粉厚度约为 0.2mm, 然后再 重复前述涂碳方法两次, 此吋电极表面碳粉的总厚度为 0.6mm。  [0034] (3) carbon coating: on the surface of the electrode and the inner surface of the press is coated with a 20% carbonic acid butyl acetate-nitrocellulose solution, placed in a 50 ° C constant temperature drying oven for drying, carbon powder The thickness is about 0.2 mm, and then the above carbon coating method is repeated twice, and the total thickness of the carbon powder on the surface of the crucible electrode is 0.6 mm.
[0035] (4) 高频处理: 将涂覆有碳粉的电极放置于涂覆有碳粉的压具内, 电极放置 于高频线圈的中间区域, 按照图 1所示的电流变化曲线进行高频处理, 处理方式 为, 将通入 17A的电流 2分钟, 对电极和压具进行预热, 然后电流增大到 25A, 加 热 5分钟, 然后电流增大到 45A, 电流在 45A吋停留 6分钟, 在此过程中, 电极温 度逐渐升高, 温度最高达到 1500°C, 待 10分钟后退火, 将电极冷却至 550°C, 再 取出自然冷却至常温。  [0035] (4) High-frequency treatment: The electrode coated with carbon powder is placed in a presser coated with carbon powder, and the electrode is placed in the middle portion of the high-frequency coil, according to the current change curve shown in FIG. High-frequency treatment, the processing method is: the current of 17A will be passed for 2 minutes, the electrode and the press will be preheated, then the current will increase to 25A, heat for 5 minutes, then the current will increase to 45A, and the current will stay at 45A. Minutes, during this process, the electrode temperature gradually rises to a temperature of up to 1500 ° C. After 10 minutes, the electrode is annealed, the electrode is cooled to 550 ° C, and then naturally cooled to room temperature.
[0036] (5) 二次涂碳: 将电极的表面和压具的内表面再次涂覆含有碳粉的有机溶液 , 干燥, 然后再在重复进行涂碳两次, 三次涂覆总厚度为 0.6 mm。  [0036] (5) Secondary carbon coating: The surface of the electrode and the inner surface of the presser are again coated with an organic solution containing carbon powder, dried, and then carbon coated twice, and the total thickness of the coating is 0.6. Mm.
[0037] (6) 高温真空处理: 将电极至于压具内, 按照图 2所示的温度变化曲线对电极 进行处理, 温度从常温逐渐升高, 当温度升高至 1000°C吋, 进行保温 10分钟, 在 此段吋间内使金相组织均匀化, 也使电极受热更加均匀, 达到升温所需要达到 的组织转变。 [0037] (6) High-temperature vacuum treatment: The electrode is placed in the press, and the electrode is treated according to the temperature change curve shown in FIG. 2, the temperature is gradually increased from the normal temperature, and when the temperature is raised to 1000 ° C, the heat is maintained. 10 minutes, at The metallographic structure is homogenized in this section, and the electrode is heated more evenly to achieve the tissue transformation required for temperature rise.
[0038] 之后温度继续升温至 1750°C, 在 1750°C停留 2.5h, 然后退火至 600°C, 然后自然 冷却至常温, 在电极表面形成均匀的 W 2C渗碳层, 内部晶界为粒状纹理, 粒状 纹理的晶粒能使电极发光稳定, 减缓电极的消耗速度。 [0038] Then the temperature continues to rise to 1750 ° C, stay at 1750 ° C for 2.5 h, then annealed to 600 ° C, and then naturally cooled to room temperature, forming a uniform W 2 C carburized layer on the surface of the electrode, the internal grain boundary is Granular texture, grainy grain of the grain can stabilize the light of the electrode and slow down the consumption of the electrode.
[0039] 采用金相显微镜测得渗碳层的厚度为 100μηι。  [0039] The thickness of the carburized layer was measured by a metallographic microscope to be 100 μm.
[0040] 实施例 2、 [0040] Embodiment 2
[0041] 钍钨电极渗碳处理工艺步骤如下:  [0041] The step of carburizing the tungsten electrode is as follows:
[0042] (1) 电极的预处理: 先将电极放入 0.06g/mL的 NaOH溶液中, 超声震荡 lOmin [0042] (1) Electrode pretreatment: First, the electrode is placed in a 0.06 g/mL NaOH solution, and the ultrasonic vibration is lOmin.
, 然后用蒸馏水清洗, 然后再置入 HCl: H 2 , then rinse with distilled water, then place HCl: H 2
0体积比 1:1的溶液中, 超声震荡 10min, 然后用蒸馏水清洗, 然后将电极放 ΛΗ 2 0 2: CH 20 2: H 20为 1 : 1: 1的溶液中, 超声震荡 10min, 然后用蒸馏水清洗, 并放入热纯水超声清洗, 再用酒精脱水, 完了用热风机吹干。 0 in a volume ratio of 1:1 solution, ultrasonically oscillated for 10 min, then rinsed with distilled water, and then the electrode was placed in a solution of 2 0 2 : CH 2 0 2 : H 2 0 of 1: 1:1, ultrasonically oscillated for 10 min, Then, it is washed with distilled water, ultrasonically cleaned in hot pure water, dehydrated with alcohol, and dried by a hot air blower.
[0043] 压具的处理方法同上。 [0043] The processing method of the presser is the same as above.
[0044] (2) 烧氢: 将电极和压具分别置于 1200°C的条件下烧氢还原, 将电极材料中 的杂质除去。  (2) Hydrogen burning: The electrode and the presser were respectively subjected to hydrogen reduction under the condition of 1200 ° C to remove impurities in the electrode material.
[0045] (3) 涂碳: 在电极表面和压具的内表面涂覆含有碳粉浓度为 25%的有机乙酸 丁酯-硝化棉溶液, 放入 50°C恒温干燥烤箱中干燥, 碳粉的厚度为 0.5mm, 然后 再次涂覆, 干燥, 两次涂覆碳粉的总厚度为 1.0mm。  [0045] (3) carbon coating: coating the surface of the electrode and the inner surface of the press with an organic butyl acetate-nitrocellulose solution containing a carbon powder concentration of 25%, placed in a constant temperature drying oven at 50 ° C, dried, carbon powder The thickness was 0.5 mm, and then coated again, dried, and the total thickness of the twice coated toner was 1.0 mm.
[0046] (4) 高频处理: 将涂覆有碳粉的电极放置于涂覆有碳粉的压具内, 电极放置 于高频线圈的中间区域, 进行高频处理, 处理方式为, 将通入 18A的电流 2分钟 , 对电极和压具进行预热, 然后电流增大到 25A, 加热 5分钟, 然后电流增大到 5 OA, 并停留, 此吋电极的温度逐渐升高, 温度最高达到 1800°C, 50A的电流停留 15分钟后退火, 将电极冷却至 600°C, 再取出自然冷却至常温。  [0046] (4) High-frequency treatment: the electrode coated with carbon powder is placed in a presser coated with carbon powder, and the electrode is placed in the middle portion of the high-frequency coil for high-frequency treatment, and the treatment method is Passing the current of 18A for 2 minutes, preheating the electrode and presser, then increasing the current to 25A, heating for 5 minutes, then increasing the current to 5 OA, and staying, the temperature of the electrode is gradually increased, the highest temperature After reaching 1800 ° C, the current of 50 A was left to stand for 15 minutes, and then the electrode was cooled to 600 ° C, and then taken out and naturally cooled to normal temperature.
[0047] (5) 二次涂碳: 将电极的表面和压具的内表面再次涂覆含有碳粉的有机溶液 , 干燥, 重复四次涂覆总厚度为 1.2 mm。  (5) Secondary carbon coating: The surface of the electrode and the inner surface of the presser were again coated with an organic solution containing carbon powder, dried, and the total thickness of the coating was repeated four times with a thickness of 1.2 mm.
[0048] (6) 高温真空处理: 将电极至于压具内, 温度从常温升至 2100°C, 在 2100°C 停留 3h, 然后退火至 700°C, 然后自然冷却至常温, 在电极表面形成均匀的 W 2C 渗碳层, 内部晶界为粒状纹理。 [0048] (6) High-temperature vacuum treatment: The electrode is placed in the press, the temperature is raised from normal temperature to 2100 ° C, stayed at 2100 ° C for 3 h, then annealed to 700 ° C, and then naturally cooled to room temperature to form on the electrode surface. Uniform W 2 C Carburized layer, internal grain boundary is granular texture.
[0049] 采用金相显微镜测得渗碳层的厚度为 80μηι。 [0049] The thickness of the carburized layer was measured by a metallographic microscope to be 80 μm.
[0050] 实施例 3、 [0050] Embodiment 3
[0051] 钍钨电极渗碳处理工艺步骤如下:  [0051] The step of carburizing the tungsten electrode is as follows:
[0052] (1) 电极的预处理: 先将电极放入 0.06g/mL的 NaOH溶液中, 超声震荡, 然后 用蒸馏水清洗, 然后再置入 1 : 1的 HC1溶液中, 超声震荡, 然后用蒸馏水清洗, 然后将电极放入11 20 2:。8 20 2: H 20为 1 : 1: 1的溶液中, 超声震荡, 然后用蒸 馏水清洗, 并放入热纯水超声清洗, 再用酒精脱水, 完了用热风机吹干。 [0052] (1) Pretreatment of the electrode: First, the electrode is placed in a 0.06 g/mL NaOH solution, ultrasonically shaken, then washed with distilled water, and then placed in a 1:1 HCl solution, ultrasonically shaken, and then used. Rinse with distilled water and place the electrode in 11 2 0 2:. 8 2 0 2: H 2 0 is 1: 1: 1 solution, ultrasonically shaken, then washed with distilled water, and then placed in hot pure water for ultrasonic cleaning, then dehydrated with alcohol, and then dried with a hot air blower.
[0053] 压具的处理方法同上。  [0053] The processing method of the presser is the same as above.
[0054] (2) 烧氢: 将电极和压具分别置于 1000°C的条件下烧氢还原, 将电极材料中 的杂质除去。  (2) Hydrogen burning: The electrode and the presser were respectively subjected to hydrogen reduction under conditions of 1000 ° C to remove impurities in the electrode material.
[0055] (3) 涂碳: 在电极表面和压具的内表面涂覆含有碳粉浓度为 23%的有机溶液 三次, 干燥后碳粉的总厚度为 0.8mm。  (3) Carbon coating: An organic solution containing a carbon powder concentration of 23% was applied to the surface of the electrode and the inner surface of the presser three times, and the total thickness of the carbon powder after drying was 0.8 mm.
[0056] (4) 高频处理: 将涂覆有碳粉的电极放置于涂覆有碳粉的压具内, 电极位于 高频线圈的中间区域, 按照图 1所示的电流变化曲线进行高频处理, 处理方式为 , 将通入 17A的电流 2分钟, 对电极和压具进行预热, 然后电流增大到 25A, 加热 5分钟, 然后电流增大到 45A, 并停留, 此吋电极温度持续升高, 最高温度达到 1 750°C, 45A的电流停留 6分钟后退火, 将电极冷却至 550°C, 再取出自然冷却至 常温。  [0056] (4) High-frequency treatment: The electrode coated with carbon powder is placed in a presser coated with carbon powder, and the electrode is located in the middle portion of the high-frequency coil, and is high according to the current change curve shown in FIG. Frequency processing, the processing method is: the current of 17A will be passed for 2 minutes, the electrode and the presser are preheated, then the current is increased to 25A, heated for 5 minutes, then the current is increased to 45A, and the temperature is maintained. Continued to rise, the maximum temperature reached 1 750 ° C, the current of 45 A stayed for 6 minutes and then annealed, the electrode was cooled to 550 ° C, and then naturally cooled to room temperature.
[0057] (5) 二次涂碳: 将电极的表面和压具的内表面再次涂覆含有碳粉的有机溶液 三次, 干燥后碳粉的总厚度为 0.8mm。  (5) Secondary carbon coating: The surface of the electrode and the inner surface of the presser were again coated with the organic solution containing carbon powder three times, and the total thickness of the carbon powder after drying was 0.8 mm.
[0058] (6) 高温真空处理: 将电极至于压具内, 温度从常温升至 2000°C, 在 2000°C 停留 2 h, 然后退火至 680°C, 然后自然冷却至常温, 在电极表面形成均匀的 W 2C 渗碳层, 内部晶界为粒状纹理。 [0058] (6) High-temperature vacuum treatment: the electrode is placed in the press, the temperature is raised from normal temperature to 2000 ° C, stayed at 2000 ° C for 2 h, then annealed to 680 ° C, and then naturally cooled to room temperature, on the electrode surface A uniform W 2 C carburized layer is formed, and the inner grain boundary is a granular texture.
[0059] 采用金相显微镜测得渗碳层的厚度为 80μηι。 [0059] The thickness of the carburized layer measured by a metallographic microscope was 80 μm.
[0060] 以上所述, 仅为本发明较佳的具体实施方式, 但本发明的保护范围并不局限于 此, 任何熟悉本技术领域的技术人员在本发明揭露的技术范围内, 可轻易想到 的变化或替换, 都应涵盖在本发明的保护范围之内。 因此, 本发明的保护范围 应该以权利要求的保护范围为准。 The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto, and any person skilled in the art can easily think of within the technical scope disclosed by the present invention. Changes or substitutions are intended to be included within the scope of the invention. Therefore, the scope of protection of the present invention The scope of protection of the claims shall prevail.

Claims

权利要求书 Claim
[权利要求 1] 一种钍钨电极渗碳处理工艺, 其特征在于, 采用如下步骤:  [Claim 1] A process for carburizing a tantalum tungsten electrode, characterized in that the following steps are taken:
[权利要求 2] 步骤 (一) : 预处理, 将电极和压具进行清洗, 之后干燥; [Claim 2] Step (1): Pretreatment, cleaning the electrode and the press, and then drying;
[权利要求 3] 步骤 (二) : 烧氢, 对预处理过的电极进行高温烧氢, 温度在 950 12 [Claim 3] Step (2): Hydrogen burning, high temperature hydrogen burning of the pretreated electrode at a temperature of 950 12
00°C, 然后冷却至常温;  00 ° C, and then cooled to room temperature;
[权利要求 4] 步骤 (三) : 涂碳, 在电极的表面和压具的内表面涂覆碳粉, 涂覆总 厚度为 0.6mm~1.2mm, 然后进行干燥处理;  [Claim 4] Step (3): coating carbon, applying carbon powder on the surface of the electrode and the inner surface of the presser, coating a total thickness of 0.6 mm to 1.2 mm, and then performing drying treatment;
[权利要求 5] 步骤 (四) : 高频处理, 将涂覆有碳粉的电极放于涂覆有碳粉的压具 内, 电极放置于高频线圈的中间区域, 高频处理所用的高频线圈的电 流逐渐增大, 并且在最大电流吋停留 10~15分钟, 然后在高频线圈内 退火, 将电极冷却至 550~ 600 °C, 再取出自然冷却至常温; [Claim 5] Step (4): High-frequency treatment, the electrode coated with carbon powder is placed in a presser coated with carbon powder, and the electrode is placed in the middle portion of the high-frequency coil, which is used for high-frequency processing. The current of the frequency coil gradually increases, and stays at the maximum current for 10 to 15 minutes, then anneals in the high frequency coil, cools the electrode to 550~600 °C, and then naturally cools to normal temperature;
[权利要求 6] 步骤 (五) : 二次涂碳, 在高频处理过的电极的表面和压具的内表面 涂覆碳粉, 涂覆总厚度为 0.6mm~1.2mm, 然后进行干燥处理;  [Claim 6] Step (5): secondary carbon coating, coating the surface of the high-frequency treated electrode and the inner surface of the press with a total thickness of 0.6 mm to 1.2 mm, followed by drying ;
[权利要求 7] 步骤 (六) : 高温真空处理, 将高频处理后的电极重新涂覆碳粉, 进 行高温真空处理, 温度升高, 在最高温度吋停留 2~3h, 然后退火后再 冷却, 在电极表面形成渗碳层。 [Claim 7] Step (6): High-temperature vacuum treatment, re-coating the high-frequency treated electrode with carbon powder, performing high-temperature vacuum treatment, increasing the temperature, staying at the highest temperature for 2~3h, then annealing and then cooling , a carburized layer is formed on the surface of the electrode.
[权利要求 8] 根据权利要求 1所述的钍钨电极渗碳处理工艺, 其特征在于: 步骤 ( 一) 中, 所述清洗过程为, 将电极和压具分别依次用碱液、 酸液、 过 氧化氢溶液、 甲酸溶液清洗, 清洗过程为, 将电极放入碱液中, 超声 震荡, 取出, 再放入 99.999%的纯水中清洗; 然后将用纯水清洗过的 电极再放入酸液中, 超声震荡, 取出, 再放入纯水中清洗, 取出; 然 后再放入 H 20 2: CH 20 2: H 20体积比为 1 : 1: 1的溶液中, 超声震荡 , 然后用纯水清洗, 然后再放入 99.999%热纯水超声清洗, 最后用酒 精脱水并干燥。 [Claim 8] The carburizing treatment process of the tantalum tungsten electrode according to claim 1, wherein: in the step (1), the cleaning process is: sequentially using an alkali solution, an acid solution, and an electrode and a presser, respectively. The hydrogen peroxide solution and the formic acid solution are cleaned. The cleaning process is as follows: the electrode is placed in an alkali solution, ultrasonically shaken, taken out, and then washed in 99.999% pure water; then the electrode cleaned with pure water is placed in the acid. In the solution, ultrasonically shake, take out, and then put it in pure water for cleaning, take it out; then put H 2 0 2 : CH 2 0 2 : H 2 0 in a volume ratio of 1: 1:1, the ultrasonic vibration, It is then washed with pure water, then ultrasonically cleaned with 99.999% hot water, finally dehydrated with alcohol and dried.
[权利要求 9] 根据权利要求 1所述的钍钨电极渗碳处理工艺, 其特征在于: 步骤 ( 三) 中, 电极的表面和压具的内表面涂碳层数为至少 2层, 每层涂碳 厚度为 0.2mm~0.5mm; 步骤 (五) 中, 电极的表面和压具的内表面 涂碳层数为至少 2层, 每层涂碳厚度为 0.2mm~0.5mm。 根据权利要求 3所述的钍钨电极渗碳处理工艺, 其特征在于: 步骤 ( 三) 中, 电极的表面和压机的内表面涂碳层数为 3层, 每层涂碳厚度 为 0.2mm; 步骤 (五) 中, 电极的表面和压具的内表面涂碳层数为 3 层, 每层涂碳厚度为 0.2mm。 [Claim 9] The carburizing treatment process of the tantalum tungsten electrode according to claim 1, wherein: in the step (3), the surface of the electrode and the inner surface of the presser are coated with at least two layers of carbon layers, each layer The thickness of the coated carbon is 0.2 mm to 0.5 mm ; in the step (5), the surface of the electrode and the inner surface of the presser are coated with at least 2 layers of carbon, and the thickness of each layer is 0.2 mm to 0.5 mm. The carburizing treatment process of the tantalum tungsten electrode according to claim 3, wherein in the step (3), the surface of the electrode and the inner surface of the press are coated with 3 layers of carbon, and each layer is coated with a thickness of 0.2 mm. In step (5), the surface of the electrode and the inner surface of the presser are coated with 3 layers of carbon, and each layer is coated with a thickness of 0.2 mm.
根据权利要求 3所述的钍钨电极渗碳处理工艺, 其特征在于: 在步骤The tantalum tungsten electrode carburizing treatment process according to claim 3, wherein:
(三) 和步骤 (五) 中, 涂覆碳粉的过程为, 将碳粉分散在乙酸丁酯 -硝化棉溶剂, 分散浓度为 20%~25<¾, 在电极的表面和压具的内表面 涂覆分散有碳粉的上述调配溶液, 然后进行干燥处理。 (3) In step (5), the process of coating the carbon powder is to disperse the carbon powder in the butyl acetate-nitrocellulose solvent at a dispersion concentration of 20%~25<3⁄4, on the surface of the electrode and the pressure tool. The above formulated solution in which carbon powder is dispersed is applied to the surface, followed by drying.
根据权利要求 1所述的钍钨电极渗碳处理工艺, 其特征在于: 步骤 ( 四) 中, 高频处理的电流呈阶梯式升高, 高频处理的最大电流为 45~5 0A。 The carburizing treatment process of the tantalum tungsten electrode according to claim 1, wherein in the step (4), the current of the high frequency processing is stepwisely increased, and the maximum current of the high frequency processing is 45 to 50 A.
根据权利要求 1所述的钍钨电极渗碳处理工艺, 其特征在于: 步骤 ( 四) 中, 高频处理吋, 电极温度逐渐升高, 最高温度范围为 1500~180 0。C。 The carburizing treatment process of the tantalum tungsten electrode according to claim 1, wherein in the step (4), the high temperature treatment is performed, and the temperature of the electrode is gradually increased, and the maximum temperature range is 1500 to 180 0. C.
根据权利要求 1所述的钍钨电极渗碳处理工艺, 其特征在于: 在步骤 (六) 中, 温度从室温逐渐升高, 最高温度为 1750~2100°C, 然后在 最高温度吋停留 2~3h, 然后退火至 600~700°C, 之后自然冷却。 The tantalum tungsten electrode carburizing treatment process according to claim 1, wherein in step (6), the temperature is gradually increased from room temperature, the maximum temperature is 1750-2100 ° C, and then stays at the highest temperature 2 2~ 3h, then annealed to 600~700 °C, then naturally cooled.
一种利用 1~8任一所述的工艺制成的钍钨电极, 其特征在于: 钍钨电 极的渗碳层, 厚度为 80μηι~110μιη。 A tantalum tungsten electrode produced by the process of any of 1 to 8, characterized in that: the carburized layer of the tantalum tungsten electrode has a thickness of 80 μηι to 110 μιη.
PCT/CN2015/100300 2015-12-31 2015-12-31 Carburising treatment process for thorium-tungsten electrode WO2017113382A1 (en)

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